PROCEEDINGS VOLUME 3328
5TH ANNUAL INTERNATIONAL SYMPOSIUM ON SMART STRUCTURES AND MATERIALS | 1-5 MARCH 1998
Smart Structures and Materials 1998: Smart Electronics and MEMS
5TH ANNUAL INTERNATIONAL SYMPOSIUM ON SMART STRUCTURES AND MATERIALS
1-5 March 1998
San Diego, CA, United States
Keynote Session
Proc. SPIE 3328, CMOS MEMS technology and CAD: the case of thermal microtransducers, 0000 (20 July 1998); doi: 10.1117/12.320157
Simulation and Modeling
Proc. SPIE 3328, Development of a low-cost x-ray mask for high-aspect-ratio MEM smart structures, 0000 (20 July 1998); doi: 10.1117/12.320168
Proc. SPIE 3328, Systematic design of microactuators using topology optimization, 0000 (20 July 1998); doi: 10.1117/12.320179
Proc. SPIE 3328, MEMS design rule checking: a batch approach for remote operation, 0000 (20 July 1998); doi: 10.1117/12.320190
Proc. SPIE 3328, MEMS system design and verification tools, 0000 (20 July 1998); doi: 10.1117/12.320196
Proc. SPIE 3328, IDT sensors for detection of ice on rotorcraft, 0000 (20 July 1998); doi: 10.1117/12.320197
Technology and Fabrication
Proc. SPIE 3328, Integration technology, 0000 (20 July 1998); doi: 10.1117/12.320198
Proc. SPIE 3328, Particle arrangement method and the fixing of arranged particles in the particle assemblage, 0000 (20 July 1998); doi: 10.1117/12.320199
Proc. SPIE 3328, Low-temperature quartz-to-silicon bonding for SAW applications, 0000 (20 July 1998); doi: 10.1117/12.320200
Proc. SPIE 3328, Planarization of metallic parts for single- and multilevel (S)LIGA, 0000 (20 July 1998); doi: 10.1117/12.320158
Proc. SPIE 3328, High-etch-rate deep anisotropic plasma etching of silicon for MEMS fabrication, 0000 (20 July 1998); doi: 10.1117/12.320159
Proc. SPIE 3328, Determination of mechanical material properties of piezoelectric ZnO films, 0000 (20 July 1998); doi: 10.1117/12.320160
Smart Antennas and Wireless Telemetry
Proc. SPIE 3328, Applied research in remotely queried embedded microsensors, 0000 (20 July 1998); doi: 10.1117/12.320162
Proc. SPIE 3328, New integrated piezoelectric-dielectric microstrip antenna for dual wireless actuation and sensing functions, 0000 (20 July 1998); doi: 10.1117/12.320163
Proc. SPIE 3328, Design actuation and control of active patch antennas, 0000 (20 July 1998); doi: 10.1117/12.320164
Proc. SPIE 3328, Piezoceramic actuated aperture antennas, 0000 (20 July 1998); doi: 10.1117/12.320165
Packaging
Proc. SPIE 3328, MEMS packaging: state of the art and future trends, 0000 (20 July 1998); doi: 10.1117/12.320166
Proc. SPIE 3328, Versatile microflex-based interconnection technique, 0000 (20 July 1998); doi: 10.1117/12.320167
Proc. SPIE 3328, Flip-chip packaging for smart MEMS, 0000 (20 July 1998); doi: 10.1117/12.320169
Proc. SPIE 3328, Micromachined wet cell for a Love-wave liquid sensor, 0000 (20 July 1998); doi: 10.1117/12.320170
Chemical Sensors
Proc. SPIE 3328, Bioluminescent bioreporter integrated circuits (BBICs), 0000 (20 July 1998); doi: 10.1117/12.320171
Proc. SPIE 3328, Performance optimization of a Love wave device for biosensing, 0000 (20 July 1998); doi: 10.1117/12.320172
Proc. SPIE 3328, Flip-chip packaged CMOS chemical microsystem for detection of volatile organic compounds, 0000 (20 July 1998); doi: 10.1117/12.320173
Proc. SPIE 3328, CMOS chemical microsensors based on resonant cantilever beams, 0000 (20 July 1998); doi: 10.1117/12.320174
Interface Electronics
Proc. SPIE 3328, Low-cost integrated multiple-sensor electronics, 0000 (20 July 1998); doi: 10.1117/12.320175
Proc. SPIE 3328, Smart measurement system for resistive (bridge) or capacitive sensors, 0000 (20 July 1998); doi: 10.1117/12.320176
Proc. SPIE 3328, Integral design of a microacoustic wave-based sensor device, 0000 (20 July 1998); doi: 10.1117/12.320177
Proc. SPIE 3328, Readout electronics scheme in CMOS technology for integration with analog outputs from integrated smart sensors, 0000 (20 July 1998); doi: 10.1117/12.320178
Proc. SPIE 3328, High-temperature pressure transducer interface, 0000 (20 July 1998); doi: 10.1117/12.320180
Proc. SPIE 3328, Multivariable controller implementation using field programmable gate arrays, 0000 (20 July 1998); doi: 10.1117/12.320181
Integrated Microstructures and Systems
Proc. SPIE 3328, High-end low-cost microelectronic fabrication available through MOSIS, 0000 (20 July 1998); doi: 10.1117/12.320182
Proc. SPIE 3328, Surface-micromachined optical polarizers for magneto-optical data storage, 0000 (20 July 1998); doi: 10.1117/12.320183
Proc. SPIE 3328, Highly efficient micro-power converter between a solar cell and a rechargeable lithium-ion battery, 0000 (20 July 1998); doi: 10.1117/12.320184
Proc. SPIE 3328, Test results of a resonant integrated microbeam sensor (RIMS) for acoustic emission monitoring, 0000 (20 July 1998); doi: 10.1117/12.320185
Proc. SPIE 3328, Smart programmable wireless microaccelerometers, 0000 (20 July 1998); doi: 10.1117/12.320186
Microactuators
Proc. SPIE 3328, Integrated packaging concept for an intelligent transducer, 0000 (20 July 1998); doi: 10.1117/12.320187
Proc. SPIE 3328, Three-axis microactuator for smart optical interconnect system, 0000 (20 July 1998); doi: 10.1117/12.320188
Proc. SPIE 3328, Surface-micromachined counter-meshing gears discrimination device, 0000 (20 July 1998); doi: 10.1117/12.320189
Sensor and Actuator Characterization
Proc. SPIE 3328, Optical microactuation in piezoceramics, 0000 (20 July 1998); doi: 10.1117/12.320191
Proc. SPIE 3328, Reduction of uncertainty in the measurement of the piezoresistive coefficients of silicon with a three-element rosette, 0000 (20 July 1998); doi: 10.1117/12.320192
Proc. SPIE 3328, High-aspect-ratio microstructure-covered sheets: fabrication and function, 0000 (20 July 1998); doi: 10.1117/12.320193
Proc. SPIE 3328, Electroless Cu plating of alumina treated with cw CO2 laser radiation, 0000 (20 July 1998); doi: 10.1117/12.320194
Poster Session
Proc. SPIE 3328, Smart chemical sensors using ZnO semiconducting thin films for freshness detection of foods and beverages, 0000 (20 July 1998); doi: 10.1117/12.320195
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