PROCEEDINGS VOLUME 3903
INDO-RUSSIAN WORKSHOP ON MICROMECHANICAL SYSTEMS | 2-4 FEBRUARY 1999
Indo-Russian Workshop on Micromechanical Systems
IN THIS VOLUME

0 Sessions, 33 Papers, 0 Presentations
Materials  (7)
INDO-RUSSIAN WORKSHOP ON MICROMECHANICAL SYSTEMS
2-4 February 1999
New Delhi, India
Design and Modeling
Proc. SPIE 3903, Fabrication of micromechanical structures in silicon using SF6/O2 gas mixtures, 0000 (9 November 1999); doi: 10.1117/12.369446
Proc. SPIE 3903, Process modeling for the prediction of surface finish by a micromechanical process: semimagnetic abrasive machining, 0000 (9 November 1999); doi: 10.1117/12.369457
Proc. SPIE 3903, MEMS (micro-electro-mechanical Systems) technology: an overview and SCL's role, 0000 (9 November 1999); doi: 10.1117/12.369468
Proc. SPIE 3903, Vibrational modes of MEMS resonators, 0000 (9 November 1999); doi: 10.1117/12.369473
Proc. SPIE 3903, TRIZ in MEMS, 0000 (9 November 1999); doi: 10.1117/12.369474
Proc. SPIE 3903, Frequency shift analysis for comb drive structures, 0000 (9 November 1999); doi: 10.1117/12.369475
Proc. SPIE 3903, Problems of micromechanical robotic systems, 0000 (9 November 1999); doi: 10.1117/12.369476
Proc. SPIE 3903, High-resolution x-ray diffraction study of free-standing gallium arsenide coiled membrane force sensors produced by micrmachining, 0000 (9 November 1999); doi: 10.1117/12.369477
Proc. SPIE 3903, Analysis of a MEMS vibration detector, 0000 (9 November 1999); doi: 10.1117/12.369478
Proc. SPIE 3903, Metallic behavior of ZrS0.5Se1.5 single crystals, 0000 (9 November 1999); doi: 10.1117/12.369447
Devices and Instrumentation
Proc. SPIE 3903, Hydrogen sensors based on catalytic metals, 0000 (9 November 1999); doi: 10.1117/12.369448
Proc. SPIE 3903, Application of porous silicon in membrane methane sensors, 0000 (9 November 1999); doi: 10.1117/12.369449
Proc. SPIE 3903, LC vision: surface tension mapping application, 0000 (9 November 1999); doi: 10.1117/12.369450
Proc. SPIE 3903, Optical and spectral instruments using sensors, actuators, and microsystems developed at the Institute of Spectroscopy, 0000 (9 November 1999); doi: 10.1117/12.369451
Proc. SPIE 3903, Three-dimensional micron and submicron structures based on fiberglass technologies, 0000 (9 November 1999); doi: 10.1117/12.369452
Proc. SPIE 3903, Silicon sensors and microsystems, 0000 (9 November 1999); doi: 10.1117/12.369454
Proc. SPIE 3903, Development of micromachined vibration sensors for MEMS applications, 0000 (9 November 1999); doi: 10.1117/12.369455
Proc. SPIE 3903, Silicon-micromachined accelerometers for space inertial systems, 0000 (9 November 1999); doi: 10.1117/12.369456
Proc. SPIE 3903, Development of Si-based hall sensor: effect of electrode geometry on hall voltage, 0000 (9 November 1999); doi: 10.1117/12.369458
Proc. SPIE 3903, Polymeric thin film micro-opto-electronic devices, 0000 (9 November 1999); doi: 10.1117/12.369459
Proc. SPIE 3903, Polymeric thin film gas sensors, 0000 (9 November 1999); doi: 10.1117/12.369460
Proc. SPIE 3903, Trench formation in <110> silicon for millimeter-wave switching device, 0000 (9 November 1999); doi: 10.1117/12.369461
Proc. SPIE 3903, Uncooled IR-sensor array based on MEMS technology, 0000 (9 November 1999); doi: 10.1117/12.369462
Proc. SPIE 3903, Design of a hybrid silicon fiber optic pressure sensor array for tactile sensing, 0000 (9 November 1999); doi: 10.1117/12.369463
Proc. SPIE 3903, Current-controlled curled tip, 0000 (9 November 1999); doi: 10.1117/12.369464
Materials
Proc. SPIE 3903, Magnetoelectric materials: some recent results and possible applications, 0000 (9 November 1999); doi: 10.1117/12.369465
Proc. SPIE 3903, Effect of magnetic field on the piezoelectric resonant frequency of a piezoelectric-ferrite composite, 0000 (9 November 1999); doi: 10.1117/12.369466
Proc. SPIE 3903, Conducting polyaniline composite for the detection of aqueous ammonia, 0000 (9 November 1999); doi: 10.1117/12.369467
Proc. SPIE 3903, Smart materials: an overview, 0000 (9 November 1999); doi: 10.1117/12.369469
Proc. SPIE 3903, Sintered films as smart materials for optoelectronics, 0000 (9 November 1999); doi: 10.1117/12.369470
Proc. SPIE 3903, pH-responsive smart polymeric materials, 0000 (9 November 1999); doi: 10.1117/12.369471
Proc. SPIE 3903, Smart materials and aerospace structures, 0000 (9 November 1999); doi: 10.1117/12.369472
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