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Hybrid integration of light-emitters and detectors with SOI-based micro-opto-electro-mechanical systems (MOEMS)
Surface-micromachined 2D optical scanners with optically flat single-crystalline silicon micromirrors
Materials processing technology for the integration of effective Ge p-i-n photodetectors on Si for Si microphotonics
Theoretical and experimental analysis of transmission and enhanced absorption of frequency-selective surfaces in the infrared