Volume Table of Contents

PROCEEDINGS VOLUME 4426

SECOND INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROMACHINING | 16-18 MAY 2001

Second International Symposium on Laser Precision Microfabrication

Editor(s): Isamu Miyamoto, Yong Feng Lu, Koji Sugioka, Jan J. Dubowski

Editor Affiliations +

IN THIS VOLUME

12 Sessions, 106 Papers, 0 Presentations

Microfabrication and Microstructuring (12)

Ultrafast Laser Processing (11)

Industrial Applications (17)

Modification (4)

Fundamental Aspects (10)

Pulsed Laser Deposition (13)

Microsystems and Microelements (4)

Systems and Optics (11)

Cleaning (12)

Optics Fabrication (4)

Advanced Microfabrication Technology (4)

Overview (4)

SECOND INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROMACHINING

16-18 May 2001

Singapore, Singapore

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Microfabrication and Microstructuring

Microstructure and properties of Fe-base alloy fabricated using selective laser melting Paper

Manlong Sun, Li Lu, Jerry Ying Hsi Fuh

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456802

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Ultrafast Laser Processing

Optimum energy absorption of a short-pulse laser in a doped dielectric slab Paper

Lay-Kee Ang

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456838

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Industrial Applications

Laser cladding of copper-based materials for building electrical discharge machining electrode Paper

Y. Tang, Li Lu, Jerry Ying Hsi Fuh, Yoke-San Wong, M. Gupta, H. Zhu

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456848

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Modification

High-resolution laser flash photography for probing the solidification of the new double laser recrystallization process Paper

Ming-Hong Lee, Seung-Jae Moon, Mutsuko Hatano, Constantine P. Grigoropoulos

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456858

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Microfabrication and Microstructuring

Particle-enhanced near-field optical effect and laser writing for nanostructure fabrication Paper

Yongfeng Lu, L. Zhang, Wen Dong Song, Yuan Wei Zheng, Boris S. Luk'yanchuk

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456865

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Investigation of carbon nanoparticles converted from a polymer by UV-pulsed laser irradiation Paper

Sumei Huang, Yongfeng Lu, Minghui Hong, Zhuo Sun, Siew It Pang, Jian Ping Wang

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456873

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Processes in semiconductor materials after laser cutting Paper

Andrei R. Novoselov, Anatoly G. Klimenko

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456883

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The results of laser - semiconductor interaction are presented. The characteristic zones are investigated after laser affects the semiconductor substrates by method of electro-physical (dynamic and static) performances of diagnostic structures. It has been found that: 1. Near of area of interaction of a laser radiation with a material of the target, the hot electrons generated by laser radiation, causes changes of properties of a material. It causes increase of reverse currents of the diodes. The magnification of reverse currents of the diode is observed which depends on supply voltage and distances between laser cut and diode. The distance between edge of the diode and edge of the laser cut with which begins increase of reverse currents of the diodes in Si: for supply voltage was 8,2 V - 5 micrometers , 20 V - 26 micrometers ; in HgCdTe: for working voltage (0,1 V) the distance was 18 micrometers . 2. The laser radiation causes temporary increase of reverse currents of the diodes on distances from 2 micrometers and more (measurement of a reverse currents of the diodes on distances 36 and 78 micrometers have shown reduction of a reverse currents, in time about 400 minutes). 3. Our experimental data allow us to develop criteria of definition of parameters of laser radiation for laser cutting of semiconductor materials on distances in some microns from elements of the integrated circuits. The basic criteria of a choice of laser radiation: 1. Repetition frequency of laser pulses; 2. Volume of destruction of a material for one pulse. The laser source for these experiments was an UV laser at 0,34 micrometers wavelength with 7 ns pulses, laser fluency was more than 1,1 J/cm² that corresponding to minimum energy density required to forming pits. The diagnostic structures included p-n junctions (Si, HgCdTe) or source of MOSFETs (Si). Our experimental data showing that the powerful high- speed laser tools for cutting of materials are of limited usefulness for semiconductor materials.

