PROCEEDINGS VOLUME 3619
OPTOELECTRONICS '99 - INTEGRATED OPTOELECTRONIC DEVICES | 23-29 JANUARY 1999
Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays
OPTOELECTRONICS '99 - INTEGRATED OPTOELECTRONIC DEVICES
23-29 January 1999
San Jose, CA, United States
Characterization of Surface Films
Proc. SPIE 3619, Cross-linking thin film characterization technique for data storage, semiconductor, and flat panel display devices, 0000 (29 March 1999); doi: 10.1117/12.343702
Proc. SPIE 3619, Measurements of thin film disks by surface reflectance analysis, 0000 (29 March 1999); doi: 10.1117/12.343708
Proc. SPIE 3619, Composition and thickness distribution of carbon overcoat films on thin film magnetic disks studied with surface reflectance analyzers, 0000 (29 March 1999); doi: 10.1117/12.343710
Proc. SPIE 3619, Analysis of organic contaminants from silicon wafer and disk surfaces by thermal desorption-GC-MS, 0000 (29 March 1999); doi: 10.1117/12.343711
Characterization of Discrete Surface Features
Proc. SPIE 3619, MR glide inspection for hard disk defect detection, 0000 (29 March 1999); doi: 10.1117/12.343712
Proc. SPIE 3619, Modeled and measured scatter from vias, 0000 (29 March 1999); doi: 10.1117/12.343713
Proc. SPIE 3619, Measurement of scatter from PSL standard spheres deposited on disk surfaces, 0000 (29 March 1999); doi: 10.1117/12.343714
Proc. SPIE 3619, Polarization of light scattered by particles on silicon wafers, 0000 (29 March 1999); doi: 10.1117/12.343715
Characterization of Surface Flatness
Proc. SPIE 3619, High-speed interferometric aluminum disk blank tester, 0000 (29 March 1999); doi: 10.1117/12.343703
Proc. SPIE 3619, Laser Fizeau interferometer for silicon wafer site flatness testing, 0000 (29 March 1999); doi: 10.1117/12.343704
Characterization of Surface Roughness (Texture)
Proc. SPIE 3619, Investigations of smooth surfaces by measuring the BRDF with a stray light sensor in comparison with PSD curves evaluated from topography of large AFM scans, 0000 (29 March 1999); doi: 10.1117/12.343705
Proc. SPIE 3619, Roughness characterization of ultrasmooth surfaces using common-path interferometry, 0000 (29 March 1999); doi: 10.1117/12.343706
Proc. SPIE 3619, TIS, AFM, interferometry, and optical profiler correlation of surface roughness on silicon wafers, 0000 (29 March 1999); doi: 10.1117/12.343707
Characterization of Discrete Surface Features
Proc. SPIE 3619, BeamM2AP: real-time focus, alignment, and M2 measurement of tightly focussed laser beams, 0000 (29 March 1999); doi: 10.1117/12.343709
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