PROCEEDINGS VOLUME 3891
ASIA PACIFIC SYMPOSIUM ON MICROELECTRONICS AND MEMS | 27-29 OCTOBER 1999
Electronics and Structures for MEMS
ASIA PACIFIC SYMPOSIUM ON MICROELECTRONICS AND MEMS
27-29 October 1999
Gold Coast, Australia
Processors and Sensors
Proc. SPIE 3891, Wide-bandgap materials for novel electronic devices and MEMS, 0000 (29 September 1999); doi: 10.1117/12.364431
Proc. SPIE 3891, Silicon surface micromachining over active devices, 0000 (29 September 1999); doi: 10.1117/12.364441
Proc. SPIE 3891, Sensor system for heart sound biomonitor, 0000 (29 September 1999); doi: 10.1117/12.364450
Accelerometers and Gyros
Proc. SPIE 3891, New sensor-on-chip technology for micromechanical acceleration-threshold switches, 0000 (29 September 1999); doi: 10.1117/12.364462
Proc. SPIE 3891, Micromachined accelerometer based on electron tunneling, 0000 (29 September 1999); doi: 10.1117/12.364473
Proc. SPIE 3891, Vertically sensitive accelerometer and its realization by deep-UV-lithography-supported electroplating, 0000 (29 September 1999); doi: 10.1117/12.364474
Proc. SPIE 3891, MEMS-IDT-based microaccelerometers and gyroscopes, 0000 (29 September 1999); doi: 10.1117/12.364475
Flowmeters and Flow Control
Proc. SPIE 3891, Synthetic jet actuators for flow control, 0000 (29 September 1999); doi: 10.1117/12.364433
Proc. SPIE 3891, Characteristics of a monolithic microvalve with a large-displacement electrostatic actuator, 0000 (29 September 1999); doi: 10.1117/12.364434
Analysis Structures; Micromotors
Proc. SPIE 3891, Microengineered open tubular columns for GC analysis, 0000 (29 September 1999); doi: 10.1117/12.364435
Proc. SPIE 3891, Huber effect and its application to micromotors, 0000 (29 September 1999); doi: 10.1117/12.364436
Proc. SPIE 3891, Detailed balance of the Feynman micromotor, 0000 (29 September 1999); doi: 10.1117/12.364437
Micro-Bearings
Proc. SPIE 3891, Versatile microsensor for micromachine applications, 0000 (29 September 1999); doi: 10.1117/12.364438
Proc. SPIE 3891, Design of a micromagnetic bearing actuator, 0000 (29 September 1999); doi: 10.1117/12.364439
Proc. SPIE 3891, Micromagnetic bearing for friction minimization in micromachines, 0000 (29 September 1999); doi: 10.1117/12.364440
Imaging and Optics
Proc. SPIE 3891, Trade-offs for quenched avalanche photodiode (QAPD) sensors for imaging turbid media, 0000 (29 September 1999); doi: 10.1117/12.364443
Proc. SPIE 3891, Analysis of system trade-offs for terahertz imaging, 0000 (29 September 1999); doi: 10.1117/12.364444
Proc. SPIE 3891, Experimental and theoretical study of the single-beam optical fiber trap, 0000 (29 September 1999); doi: 10.1117/12.364445
Optics and Lasers
Proc. SPIE 3891, 3D packaging technology for vision CMOS VLSI: review and performance evaluation, 0000 (29 September 1999); doi: 10.1117/12.364446
Proc. SPIE 3891, Fabrication of vertical-spring-type micromirror with SiO2 shielding screen and composite-layered mirror plate, 0000 (29 September 1999); doi: 10.1117/12.364447
RF MEMS
Proc. SPIE 3891, Semiconductor-polymer-based rf MEMS, 0000 (29 September 1999); doi: 10.1117/12.364448
Proc. SPIE 3891, Collision avoidance for nanosatellite clusters using millimeter-wave radiometric motion sensors, 0000 (29 September 1999); doi: 10.1117/12.364451
Poster Session
Proc. SPIE 3891, Phase-locked loop-based microdisplacement/capacitance measurement and control system and its application to MEMS, 0000 (29 September 1999); doi: 10.1117/12.364453
Proc. SPIE 3891, CMOS low-noise capacitance measurement circuit for micromachined gyroscope, 0000 (29 September 1999); doi: 10.1117/12.364454
Proc. SPIE 3891, Self-biased transconductance amplifier, 0000 (29 September 1999); doi: 10.1117/12.364455
Proc. SPIE 3891, Micro tactile sensor with capacitive-inductive function for discrimination of object property, 0000 (29 September 1999); doi: 10.1117/12.364456
Proc. SPIE 3891, Four-channel readout integrated circuit for imaging laser radar systems, 0000 (29 September 1999); doi: 10.1117/12.364457
Proc. SPIE 3891, Fabrication of TiNi shape memory actuator for micropump, 0000 (29 September 1999); doi: 10.1117/12.364458
Proc. SPIE 3891, Design and fabrication of diamond probe for atomic force microscope, 0000 (29 September 1999); doi: 10.1117/12.364459
Proc. SPIE 3891, Stress analysis of a standard CMOS process, 0000 (29 September 1999); doi: 10.1117/12.364460
Proc. SPIE 3891, Fabrication of stator winding of electromagnetic micromotor with 1-mm diameter, 0000 (29 September 1999); doi: 10.1117/12.364463
Proc. SPIE 3891, Biological applications of fiber optic trap, 0000 (29 September 1999); doi: 10.1117/12.364465
Proc. SPIE 3891, Novel micropump actuated by thin film shape memory alloy, 0000 (29 September 1999); doi: 10.1117/12.364466
Proc. SPIE 3891, Micromechanical structure development for chemical analysis: study of porous silicon as an adsorbent, 0000 (29 September 1999); doi: 10.1117/12.364467
Proc. SPIE 3891, Novel fiber-to-waveguide coupling method using silicon-on-insulator micromachining techniques, 0000 (29 September 1999); doi: 10.1117/12.364468
Proc. SPIE 3891, Surface-micromachined electrostatic diaphragm micropump, 0000 (29 September 1999); doi: 10.1117/12.364469
Proc. SPIE 3891, Micropump technology and applications, 0000 (29 September 1999); doi: 10.1117/12.364470
Proc. SPIE 3891, Development and terrestrial applications of a nano-g accelerometer, 0000 (29 September 1999); doi: 10.1117/12.364471
Proc. SPIE 3891, Flip-chip process development using recessed bonding pads for laser/MEMS integration, 0000 (29 September 1999); doi: 10.1117/12.364472
Invited Paper Session
Proc. SPIE 3891, MEMS packaging and microassembly challenges, 0000 (29 September 1999); doi: 10.1117/12.364432
Proc. SPIE 3891, Review of the history and technology of micromachined miniature displays using foundry-produced silicon backplanes, 0000 (29 September 1999); doi: 10.1117/12.364442
Plenary Session
Proc. SPIE 3891, Nonvolatile high-density high-performance phase-change memory, 0000 (29 September 1999); doi: 10.1117/12.364449
Invited Paper Session
Proc. SPIE 3891, Integration of MEMS devices, 0000 (29 September 1999); doi: 10.1117/12.364452
Plenary Session
Proc. SPIE 3891, Advanced rf CMOS technology, 0000 (29 September 1999); doi: 10.1117/12.364461
Invited Paper Session
Proc. SPIE 3891, High-efficiency silicon solar cells, 0000 (29 September 1999); doi: 10.1117/12.364464
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