PROCEEDINGS VOLUME 3825
INDUSTRIAL LASERS AND INSPECTION (EUROPTO SERIES) | 14-18 JUNE 1999
Microsystems Metrology and Inspection
INDUSTRIAL LASERS AND INSPECTION (EUROPTO SERIES)
14-18 June 1999
Munich, Germany
Characterization of Microsystem Performance
Proc. SPIE 3825, Role of interfacial properties on MEMS performance and reliability, 0000 (15 September 1999); doi: 10.1117/12.364289
Proc. SPIE 3825, Wafer level inspection for determination of yield of surface-micromachined pressure sensors, 0000 (15 September 1999); doi: 10.1117/12.364296
Proc. SPIE 3825, Investigation of heat transfer in micromirrors, 0000 (15 September 1999); doi: 10.1117/12.364300
MEMS/MOEMS Fabrication
Proc. SPIE 3825, Novel optical sensors fabricated by Si micromachining, 0000 (15 September 1999); doi: 10.1117/12.364301
Proc. SPIE 3825, Preparation of oxinitride optical waveguides with piezoelectric modulation fabricated by silicon micromachining, 0000 (15 September 1999); doi: 10.1117/12.364302
Proc. SPIE 3825, Bondability of processed glass wafers, 0000 (15 September 1999); doi: 10.1117/12.364303
Proc. SPIE 3825, Shape memory alloys for micromembrane actuation, 0000 (15 September 1999); doi: 10.1117/12.364304
Advanced Measuring Techniques
Proc. SPIE 3825, Vibration measurement of microstructures by means of laser-optical modal analysis, 0000 (15 September 1999); doi: 10.1117/12.364305
Proc. SPIE 3825, Controlling diode laser bar temperature by micro channel liquid cooling, 0000 (15 September 1999); doi: 10.1117/12.364306
Proc. SPIE 3825, Fiber optic probe for in-situ inspection of surface cracks in steam generator tubes, 0000 (15 September 1999); doi: 10.1117/12.364290
In-Situ Metrology
Proc. SPIE 3825, Real-time optical metrology for microsystem fabrication, 0000 (15 September 1999); doi: 10.1117/12.364291
Proc. SPIE 3825, NanoWalker: a fully autonomous highly integrated miniature robot for nanoscale measurements, 0000 (15 September 1999); doi: 10.1117/12.364292
Proc. SPIE 3825, Versatile microscopic profilometer-vibrometer for static and dynamic characterization of micromechanical devices, 0000 (15 September 1999); doi: 10.1117/12.364293
Poster Session
Proc. SPIE 3825, Generation of thin film micro-optics by crossed deposition through wire-grid masks, 0000 (15 September 1999); doi: 10.1117/12.364294
Proc. SPIE 3825, Inspection of microsystems with a laser scanning microscope, 0000 (15 September 1999); doi: 10.1117/12.364295
Characterization of Thin Films and Layers
Proc. SPIE 3825, Qualification of optical measurement techniques for the investigation of material parameters of microcomponents, 0000 (15 September 1999); doi: 10.1117/12.364297
Proc. SPIE 3825, Testing microcomponents by speckle interferometry, 0000 (15 September 1999); doi: 10.1117/12.364298
Proc. SPIE 3825, Digital speckle-metrology local investigations of sedimentation and surface effects in liquids, 0000 (15 September 1999); doi: 10.1117/12.364299
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