PROCEEDINGS VOLUME 4400
LASERS IN METROLOGY AND ART CONSERVATION | 18-22 JUNE 2001
Microsystems Engineering: Metrology and Inspection
LASERS IN METROLOGY AND ART CONSERVATION
18-22 June 2001
Munich, Germany
3D Measurements and Related Techniques
Interferometry for vibration analysis in MEMS
Proc. SPIE 4400, Three-dimensional full-field dynamical characterization of micromechanical devices by stroboscopic white light scanning interferometry, 0000 (23 October 2001); doi: 10.1117/12.445603
Proc. SPIE 4400, Inspection system for MEMS characterization on wafer level using ESPI, 0000 (23 October 2001); doi: 10.1117/12.445604
Proc. SPIE 4400, Quantitative time-averaged microscopic interferometry for micromechanical device vibration mode characterization, 0000 (23 October 2001); doi: 10.1117/12.445605
Thin Film Characterization
Proc. SPIE 4400, Characterization of thin film MEMS using photo-acoustic microscopy, 0000 (23 October 2001); doi: 10.1117/12.445606
Proc. SPIE 4400, Paraboloidal ellipsometer with accurate retardance and latitude, 0000 (23 October 2001); doi: 10.1117/12.445607
Proc. SPIE 4400, High-resolution measurement of thin metallic films and multilayers by femtosecond laser pulses, 0000 (23 October 2001); doi: 10.1117/12.445590
Near-Field Sensors
Proc. SPIE 4400, Quantitative optical measurement of microcantilever vibration: applications to near-field microsensor, 0000 (23 October 2001); doi: 10.1117/12.445591
Proc. SPIE 4400, Resolution improvement of pulsed laser experiments with a micro-optomechanical focusing tip, 0000 (23 October 2001); doi: 10.1117/12.445592
Proc. SPIE 4400, Fabrication of multilayer GaAlAs/GaAs microtips for VCSEL-based optical near-field sensors, 0000 (23 October 2001); doi: 10.1117/12.445593
In-situ Metrology of Micromechanical Properties of MEMS
Proc. SPIE 4400, Fully integrated on-chip laboratories for MEMS-based material and structure mechanical analysis, 0000 (23 October 2001); doi: 10.1117/12.445594
Proc. SPIE 4400, Optical measurement methods to study dynamic behavior in MEMS, 0000 (23 October 2001); doi: 10.1117/12.445595
Proc. SPIE 4400, Waveguide microinterferometry system for microelements investigation, 0000 (23 October 2001); doi: 10.1117/12.445596
Specialized Techniques and Applications
Proc. SPIE 4400, New measurement system for microscopic formtesting of microstructures by means of multiple-wavelength interferometry, 0000 (23 October 2001); doi: 10.1117/12.445597
Proc. SPIE 4400, Microfabricated ZnSe diffractive optical elements for CO2 laser, 0000 (23 October 2001); doi: 10.1117/12.445598
Poster Session
Proc. SPIE 4400, Automated interferometric system for bulge and blister test measurements of micromachined membranes, 0000 (23 October 2001); doi: 10.1117/12.445600
Proc. SPIE 4400, Mechanical properties of polarimetric smart structures, 0000 (23 October 2001); doi: 10.1117/12.445601
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