PROCEEDINGS VOLUME 4176
MICROMACHINING AND MICROFABRICATION | 18-21 SEPTEMBER 2000
Micromachined Devices and Components VI
MICROMACHINING AND MICROFABRICATION
18-21 September 2000
Santa Clara, CA, United States
Noninertial Mechanical Devices
Proc. SPIE 4176, Review of viscous damping in micromachined structures, 0000 (15 August 2000); doi: 10.1117/12.395618
Proc. SPIE 4176, High-force 10-kN piezoresistive silicon force sensor with output independent of force distribution, 0000 (15 August 2000); doi: 10.1117/12.395640
Proc. SPIE 4176, Deep cavity-shaped diaphragm for enhancement of microphone mechanical sensitivity, 0000 (15 August 2000); doi: 10.1117/12.395641
Inertial Sensors
Proc. SPIE 4176, Dual beam-mass structure gyroscope micromachined by deep RIE process, 0000 (15 August 2000); doi: 10.1117/12.395642
Proc. SPIE 4176, New fabrication techniques for high dynamic range tunneling sensors, 0000 (15 August 2000); doi: 10.1117/12.395643
Magnetic Devices
Proc. SPIE 4176, Micromechanical detectors for ferromagnetic resonance spectroscopy, 0000 (15 August 2000); doi: 10.1117/12.395644
Proc. SPIE 4176, Microresonator modified as magnetic sensor, 0000 (15 August 2000); doi: 10.1117/12.395645
Actuators and Flow Sensors
Proc. SPIE 4176, Toward thermal flow-sensing with pL/s resolution, 0000 (15 August 2000); doi: 10.1117/12.395619
Proc. SPIE 4176, AirJet paper mover: an example of mesoscale MEMS, 0000 (15 August 2000); doi: 10.1117/12.395620
Proc. SPIE 4176, Spiral wound transducer, 0000 (15 August 2000); doi: 10.1117/12.395621
Proc. SPIE 4176, Large deflection of out-of-plane magnetic actuators using surface micromachining, 0000 (15 August 2000); doi: 10.1117/12.395622
Proc. SPIE 4176, Theoretical and experimental characterization of the in-plane tip force and deflection achieved with asymmetrical polysilicon electrothermal microactuators, 0000 (15 August 2000); doi: 10.1117/12.395623
CMOS Devices
Proc. SPIE 4176, From research to product: the CMOS MEMS case, 0000 (15 August 2000); doi: 10.1117/12.395624
Proc. SPIE 4176, Investigation of thermopile using CMOS compatible process and front-side Si bulk etching, 0000 (15 August 2000); doi: 10.1117/12.395625
Bio/Chemical Devices
Proc. SPIE 4176, MEMS device for mass market gas and chemical sensors, 0000 (15 August 2000); doi: 10.1117/12.395626
Proc. SPIE 4176, Rapid micro-PCR system for hepatitis C virus amplification, 0000 (15 August 2000); doi: 10.1117/12.395627
High-frequency Devices
Proc. SPIE 4176, Prospective applications of MEMS in wireless communications, 0000 (15 August 2000); doi: 10.1117/12.395628
Proc. SPIE 4176, Optimization of surface-micromachined patch antenna, 0000 (15 August 2000); doi: 10.1117/12.395632
Proc. SPIE 4176, High frequency of micromechanical resonator via structural modification, 0000 (15 August 2000); doi: 10.1117/12.395633
Assembly and Packaging
Proc. SPIE 4176, Nano-spring arrays for high-density interconnect, 0000 (15 August 2000); doi: 10.1117/12.395634
Proc. SPIE 4176, Wafer-level surface-mountable chip size packaging for MEMS and ICs, 0000 (15 August 2000); doi: 10.1117/12.395635
Poster Session
Proc. SPIE 4176, Development of silicon ultrasonic transducer using micromachining, 0000 (15 August 2000); doi: 10.1117/12.395636
Proc. SPIE 4176, Low-power micromachined structures for gas sensors with improved robustness, 0000 (15 August 2000); doi: 10.1117/12.395637
Proc. SPIE 4176, Planar latch-up microactuator driven by thermoelastic force, 0000 (15 August 2000); doi: 10.1117/12.395638
Proc. SPIE 4176, Novel technique of thin photoresist micromachining for submillimeter wave circuits, 0000 (15 August 2000); doi: 10.1117/12.395639
Noninertial Mechanical Devices
Proc. SPIE 4176, MEMS/MOEMS for lightwave networks: Can little machines make it big?, 0000 (15 August 2000); doi: 10.1117/12.395629
Proc. SPIE 4176, Bulk micromachining for sensors and actuators, 0000 (15 August 2000); doi: 10.1117/12.395630
Proc. SPIE 4176, Microsystems for diverse applications using recently developed microfabrication techniques, 0000 (15 August 2000); doi: 10.1117/12.395631
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