PROCEEDINGS VOLUME 4075
SYMPOSIUM ON APPLIED PHOTONICS | 21-25 MAY 2000
Micro-Opto-Electro-Mechanical Systems
IN THIS VOLUME

0 Sessions, 20 Papers, 0 Presentations
Packaging  (4)
SYMPOSIUM ON APPLIED PHOTONICS
21-25 May 2000
Glasgow, United Kingdom
Optical Elements
Proc. SPIE 4075, Quick-response dynamic focusing lens using multilayered piezoelectric bimorph actuator, 0000 (1 September 2000); doi: 10.1117/12.397918
Proc. SPIE 4075, Micro-optical devices in a Japanese national project, 0000 (1 September 2000); doi: 10.1117/12.397928
Proc. SPIE 4075, Microfabrication and packaging of deformable mirror devices, 0000 (1 September 2000); doi: 10.1117/12.397934
Proc. SPIE 4075, Hybrid liquid crystal Solc/Fabry-Perot filter for wavelength demultiplexing: optimum design parameters, 0000 (1 September 2000); doi: 10.1117/12.397935
Switching, Scanning, and Filtering
Proc. SPIE 4075, 1D and 2D laser line scan generation using a fiber optic resonant scanner, 0000 (1 September 2000); doi: 10.1117/12.397936
Proc. SPIE 4075, Electrically controlled optoelectronic Y-switch based on a BMFET device, 0000 (1 September 2000); doi: 10.1117/12.397937
Sensing and Measurement
Proc. SPIE 4075, Bottlenecks of opto-MEMS, 0000 (1 September 2000); doi: 10.1117/12.397919
Proc. SPIE 4075, Optical pressure sensor for an aeronautical application using white light interferometry, 0000 (1 September 2000); doi: 10.1117/12.397920
Proc. SPIE 4075, Dynamic measurements of a micropump using a fiber-optic-based interferometer, 0000 (1 September 2000); doi: 10.1117/12.397921
Proc. SPIE 4075, Novel aspects of interferometric testing of silicon microelement properties, 0000 (1 September 2000); doi: 10.1117/12.397922
Packaging
Proc. SPIE 4075, Micromachining in silicon for passive alignment of optical fibers, 0000 (1 September 2000); doi: 10.1117/12.397923
Proc. SPIE 4075, Microstructuring in LiNbO3: a route to MEMS devices in piezoelectric crystal media, 0000 (1 September 2000); doi: 10.1117/12.397924
Proc. SPIE 4075, Passive coupling of InGaAs/InP p-i-n detector and single-mode fiber using InP bulk micromachining, 0000 (1 September 2000); doi: 10.1117/12.397925
Proc. SPIE 4075, Fabrication and packaging of optical components and microsystems, 0000 (1 September 2000); doi: 10.1117/12.397926
Microfabrication Techniques
Proc. SPIE 4075, Excimer laser ablation used for the fabrication of micro-optic phase and diffraction elements, 0000 (1 September 2000); doi: 10.1117/12.397927
Proc. SPIE 4075, 3D microstructuring with F2 lasers, 0000 (1 September 2000); doi: 10.1117/12.397929
Proc. SPIE 4075, Focused ion beam direct micromachining of DOEs, 0000 (1 September 2000); doi: 10.1117/12.397932
Proc. SPIE 4075, Tolerance and precision study for solder self-assembled MEMS, 0000 (1 September 2000); doi: 10.1117/12.397933
Optical Elements
Proc. SPIE 4075, Adaptive materials for optical applications: example of polymer/liquid crystal microcomposites, 0000 (1 September 2000); doi: 10.1117/12.397930
Proc. SPIE 4075, Micro-opto-electro-mechanical systems: recent developments and LETI's activities, 0000 (1 September 2000); doi: 10.1117/12.397931
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