Industrial Applications

Laser marking on IC package by micro-encapsulated tapes Paper

Kaidong D. Ye, Chengwu An, Yuan Yuan, Yongfeng Lu

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456892

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Microfabrication and Microstructuring

Hole drilling of glass-foam substrates with laser Paper

Yoshikazu Yoshida, Hiroyoshi Yajima, Yuji Hashidate, Hiroshi Ogura, Shuhei Ueda

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456803

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Fundamental Aspects

Selective photon-breaking of C-S bonds in polythiophene to form quasi-one-dimensional carbon chains in cubic nanocrystals Paper

ZhongMin Ren, Yongfeng Lu, H. W. Choy, Tow Chong Chong, S. C. Ng, P. Miao

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456811

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Pulsed Laser Deposition

Pulsed-laser deposition of carbon nitride materials Paper

ZhongMin Ren, Yongfeng Lu, Z. F. He

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456817

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Microsystems and Microelements

Laser beam bending of metallic foils Paper

Manfred Geiger, Frank Meyer-Pittroff

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456823

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Industrial Applications

Laser microbumping and contamination-free tagging on magnetic hard disk surfaces: techniques and applications Paper

DaMing Liu, Teng Soon Wee, Yuan Yuan, Yongfeng Lu, Minghui Hong, Ryan J. K. Goh

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456830

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Laser reflow plastic ball grid array Paper

DaMing Liu, Tao Chen, Yuan Yuan, Yongfeng Lu, Minghui Hong, Ryan J. K. Goh

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456834

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Pulsed Laser Deposition

Optical and surface properties of ZnO thin films by PLD Paper

Yongfeng Lu, H. Q. Ni, ZhongMin Ren

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456835

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Fundamental Aspects

Laser ablation of Si in water and ambient air Paper

Sha Zhu, Minghui Hong, M. L. Koh, Yongfeng Lu

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456836

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Systems and Optics

What engineers should know about lasers Paper

Manfred Witt

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456837

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Cleaning

Laser cleaning technology and its application Paper

Wen Dong Song, Minghui Hong, L. Zhang, Yongfeng Lu, Tow Chong Chong

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456839

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Pulsed Laser Deposition

Growth of (001)-oriented PZT thin films on amorphous SiO₂ by pulsed laser deposition Paper

Jing Zhao, Li Lu, Carl V. Thompson, Yongfeng Lu, Wen Dong Song

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456840

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Fabrication of TiNi thin films by pulsed laser deposition Paper

Xiaoyu Chen, Yongfeng Lu, ZhongMin Ren, Sha Zhu

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456841

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Composition and structure of BCN films prepared by ion beam-assisted pulsed laser deposition Paper

Hao Ling, Zhifeng Ying, JiaDa Wu, Jian Sun, Wei Shi, Yuancheng Du, Fuming Li

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456842

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Gallium nitride films synthesized by reactive pulsed laser deposition from a GaAs target Paper

Jian Sun, JiaDa Wu, Hao Ling, Wei Shi, Zhifeng Ying, Xunmin Ding, Zhuying Zhou, Fuming Li

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456843

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Electron cyclotron resonance plasma-assisted pulsed laser deposition of carbon nitride thin films Paper

Wei Shi, JiaDa Wu, Jian Sun, Hao Ling, Zhifeng Ying, Zhuying Zhou, Fuming Li

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456844

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Influence of laser fluence and laser repetition rate on the synthesis of aluminium nitride thin films by nitrogen-ion-assisted pulsed laser deposition Paper

Yeow Whatt Goh, Yongfeng Lu, ZhongMin Ren, Tow Chong Chong

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456845

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Pulsed laser deposition of nanocrystalline ZnSe:N thin films Paper

Ning Xu, Yuancheng Du, Fuming Li, Bong Hyung Boo

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456846

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Microfabrication and Microstructuring

Progressive growth of tungsten microcones using nanosecond pulsed-Nd:YAG laser irradiation in various atmospheres Paper

Yuji Kawakami, Eiichi Ozawa

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456847

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Industrial Applications

Cutting glass by laser Paper

Hyoung-Shik Kang, Soon-Kug Hong, Seok-Chang Oh, Jong-Yoon Choi, Min-Gyu Song

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456849

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Laser singulation of IC packages Paper

Chengwu An, Kaidong D. Ye, Yuan Yuan, Minghui Hong, Yongfeng Lu

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456850

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Cleaning

Particle on the surface: basic physical problems related to laser cleaning Paper

Boris S. Luk'yanchuk, Yuan Wei Zheng, Yongfeng Lu

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456851

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Microsystems and Microelements

Effects of interpulse and intrapulse shaping during laser percussion drilling Paper

