PROCEEDINGS VOLUME 4088
FIRST INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROFABRICATION (LPM2000) | 14-16 JUNE 2000
First International Symposium on Laser Precision Microfabrication
FIRST INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROFABRICATION (LPM2000)
14-16 June 2000
Omiya, Saitama, Japan
Overview of Microfabrication
Proc. SPIE 4088, Laser precision microfabrication in Japan, 0000 (6 November 2000); doi: 10.1117/12.405676
Proc. SPIE 4088, Overview of laser microprocessing: fundamentals, practical applications, and future prospects, 0000 (6 November 2000); doi: 10.1117/12.405694
Ultrafast Pulse Processing
Proc. SPIE 4088, Surface and bulk ultrashort-pulsed laser processing of transparent materials, 0000 (6 November 2000); doi: 10.1117/12.405703
Proc. SPIE 4088, 395-nm and 790-nm femtosecond laser ablation of aluminum-doped zinc oxide, 0000 (6 November 2000); doi: 10.1117/12.405719
Proc. SPIE 4088, Formation of photonic crystals by femtosecond laser microfabrication, 0000 (6 November 2000); doi: 10.1117/12.405730
Proc. SPIE 4088, Internal modification of glass materials with a femtosecond laser, 0000 (6 November 2000); doi: 10.1117/12.405739
Proc. SPIE 4088, Time-resolved dynamics of plasma self-channeling and bulk modification in silica glasses induced by a high-intensity femtosecond laser, 0000 (6 November 2000); doi: 10.1117/12.405677
Proc. SPIE 4088, Observation of voids and optical seizing of voids in silica glass with infrared femtosecond laser pulses, 0000 (6 November 2000); doi: 10.1117/12.405684
Proc. SPIE 4088, Micromachining with high-repetition-rate femtosecond laser sources, 0000 (6 November 2000); doi: 10.1117/12.405688
Modification
Proc. SPIE 4088, Laser-induced microstructuring of photonic materials: semiconductors, 0000 (6 November 2000); doi: 10.1117/12.405689
Proc. SPIE 4088, Applications of pulsed lasers in low-temperature thin film electronics fabrication, 0000 (6 November 2000); doi: 10.1117/12.405690
Proc. SPIE 4088, F2 laser ablation of GaN, 0000 (6 November 2000); doi: 10.1117/12.405691
Fundamental Aspects
Proc. SPIE 4088, Molecular dynamics simulation of ablation process with ultrashort-pulsed laser, 0000 (6 November 2000); doi: 10.1117/12.405692
Proc. SPIE 4088, Ultrashort-pulsed laser microstructuring of diamond, 0000 (6 November 2000); doi: 10.1117/12.405693
Proc. SPIE 4088, Effects of repetitive irradiation in laser ablation of aluminum in gases observed by photoacoustic and imaging techniques, 0000 (6 November 2000); doi: 10.1117/12.405695
Microfabrication
Proc. SPIE 4088, Novel technology for laser precision microfabrication of hard materials, 0000 (6 November 2000); doi: 10.1117/12.405696
Proc. SPIE 4088, Novel results of laser precision microfabrication with excimer lasers and solid state lasers, 0000 (6 November 2000); doi: 10.1117/12.405697
Proc. SPIE 4088, Excimer laser microfabrication and micromachining, 0000 (6 November 2000); doi: 10.1117/12.405698
Proc. SPIE 4088, High-efficiency microdrilling of silicon wafer using excimer laser, 0000 (6 November 2000); doi: 10.1117/12.405699
Proc. SPIE 4088, Micromachining using femtosecond lasers, 0000 (6 November 2000); doi: 10.1117/12.405700
Proc. SPIE 4088, Micromachining with ultrafast lasers, 0000 (6 November 2000); doi: 10.1117/12.405701
Industrial Applications
Proc. SPIE 4088, Laser via-hole drilling of printed wiring board, 0000 (6 November 2000); doi: 10.1117/12.405702
Proc. SPIE 4088, Present status of excimer laser exposure apparatus, 0000 (6 November 2000); doi: 10.1117/12.405704
Proc. SPIE 4088, Local annealing of shape memory alloys using laser scanning and computer vision, 0000 (6 November 2000); doi: 10.1117/12.405705
Proc. SPIE 4088, Virtual engineering helps to get laser adjustment industrially accepted, 0000 (6 November 2000); doi: 10.1117/12.405706
Laser Systems and Optical Elements
Proc. SPIE 4088, High-power second harmonic generation with free-running Nd:YAG slab laser for micromachining applications, 0000 (6 November 2000); doi: 10.1117/12.405707
Proc. SPIE 4088, Ultrafast fiber lasers: alternative light sources for industrial material processing, 0000 (6 November 2000); doi: 10.1117/12.405708
Surface Microstructuring
Proc. SPIE 4088, UV laser ablative shaping of optical surface using ArF laser, 0000 (6 November 2000); doi: 10.1117/12.405709
Proc. SPIE 4088, Nonlithographic coherent array of ultrafine particles on an irradiated material using Nd:YAG laser: influence of the laser fluence on the microstructure, 0000 (6 November 2000); doi: 10.1117/12.405710
