PROCEEDINGS VOLUME 3513
MICROMACHINING AND MICROFABRICATION | 20-24 SEPTEMBER 1998
Microelectronic Structures and MEMS for Optical Processing IV
MICROMACHINING AND MICROFABRICATION
20-24 September 1998
Santa Clara, CA, United States
Micromirrors
Proc. SPIE 3513, Novel beam-steering micromirror device, 0000 (2 September 1998); doi: 10.1117/12.324270
Proc. SPIE 3513, Optical characteristics of GaAs MSM photodetectors flip-chip bonded upon micromirrors using micromachined conductive polymer bumps, 0000 (2 September 1998); doi: 10.1117/12.324282
Proc. SPIE 3513, Modeling and measurement of electrostatic micromirror array fabricated with single-layer polysilicon micromachining technology, 0000 (2 September 1998); doi: 10.1117/12.324283
Proc. SPIE 3513, Design and fabrication of micromirror array with hidden joint structures, 0000 (2 September 1998); doi: 10.1117/12.324284
Micro-Optical Components and Microsensors
Proc. SPIE 3513, Highly sensitive hydrogen sensors using palladium-coated fiber optics with exposed cores and evanescent field interactions, 0000 (2 September 1998); doi: 10.1117/12.324285
Proc. SPIE 3513, Micromachined structure for Si transmission optical components, 0000 (2 September 1998); doi: 10.1117/12.324286
Proc. SPIE 3513, Design and experiment of microelectrode arrays for deformable membrane mirror, 0000 (2 September 1998); doi: 10.1117/12.324263
Proc. SPIE 3513, Micro-optical distance sensor fabricated by the LIGA process, 0000 (2 September 1998); doi: 10.1117/12.324264
Proc. SPIE 3513, Laser amplifiers in optical displays and micromachining systems, 0000 (2 September 1998); doi: 10.1117/12.324265
Optomechanical Switches
Proc. SPIE 3513, Fabrication of replicated high-precision insert elements for micro-optical bench arrangements, 0000 (2 September 1998); doi: 10.1117/12.324266
Proc. SPIE 3513, Optical coupling analysis and vibration characterization for packaging of 2X2 MEMS vertical torsion mirror switches, 0000 (2 September 1998); doi: 10.1117/12.324267
Proc. SPIE 3513, Silicon wafer-scale microfabrication factory using scanning probe microrobots: applications of MOEMS in manufacturing, 0000 (2 September 1998); doi: 10.1117/12.324268
MOEM Devices and Characterization
Proc. SPIE 3513, Extremely high aspect ratio metal structures for suspension of a micro-optical shutter, 0000 (2 September 1998); doi: 10.1117/12.324269
Modulators and Microactuators
Proc. SPIE 3513, Design and fabrication of hidden-spring-structure-type micro-SLM for phase and amplitude modulation, 0000 (2 September 1998); doi: 10.1117/12.324274
Proc. SPIE 3513, Package for systematic design of acousto-optic deflectors, 0000 (2 September 1998); doi: 10.1117/12.324275
Proc. SPIE 3513, High-brightness projection display systems based on the thin-film actuated mirror array (TFAMA), 0000 (2 September 1998); doi: 10.1117/12.324276
MOEM Devices and Characterization
Proc. SPIE 3513, Reshaping technique for MOEM system fabrication, 0000 (2 September 1998); doi: 10.1117/12.324277
Proc. SPIE 3513, Characterization of micro-opto-electro-mechanical devices, 0000 (2 September 1998); doi: 10.1117/12.324278
Proc. SPIE 3513, XY-stage for alignment of optical elements in MOEMS, 0000 (2 September 1998); doi: 10.1117/12.324279
Proc. SPIE 3513, MOEM pressure and other physical sensors using photon tunneling and optical evanescent fields with exponential sensitivities and excellent stabilities, 0000 (2 September 1998); doi: 10.1117/12.324280
Proc. SPIE 3513, Applications of shape-memory alloys in MOEMS and in optics, 0000 (2 September 1998); doi: 10.1117/12.324281
Micromirrors
Proc. SPIE 3513, Microassembly technologies for MEMS, 0000 (2 September 1998); doi: 10.1117/12.324271
Proc. SPIE 3513, Finding markets for microstructures, 0000 (2 September 1998); doi: 10.1117/12.324272
Proc. SPIE 3513, Micromachining technologies for miniaturized communication devices, 0000 (2 September 1998); doi: 10.1117/12.324273
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