David K. Y. Low, Lin Li

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456852

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Ultrafast Laser Processing

Ultrafast laser ablation of dielectrics employing temporally shaped femtosecond pulses Paper

Razvan Stoian, Mark Boyle, Andreas Thoss, Arkadi Rosenfeld, David Ashkenasi, Georg Korn, Eleanor E. B. Campbell, Ingolf V. Hertel

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456853

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Industrial Applications

μ-BGA (ball grid array) singulation with a pulsed Nd:YAG laser Paper

Kwang-Yeol Baek, Cheon Lee

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456854

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Modification

Characterization of modified surface of indium tin oxide film during process of laser patterning Paper

JiNan Zeng, Hwee Lin Koh, ZhongMin Ren, Wen Dong Song, Yongfeng Lu

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456855

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Fundamental Aspects

Temperature effect for exciton dynamics in ZnCdSe/ZnSe QWs Paper

JiNan Zeng, Yongfeng Lu, Yasuo Oka

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456856

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Microfabrication and Microstructuring

Laser micromachining for Ag ion exchanged glasses Paper

Tadashi Koyama, Keiji Tsunetomo, Kenji Kamada, Kenichi Nakama

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456857

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Microstructures formed on silicon wafer by CO₂ laser irradiation Paper

Weijie Wang, Yongfeng Lu, Chengwu An, Minghui Hong

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456859

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Fundamental Aspects

Steam-assisted laser ablation of metal substrate Paper

M. L. Koh, Ming Hui Hong, Sha Zhu, Yongfeng Lu

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456860

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Diagnostics and real-time monitoring of pulsed laser ablation Paper

Ming Hui Hong, Yongfeng Lu, Tow Chong Chong

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456861

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Observation of temporary degeneration of material transmittance under strong laser irradiation Paper

Chengwu An, Kok Leong Ler, Yuan Yuan, Yeow Whatt Goh, Minghui Hong, Yongfeng Lu

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456862

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Systems and Optics

Advancement in very-short-wavelength emission in solid state lasers Paper

Muhammad Muddassir Gualini

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456863

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Industrial Applications

Laser thinning of the thickness of a-GeS₂ films Paper

Shuichi Kawabata, Yoshihisa Murakami, Yasunori Ozawa, Moriaki Wakaki

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456864

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Fundamental Aspects

Orientation dependence of kinetics of laser-induced liquid-solid phase transitions in A₃B₅ single crystals Paper

Elena I. Gatskevich, Gennadii D. Ivlev

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456866

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Optics Fabrication

Fabrication of microlenses and microlens arrays using local melting of glass plate by CO₂ laser Paper

Moriaki Wakaki, Yuichi Komachi, Genichi Kanai, Hideo Fukumoto, Shuichi Kawabata

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456867

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Ultrafast Laser Processing

Subpicosecond ion emission from transparent dielectrics Paper

Juergen Reif, Florenta Costache, Matthias Henyk

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456868

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Systems and Optics

All-optical full logic unit with femtosecond switching Paper

Reiner P. Schmid, Juergen Reif

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456869

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Industrial Applications

Polymer welding with lasers: chances and hurdles Paper

Friedrich G. Bachmann

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456870

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Microsystems and Microelements

Fabrication of micropumps with Q-switched Nd:YAG-lasers Paper

Tuan-Anh Mai, Nam-Trung Nguyen

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456871

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Systems and Optics

Development of a high-performance UV-DPSS laser drilling system for PWB Paper

Daisuke Yokohagi, Yasuhiro Mizutani, Koki Ichihashi, Daiji Narita, Kenji Kawazoe, Hideaki Nagatoshi, Katsuichi Ukita, Hidehiko Karasaki

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456872

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Pulsed Laser Deposition

Film growth on single MgO and SiO₂ covered Si substrate by pulsed laser deposition Paper

Ying Su, Jing Zhao, Li Lu, Man On Lai, Wen Dong Song, Yongfeng Lu

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456874

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Advanced Microfabrication Technology

Laser ablation patterning of dielectric layer stacks for 193-nm mask fabricaton Paper

Juergen Ihlemann, Katharina Rubahn, Roland Thielsch

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456875

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Ultrafast Laser Processing

Morphological characterization of various kinds of materials in femtosecond laser micromachining Paper

Kosuke Kawahara, Yasunobu Kurogi, Naoyuki Matsuo, Hiroshi Sawada, Atsushi Yokotani, Kou Kurosawa