Proc. SPIE 4088, Laser texturing process and surface quality control, 0000 (6 November 2000); doi: 10.1117/12.405711
Micro Welding and Cutting
Proc. SPIE 4088, Micromachining with a frequency-converted diode-pumped Nd:YAG laser, 0000 (6 November 2000); doi: 10.1117/12.405712
Proc. SPIE 4088, High-precision microcutting of ceramics with short-pulsed solid state lasers, 0000 (6 November 2000); doi: 10.1117/12.405713
Proc. SPIE 4088, Laser microcaving of steel with solid state lasers, 0000 (6 November 2000); doi: 10.1117/12.405714
Proc. SPIE 4088, Laser joining of microcomponents with fiber lasers and diode lasers, 0000 (6 November 2000); doi: 10.1117/12.405715
Proc. SPIE 4088, Pulsed Nd:YAG laser welding of titanium ear implants, 0000 (6 November 2000); doi: 10.1117/12.405716
Proc. SPIE 4088, Compact multisensor laser scanning head for processing and monitoring microspot welding, 0000 (6 November 2000); doi: 10.1117/12.405717
Pulsed Laser Deposition
Proc. SPIE 4088, Observation of nanoparticle formation process by two-dimensional laser-induced fluorescence, UV Rayleigh scattering, and re-decomposition laser-induced fluorescence methods, 0000 (6 November 2000); doi: 10.1117/12.405718
Proc. SPIE 4088, Influence of laser fluence on the synthesis of carbon nitride thin films by nitrogen-ion-assisted pulsed-laser deposition, 0000 (6 November 2000); doi: 10.1117/12.405720
Proc. SPIE 4088, Preparation of metal oxide thin films using coating photolysis process with ArF excimer laser, 0000 (6 November 2000); doi: 10.1117/12.405721
Proc. SPIE 4088, Preparation of conducting polymer thin films by UV laser-assisted deposition, 0000 (6 November 2000); doi: 10.1117/12.405722
Micro System
Proc. SPIE 4088, Nanosatellites and MEMS fabrication by laser microprocessing, 0000 (6 November 2000); doi: 10.1117/12.405723
Proc. SPIE 4088, Microgroove fabrication with excimer laser ablation techniques for optical fiber array alignment purposes, 0000 (6 November 2000); doi: 10.1117/12.405724
Proc. SPIE 4088, Fabrication of Ce:YIG film for electric and magnetic field sensor by pulsed-laser deposition and laser-induced forward transfer, 0000 (6 November 2000); doi: 10.1117/12.405725
Proc. SPIE 4088, Electro-osmotic flow control in microchannels produced by scanning excimer laser ablation, 0000 (6 November 2000); doi: 10.1117/12.405726
Glass Materials Processing
Proc. SPIE 4088, Advanced laser microfabrication of photonic components, 0000 (6 November 2000); doi: 10.1117/12.405727
Proc. SPIE 4088, Laser processing of convex structures in chalcogenide glasses, 0000 (6 November 2000); doi: 10.1117/12.405728
Proc. SPIE 4088, Laser ablation process of quartz material using F2 laser, 0000 (6 November 2000); doi: 10.1117/12.405729
Advanced Applications
Proc. SPIE 4088, Laser surface cleaning: basic understanding, engineering efforts, and technical barriers, 0000 (6 November 2000); doi: 10.1117/12.405731
Proc. SPIE 4088, Laser processes for precise microfabrication of magnetic disk-drive components, 0000 (6 November 2000); doi: 10.1117/12.405732
Proc. SPIE 4088, Optical radiation pressure micromachining using a small particle, 0000 (6 November 2000); doi: 10.1117/12.405733
Proc. SPIE 4088, Micropeak array in the scribe line on a wafer, 0000 (6 November 2000); doi: 10.1117/12.405734
Proc. SPIE 4088, Matrix-assisted laser transfer of electronic materials for direct-write applications, 0000 (6 November 2000); doi: 10.1117/12.405735
Ultrafast Pulse Processing
Proc. SPIE 4088, Transient light-induced refractive index change made by laser microfabrication in nitroaniline-doped PMMA film, 0000 (6 November 2000); doi: 10.1117/12.405736
Modification
Proc. SPIE 4088, Pulsed laser nitridation of InP, 0000 (6 November 2000); doi: 10.1117/12.405737
Fundamental Aspects
Proc. SPIE 4088, Effects of laser pulse shape on jetlike plasma formation in laser ablation of metals under atmosphere at high fluence: observation by nanosecond imaging technique, 0000 (6 November 2000); doi: 10.1117/12.405738
Proc. SPIE 4088, Molecular dynamics analysis on physical phenomena of metal with evaporation induced by laser irradiation, 0000 (6 November 2000); doi: 10.1117/12.405740
Microfabrication
Proc. SPIE 4088, Technique of microfabrication suitable for machining submillimeter-wave components, 0000 (6 November 2000); doi: 10.1117/12.405741