PROCEEDINGS VOLUME 3878
SYMPOSIUM ON MICROMACHINING AND MICROFABRICATION | 20-22 SEPTEMBER 1999
Miniaturized Systems with Micro-Optics and MEMS
IN THIS VOLUME

0 Sessions, 44 Papers, 0 Presentations
MOEM Devices  (5)
SYMPOSIUM ON MICROMACHINING AND MICROFABRICATION
20-22 September 1999
Santa Clara, CA, United States
MOEM Scanners
Proc. SPIE 3878, Development of a compact optical MEMS scanner with integrated VCSEL light source and diffractive optics, 0000 (2 September 1999); doi: 10.1117/12.361250
Proc. SPIE 3878, Electrostatically driven micromirrors for a miniaturized confocal laser scanning microscope, 0000 (2 September 1999); doi: 10.1117/12.361269
Proc. SPIE 3878, Miniaturized time-scanning Fourier Transform Spectrometer based on silicon technology, 0000 (2 September 1999); doi: 10.1117/12.361276
Proc. SPIE 3878, Pixel-by-pixel aberration correction for scanned-beam micro-optical instruments, 0000 (2 September 1999); doi: 10.1117/12.361286
Proc. SPIE 3878, Low-temperature approaches for fabrication of high-frequency microscanners, 0000 (2 September 1999); doi: 10.1117/12.361290
Micromirror Devices
Proc. SPIE 3878, Micromirror arrays fabricated by flip-chip assembly, 0000 (2 September 1999); doi: 10.1117/12.361291
Proc. SPIE 3878, Analogously working micromirror arrays, 0000 (2 September 1999); doi: 10.1117/12.361292
Proc. SPIE 3878, Self-aligned assembly of microlens arrays with micromirrors, 0000 (2 September 1999); doi: 10.1117/12.361293
Proc. SPIE 3878, Micromechanical reliability evaluation of mirror devices through applying accelerated electrostatic force, 0000 (2 September 1999); doi: 10.1117/12.361251
Proc. SPIE 3878, Magnetically driven surface-micromachined mirrors for optical applications, 0000 (2 September 1999); doi: 10.1117/12.361252
MOEMS Switches/Shutters
Proc. SPIE 3878, Operating principles of an electrothermal vibrometer for optical switching applications, 0000 (2 September 1999); doi: 10.1117/12.361253
Proc. SPIE 3878, Wireless electro-optic switching network for optical fiber sensor array using MEMS-IDT devices, 0000 (2 September 1999); doi: 10.1117/12.361254
Proc. SPIE 3878, Miniaturized piezoelectrically driven fiber optic switches with transmittive micro-optics, 0000 (2 September 1999); doi: 10.1117/12.361255
Proc. SPIE 3878, Electromechanically driven microchopper for integration in microspectrometers based on LIGA technology, 0000 (2 September 1999); doi: 10.1117/12.361256
Proc. SPIE 3878, Addressable microslit-array devices for miniaturized systems, 0000 (2 September 1999); doi: 10.1117/12.361257
Proc. SPIE 3878, Electrostatic microshutters-micromirrors array for light modulation systems, 0000 (2 September 1999); doi: 10.1117/12.361258
MOEMS for Sensing Applications
Proc. SPIE 3878, Optical and mechanical design of an InP-based tunable detector for gas-sensing applications, 0000 (2 September 1999); doi: 10.1117/12.361259
Proc. SPIE 3878, Integrated micro-optical fluorescence detection system for microfluidic electrochromatography, 0000 (2 September 1999); doi: 10.1117/12.361260
Proc. SPIE 3878, Novel, highly sensitive chemical and biological sensors based on integrated MOEM and MEMS technologies, 0000 (2 September 1999); doi: 10.1117/12.361261
Proc. SPIE 3878, Optical characteristics of PZT thin film actuator-driven micro-optical scanning sensor with multilayer stacked device structure, 0000 (2 September 1999); doi: 10.1117/12.361262
