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Dry release process of anhydrous HF gas-phase etching for the fabrication of a vibrating microgyroscope
Microfabrication and reliability study of sapphire-based Ti/Pt electrodes for thin film gas sensor applications
Monitoring photoresist glass transition temperature versus processing parameters via NMR broad band spectroscopy
Physical and electrical properties of thin dielectrics prepared by photoassisted growth in an NO environment
Fabrication of high-yield Si microdiaphragms using electrochemical etch stop in TMAH/IPA/pyrazine solution