PROCEEDINGS VOLUME 3876
SYMPOSIUM ON MICROMACHINING AND MICROFABRICATION | 20-22 SEPTEMBER 1999
Micromachined Devices and Components V
SYMPOSIUM ON MICROMACHINING AND MICROFABRICATION
20-22 September 1999
Santa Clara, CA, United States
Keynote Session
Proc. SPIE 3876, MEMS-based interferometric modulator for display applications, 0000 (31 August 1999); doi: 10.1117/12.360483
Proc. SPIE 3876, Material-related effects on wet chemical micromachining of smart MEMS devices, 0000 (31 August 1999); doi: 10.1117/12.360492
Sensors
Proc. SPIE 3876, Pressure and flow sensor for use in catheters, 0000 (31 August 1999); doi: 10.1117/12.360501
Proc. SPIE 3876, Acceleration sensitivity of micromachined pressure sensors, 0000 (31 August 1999); doi: 10.1117/12.360508
Proc. SPIE 3876, Wireless surface-acoustic-wave-based humidity sensor, 0000 (31 August 1999); doi: 10.1117/12.360509
Micromachined Inertial Sensors
Proc. SPIE 3876, Advances in MEMS using SFB and DRIE technology, 0000 (31 August 1999); doi: 10.1117/12.360510
Proc. SPIE 3876, Single-crystal silicon gyroscope with decoupled drive and sense, 0000 (31 August 1999); doi: 10.1117/12.360511
Proc. SPIE 3876, Development of silicon accelerometers using epi-micromachining, 0000 (31 August 1999); doi: 10.1117/12.360512
Proc. SPIE 3876, Programmable micro accelerometers and gyroscopes, 0000 (31 August 1999); doi: 10.1117/12.360484
Noise, Analysis, and Simulation
Proc. SPIE 3876, Analysis of noise and fluctuations in micromachined devices, 0000 (31 August 1999); doi: 10.1117/12.360485
Proc. SPIE 3876, Critical comparison of design- and analysis-of-experiments methods for MEMS metamodel generation, 0000 (31 August 1999); doi: 10.1117/12.360486
Applications and Assembly
Proc. SPIE 3876, MEMS control moment gyroscope design and wafer-based spacecraft chassis study, 0000 (31 August 1999); doi: 10.1117/12.360487
Proc. SPIE 3876, MEMS fixtures for handling and assembly of microparts, 0000 (31 August 1999); doi: 10.1117/12.360488
RF and Inductors
Proc. SPIE 3876, MEMS millimeter-wave transceiver architectures, 0000 (31 August 1999); doi: 10.1117/12.360489
Proc. SPIE 3876, New fabrication method for high-Q on-chip spiral inductor, 0000 (31 August 1999); doi: 10.1117/12.360490
Characterization and Reliability
Proc. SPIE 3876, Static and dynamic characterization of polysilicon surface-micromachined actuators, 0000 (31 August 1999); doi: 10.1117/12.360491
Micromachining and Actuators
Proc. SPIE 3876, Polymers: an excellent and increasingly used material for microsystems, 0000 (31 August 1999); doi: 10.1117/12.360493
Proc. SPIE 3876, Additive electroplating technology as a new integration concept for MEMS, 0000 (31 August 1999); doi: 10.1117/12.360494
Proc. SPIE 3876, Parallel-plate electrostatic dual-mass resonator, 0000 (31 August 1999); doi: 10.1117/12.360495
Energy and Energy Storage
Proc. SPIE 3876, Microelectromechanical high-density energy storage/rapid release system, 0000 (31 August 1999); doi: 10.1117/12.360496
Proc. SPIE 3876, Novel thin film solid-oxide fuel cell for microscale energy conversion, 0000 (31 August 1999); doi: 10.1117/12.360497
Proc. SPIE 3876, Production-ready silicon microvalve, 0000 (31 August 1999); doi: 10.1117/12.360498
Proc. SPIE 3876, Micromachined flame ionization detector and flame spectrometer, 0000 (31 August 1999); doi: 10.1117/12.360499
Poster Session--Monday
Proc. SPIE 3876, Development of novel piezoresistive sensor, 0000 (31 August 1999); doi: 10.1117/12.360500
Proc. SPIE 3876, Linear arrays of uncoolded poly SiGe microbolometers for IR detection, 0000 (31 August 1999); doi: 10.1117/12.360502
Proc. SPIE 3876, Micro pressure sensor with submillimeter size by silicon bulk micromachining, 0000 (31 August 1999); doi: 10.1117/12.360503
Proc. SPIE 3876, Polysilicon xylophone bar magnetometers, 0000 (31 August 1999); doi: 10.1117/12.360504
Proc. SPIE 3876, Bistable planar polysilicon microactuator with shallow arch-shaped leaf springs, 0000 (31 August 1999); doi: 10.1117/12.360505
Proc. SPIE 3876, Performance analysis of a planar vibrating microgyroscope using a dynamic model with respect to angular rate frequency, 0000 (31 August 1999); doi: 10.1117/12.360506
Proc. SPIE 3876, Linear magnetic position sensor for automotive applications, 0000 (31 August 1999); doi: 10.1117/12.360507
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