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Low-loss small-cross-section silicon-on-silicon rib waveguides with high-confining ion-implanted lower cladding
Optical sources, integrated optical detectors, and optical waveguides in standard silicon CMOS integrated circuitry
Measurement and exploitation of the thermo-optic effect in silicon for light switching in optoelectronic integrated circuits
Micromachined silicon actuators with low driving voltage and high accuracy for optical switches and tunable filters