PROCEEDINGS VOLUME 4178
MICROMACHINING AND MICROFABRICATION | 18-21 SEPTEMBER 2000
MOEMS and Miniaturized Systems
MICROMACHINING AND MICROFABRICATION
18-21 September 2000
Santa Clara, CA, United States
MOEMS-based Optical Switch
Proc. SPIE 4178, Materials impacts on micro-opto-electro-mechanical systems, 0000 (22 August 2000); doi: 10.1117/12.396478
Proc. SPIE 4178, Latching-type 2x2 and 1x4 fiber-optic switches, 0000 (22 August 2000); doi: 10.1117/12.396488
Proc. SPIE 4178, Status of the development of a 128x128 microshutter array, 0000 (22 August 2000); doi: 10.1117/12.396500
Proc. SPIE 4178, Hybrid MOEMS approaches for fiber optic switches and switch matrices, 0000 (22 August 2000); doi: 10.1117/12.396510
Proc. SPIE 4178, Optical 2x2 switch matrix with electromechanical micromotors, 0000 (22 August 2000); doi: 10.1117/12.396516
Proc. SPIE 4178, Design and realization of a novel polymer-based single-mode integrated optical beam splitter, 0000 (22 August 2000); doi: 10.1117/12.396517
Beam Steering and Scanning
Proc. SPIE 4178, Miniature high-resolution imaging system with 3D MOEMS beam scanning for Mars exploration, 0000 (22 August 2000); doi: 10.1117/12.396518
Proc. SPIE 4178, Improvement of microtorsional mirror for high-frequency scanning, 0000 (22 August 2000); doi: 10.1117/12.396519
Proc. SPIE 4178, Scanning silicon micromirror using a bidirectionally movable magnetic microactuator, 0000 (22 August 2000); doi: 10.1117/12.396520
Proc. SPIE 4178, Design and modeling of large deflection micromechanical 1D and 2D scanning mirrors, 0000 (22 August 2000); doi: 10.1117/12.396479
Proc. SPIE 4178, Pivoting micromirror designs for large orientation angles, 0000 (22 August 2000); doi: 10.1117/12.396480
Novel MOEMS Packaging
Proc. SPIE 4178, Development of modules for micro-optical integration and MOEMS packaging, 0000 (22 August 2000); doi: 10.1117/12.396481
Proc. SPIE 4178, MOEMS arrays for interconnect applications, 0000 (22 August 2000); doi: 10.1117/12.396482
Proc. SPIE 4178, Assembly processes for micro-optical beam transformation systems for high-power diode laser bars and stacks, 0000 (22 August 2000); doi: 10.1117/12.396483
MOEMS for Display Applications
Proc. SPIE 4178, Advantages of scanned-beam MOEMS approach to microdisplay and related applications, 0000 (22 August 2000); doi: 10.1117/12.396484
Proc. SPIE 4178, Thermally actuated microprojector for optical display applications, 0000 (22 August 2000); doi: 10.1117/12.396485
Proc. SPIE 4178, Optical performance requirements for MEMS-scanner-based microdisplays, 0000 (22 August 2000); doi: 10.1117/12.396486
Proc. SPIE 4178, Performance of a biaxial MEMS-based scanner for microdisplay applications, 0000 (22 August 2000); doi: 10.1117/12.396487
Proc. SPIE 4178, Metrology for laser-structured microdevices by CCD-camera-based vision systems, 0000 (22 August 2000); doi: 10.1117/12.396489
Optical Processing and Control
Proc. SPIE 4178, Optical sensing of microsystem motion and performance, 0000 (22 August 2000); doi: 10.1117/12.396493
Proc. SPIE 4178, MEMS feedback control using through-wafer optical device monitoring, 0000 (22 August 2000); doi: 10.1117/12.396494
Proc. SPIE 4178, MEMS/MEOMS: metrology and machine vision, 0000 (22 August 2000); doi: 10.1117/12.396495
Proc. SPIE 4178, Fabrication of the moving liquid mirror (MLM) spatial light modulator in a standard CMOS process, 0000 (22 August 2000); doi: 10.1117/12.396496
MOEMS WDM Applications
Proc. SPIE 4178, MEMS actuators for silicon micro-optical elements, 0000 (22 August 2000); doi: 10.1117/12.396497
Proc. SPIE 4178, Surface-micromachined mirrors for scalable fiber optic switching applications, 0000 (22 August 2000); doi: 10.1117/12.396498
Proc. SPIE 4178, Polysilicon micromachining 3D mirror integrated frequency tuner for WDM applications, 0000 (22 August 2000); doi: 10.1117/12.396499
MOEMS Integration
Proc. SPIE 4178, Design and fabrication of optical microcavities using III-V semiconductor-based MOEMS, 0000 (22 August 2000); doi: 10.1117/12.396501
Proc. SPIE 4178, New design for an integrated Fourier transform spectrometer, 0000 (22 August 2000); doi: 10.1117/12.396502
Proc. SPIE 4178, Lucent Microstar micromirror array technology for large optical crossconnects, 0000 (22 August 2000); doi: 10.1117/12.396503
Proc. SPIE 4178, Electromechanical simulation of a large-aperture MOEMS Fabry-Perot tunable filter, 0000 (22 August 2000); doi: 10.1117/12.396504
MOEMS Scanning Arrays
Proc. SPIE 4178, Micromirrors and micromirror arrays for scanning applications, 0000 (22 August 2000); doi: 10.1117/12.396505
Proc. SPIE 4178, Micromirror arrays for wavefront correction, 0000 (22 August 2000); doi: 10.1117/12.396506
Proc. SPIE 4178, Test system for micromirror arrays, 0000 (22 August 2000); doi: 10.1117/12.396507
Proc. SPIE 4178, Development of individually addressable micromirror arrays for space applications, 0000 (22 August 2000); doi: 10.1117/12.396508
Proc. SPIE 4178, Design and fabrication of optical-MEMS pressure sensor arrays, 0000 (22 August 2000); doi: 10.1117/12.396509
Microsensor Integration
Proc. SPIE 4178, MOEMS pressure sensors for propulsion applications, 0000 (22 August 2000); doi: 10.1117/12.396511
Proc. SPIE 4178, Control and shape design of an electrically damped comb drive for digital switches, 0000 (22 August 2000); doi: 10.1117/12.396512
Proc. SPIE 4178, Positioning strategies and sensor integration in tools for assembling MOEMS, 0000 (22 August 2000); doi: 10.1117/12.396513
Proc. SPIE 4178, Integrated optical motion detection microsystem with programmable resolution, 0000 (22 August 2000); doi: 10.1117/12.396514
MOEMS WDM Applications
Proc. SPIE 4178, Low-cost microspectrometer, 0000 (22 August 2000); doi: 10.1117/12.396515
MOEMS-based Optical Switch
Proc. SPIE 4178, MEMS/MOEMS for lightwave networks: Can little machines make it big?, 0000 (22 August 2000); doi: 10.1117/12.396490
Proc. SPIE 4178, Bulk micromachining for sensors and actuators, 0000 (22 August 2000); doi: 10.1117/12.396491
Proc. SPIE 4178, Microsystems for diverse applications using recently developed microfabrication techniques, 0000 (22 August 2000); doi: 10.1117/12.396492
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