PROCEEDINGS VOLUME 4179
MICROMACHINING AND MICROFABRICATION | 18-21 SEPTEMBER 2000
Micromachining Technology for Micro-Optics
MICROMACHINING AND MICROFABRICATION
18-21 September 2000
Santa Clara, CA, United States
Analog Fabrication Methods
Proc. SPIE 4179, Micro-optics development in the past decade, 0000 (18 August 2000); doi: 10.1117/12.395678
Proc. SPIE 4179, Beam-shaping elements for holographic applications, 0000 (18 August 2000); doi: 10.1117/12.395687
Proc. SPIE 4179, Fabrication technologies for micro-optical elements with arbitrary surfaces, 0000 (18 August 2000); doi: 10.1117/12.395692
Proc. SPIE 4179, Micro-optical elements fabricated with single step, 0000 (18 August 2000); doi: 10.1117/12.395693
Alternative Methods of Fabrication
Proc. SPIE 4179, 3D, high-resolution deep x-ray absorber mask, 0000 (18 August 2000); doi: 10.1117/12.395694
Proc. SPIE 4179, Silica-like microstructures by x-ray irradiation of polymethylsilsesquioxane spin-on glass films, 0000 (18 August 2000); doi: 10.1117/12.395695
Proc. SPIE 4179, Fabrication of micro-optical components by high-precision embossing, 0000 (18 August 2000); doi: 10.1117/12.395679
Processing of Unique Materials
Proc. SPIE 4179, Fabrication of microlens arrays in CaF2 by ion milling, 0000 (18 August 2000); doi: 10.1117/12.395680
Proc. SPIE 4179, Micromachined optical concentrators for IR LEDs, 0000 (18 August 2000); doi: 10.1117/12.395681
Proc. SPIE 4179, Fabrication of refractive microlens array by etching ammonium dichromate gelatin (ADG) with enzyme, 0000 (18 August 2000); doi: 10.1117/12.395682
Applications of Micro-optics I
Proc. SPIE 4179, Refractive microlenses for ultraflat photolithographic projection systems, 0000 (18 August 2000); doi: 10.1117/12.395683
Proc. SPIE 4179, Polymer UV-molding for micro-optical systems and O/E-integration, 0000 (18 August 2000); doi: 10.1117/12.395684
Proc. SPIE 4179, Miniaturized objective lens for a photoelectron emission microscope, 0000 (18 August 2000); doi: 10.1117/12.395685
Proc. SPIE 4179, Experimental realization of a diffractive optical isolator, 0000 (18 August 2000); doi: 10.1117/12.395686
Applications of Micro-optics II
Proc. SPIE 4179, Approach to higher reliability in 3D micromechanisms, 0000 (18 August 2000); doi: 10.1117/12.395688
Analog Fabrication Methods
Proc. SPIE 4179, MEMS/MOEMS for lightwave networks: Can little machines make it big?, 0000 (18 August 2000); doi: 10.1117/12.395689
Proc. SPIE 4179, Bulk micromachining for sensors and actuators, 0000 (18 August 2000); doi: 10.1117/12.395690
Proc. SPIE 4179, Microsystems for diverse applications using recently developed microfabrication techniques, 0000 (18 August 2000); doi: 10.1117/12.395691
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