Proc. SPIE 3878, Optical sensing of absorbing and inhomogeneous media by AC-reflection near the critical angle, 0000 (2 September 1999); doi: 10.1117/12.361263
Proc. SPIE 3878, Micromirrors for direct writing systems and scanners, 0000 (2 September 1999); doi: 10.1117/12.361264
MOEM Devices
Proc. SPIE 3878, MOEMS applications at Sandia National Laboratories, 0000 (2 September 1999); doi: 10.1117/12.361265
Proc. SPIE 3878, Miniature ultrasonic transducers with optical strain readout, 0000 (2 September 1999); doi: 10.1117/12.361266
Proc. SPIE 3878, Optical readout of microaccelerometer code features, 0000 (2 September 1999); doi: 10.1117/12.361267
Proc. SPIE 3878, Finite element modeling of micromachined MEMS photon devices, 0000 (2 September 1999); doi: 10.1117/12.361268
MOEMS for Display Application
Proc. SPIE 3878, 16-k infrared micromirror arrays with large-beam deflection and .10-mm pixel size, 0000 (2 September 1999); doi: 10.1117/12.361270
Proc. SPIE 3878, Through-wafer interrogation of microstructure motion for MEMS feedback control, 0000 (2 September 1999); doi: 10.1117/12.361271
Proc. SPIE 3878, Design and FEM simulation: all-light-processing infrared image transducer, 0000 (2 September 1999); doi: 10.1117/12.361272
MOEMS Integration
Proc. SPIE 3878, Miniature illuminator for laser Doppler velocimeter assembled on micromachined silicon optical bench, 0000 (2 September 1999); doi: 10.1117/12.361273
Proc. SPIE 3878, Development of micromanipulation system for operations in scanning electron microscope, 0000 (2 September 1999); doi: 10.1117/12.361274
Proc. SPIE 3878, Design and analysis of a micro-optical position readout for acceleration sensing, 0000 (2 September 1999); doi: 10.1117/12.361275
Proc. SPIE 3878, Photovoltaic on-demand high-voltage pulse generator as an on-board power source for electrostatic actuator array, 0000 (2 September 1999); doi: 10.1117/12.361277
Proc. SPIE 3878, Ultrathin Si photodetector for an integrated optical interferometer, 0000 (2 September 1999); doi: 10.1117/12.361278
Poster Session
Proc. SPIE 3878, One-dimensional vibration sensor using a Si-cantilever coupled with an optical fiber, 0000 (2 September 1999); doi: 10.1117/12.361279
Proc. SPIE 3878, Sensitivity of (bio)-chemical sensors based on laser-excited surface plasmon resonance, 0000 (2 September 1999); doi: 10.1117/12.361280
Proc. SPIE 3878, Optical binary switch and amplitude modulator micromirror arrays, 0000 (2 September 1999); doi: 10.1117/12.361281
Proc. SPIE 3878, Micromachined silicon optical bench for the low-cost optical module, 0000 (2 September 1999); doi: 10.1117/12.361282
Proc. SPIE 3878, Miniaturized photoelectric angular sensor with simplified design, 0000 (2 September 1999); doi: 10.1117/12.361283
Proc. SPIE 3878, Programmable two-dimensional microshutter arrays, 0000 (2 September 1999); doi: 10.1117/12.361284
Proc. SPIE 3878, Integrated multiwavelength laser source module with micromachined mirrors, 0000 (2 September 1999); doi: 10.1117/12.361285
Proc. SPIE 3878, Charging effects in electrostatically actuated membrane devices, 0000 (2 September 1999); doi: 10.1117/12.361287
Proc. SPIE 3878, Manufacture of aluminium micromirror arrays using a dual damascene process, 0000 (2 September 1999); doi: 10.1117/12.361288
MOEM Devices
Proc. SPIE 3878, Advanced micromoulding of optical components, 0000 (2 September 1999); doi: 10.1117/12.361289
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