PROCEEDINGS VOLUME 3879
SYMPOSIUM ON MICROMACHINING AND MICROFABRICATION | 20-22 SEPTEMBER 1999
Micromachine Technology for Diffractive and Holographic Optics
SYMPOSIUM ON MICROMACHINING AND MICROFABRICATION
20-22 September 1999
Santa Clara, CA, United States
Micromachining Refractive Micro-Optics
Proc. SPIE 3879, Fabrication and properties of refractive micro-optical beam-shaping elements, 0000 (31 August 1999); doi: 10.1117/12.360513
Proc. SPIE 3879, Approximation of refractive micro-optical profiles by minimal surfaces, 0000 (31 August 1999); doi: 10.1117/12.360523
Proc. SPIE 3879, Mid-infrared refractive optical elements made in a polymer matrix, 0000 (31 August 1999); doi: 10.1117/12.360530
Micromachining Diffractive Micro-Optics
Proc. SPIE 3879, Microlens array fabrication through crosslinking photopolymerization, 0000 (31 August 1999); doi: 10.1117/12.360531
Proc. SPIE 3879, Fabrication of gratings on sol-gel-derived glass film by means of embossing without baking, 0000 (31 August 1999); doi: 10.1117/12.360532
Proc. SPIE 3879, Potential of dry etching for the fabrication of fused silica micro-optical elements, 0000 (31 August 1999); doi: 10.1117/12.360533
Proc. SPIE 3879, Fabrication technique for high-aspect-ratio gratings, 0000 (31 August 1999); doi: 10.1117/12.360534
Proc. SPIE 3879, Fabrication of multilevel silicon diffractive lenses for terahertz frequencies, 0000 (31 August 1999); doi: 10.1117/12.360535
Proc. SPIE 3879, New approach for nonsilicon-micromachined three-dimensional multilevel diffractive optical elements, 0000 (31 August 1999); doi: 10.1117/12.360536
Gray Scale Lithography for Micro-Optics
Proc. SPIE 3879, Progress in gray-tone lithography and replication techniques for different materials, 0000 (31 August 1999); doi: 10.1117/12.360514
Poster Session
Proc. SPIE 3879, Quasi-continuous mask-coding method for fabricating diffractive optical elements, 0000 (31 August 1999); doi: 10.1117/12.360515
Gray Scale Lithography for Micro-Optics
Proc. SPIE 3879, Micro stereo lithography and fabrication of 3D microdevices, 0000 (31 August 1999); doi: 10.1117/12.360516
Proc. SPIE 3879, Automated-interference-lithography-based systems for generation of submicron-feature size patterns, 0000 (31 August 1999); doi: 10.1117/12.360517
Applications of Micro-Optics
Proc. SPIE 3879, High-frequency gratings as polarization elements, 0000 (31 August 1999); doi: 10.1117/12.360518
Proc. SPIE 3879, High-efficiency computer-generated holograms, 0000 (31 August 1999); doi: 10.1117/12.360519
Proc. SPIE 3879, Planar optical system design and fabrication, 0000 (31 August 1999); doi: 10.1117/12.360520
Proc. SPIE 3879, Concept for zero-alignment micro-optical systems, 0000 (31 August 1999); doi: 10.1117/12.360521
Poster Session
Proc. SPIE 3879, Refractive microlens array integration with linear high-power semiconductor laser array, 0000 (31 August 1999); doi: 10.1117/12.360522
Proc. SPIE 3879, Influence of nonuniformity on the performance of PtSi IRCCD with refractive microlens array, 0000 (31 August 1999); doi: 10.1117/12.360524
Proc. SPIE 3879, Design and manufacture of continuous-phase diffractive optical elements for beam transforms, 0000 (31 August 1999); doi: 10.1117/12.360525
Proc. SPIE 3879, Continuous-phase diffractive optical element for uniform focal spot, 0000 (31 August 1999); doi: 10.1117/12.360526
Proc. SPIE 3879, Miniaturized achromatic hybrid objective containing LIGA-made microlenses, 0000 (31 August 1999); doi: 10.1117/12.360527
Proc. SPIE 3879, Replication of diffractive gratings using embossing into UV-cured photopolymers, 0000 (31 August 1999); doi: 10.1117/12.360528
Proc. SPIE 3879, Noise reduction in the recording of holographic masks in photoresist, 0000 (31 August 1999); doi: 10.1117/12.360529
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