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456876

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Development of laser turning using femtosecond laser ablation Paper

Atsushi Yokotani, Kosuke Kawahara, Yasunobu Kurogi, Naoyuki Matsuo, Hiroshi Sawada, Kou Kurosawa

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456877

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Pulsed Laser Deposition

Pulsed laser deposition of ceramics and diamond-like carbon on PMMA for tribological applications Paper

Georg Schlaghecken, Yibran Perera, Ernst-Wolfgang Kreutz, Reinhart Poprawe

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456878

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Fabrication of Ce:YIG film with different composition by pulsed-laser deposition Paper

Yoshiki Nakata, Yuko Tashiro, Tatsuo Okada, Mitsuo Maeda, Sadao Higuchi, Kiyotaka Ueda

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456879

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Optics Fabrication

Laser-ablation-based technique for flexible fabrication of microlenses in polymer materials Paper

Kris Naessens, Peter Van Daele, Roel G. Baets

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456880

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Overview

Recent progress of laser precision microfabrication in China Paper

Zhaogu Cheng, Guoliang Xu, Quanzhong Zhao, Cuiqing Liu

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456881

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Cleaning

Dry laser cleaning threshold fluence: How can it be measured accurately? Paper

Alanna Fernandes, Deb M. Kane

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456882

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Optics Fabrication

Laser shaping of diamond for IR diffractive optical elements Paper

V. V. Kononenko, Vitali I. Konov, Sergej M. Pimenov, Alexander M. Prokhorov, Vladimir S. Pavelyev, Victor A. Soifer, Barbara Luedge, Michael Rudolf Duparre

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456884

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Industrial Applications

High-speed microvia formation with UV solid state lasers Paper

Corey M. Dunsky, Hisashi Matsumoto, Glenn Simenson

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456885

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Excimer laser crystallized poly-Si TFTs on plastic substrates Paper

Dharam Pal Gosain

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456886

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High-resolution 157-nm imaging for lithography and micromachining applications Paper

Malcolm C. Gower, Julian S. Cashmore, Michael D. Whitfield, Philipp Gruenewald

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456887

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Comparison of machining strategies for ceramics using frequency-converted Nd:YAG and excimer lasers Paper

Hans Kurt Toenshoff, Andreas Ostendorf, Klaus Koerber, Klaus Meyer

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456888

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Ultrafast Laser Processing

Focal point images of phase-shifted laser beam using femtosecond optical polarigraphy Paper

Aritsune Nagamura, Hiroki Shibata, Koichi Toyoda

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456889

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Ablation deposition using phase-shifted ultrashort laser pulse Paper

Masanori Miyazawa, Atsushi Masagaki, Yasutaka Hanada, Koichi Toyoda

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456890

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Ultrafast laser-induced crystallization of amorphous silicon films Paper

Taeyul Choi, David J. Hwang, Constantine P. Grigoropoulos

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456891

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Modification

Synthesis of pure C40 TiSi₂ for Si wafer fabrication Paper

S. Y. Chen, Zexiang Shen, S. Y. Xu, Alex K. See, Lap Hung Chan, Wen Shen Li

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456893

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Fundamental Aspects

Dynamic observation of laser-induced damage made inside of transparent materials Paper

Yoshiro Ito, Satoshi Kiyoku, Tsutomu Ogura, Naotake Mohri

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456894

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Advanced Microfabrication Technology

Characterization of fused silica ablation by F₂-KrF excimer laser multiwavelength excitation process Paper

Kotaro Obata, Koji Sugioka, Toshimitsu Akane, Naoko Aoki, Koichi Toyoda, Katsumi Midorikawa

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456895

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Overview

Femtosecond pulses for medicine and production technology: overview of a German national project Paper

Friedrich Dausinger

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456896

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Ultrafast Laser Processing

Precision drilling of metals and ceramics with short- and ultrashort-pulsed solid state lasers Paper

Christian Foehl, Detlef Breitling, Knut Jasper, Joachim Radtke, Friedrich Dausinger

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456897

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Microfabrication and Microstructuring

Laser microfabrication: present to future applications Paper

Gnian Cher Lim, Tuan-Anh Mai

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456898

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Advanced Microfabrication Technology

GaN micromachining by short wavelength pulsed laser irradiation Paper

Toshimitsu Akane, Koji Sugioka, Kotaro Obata, Naoko Aoki, Koichi Toyoda, Katsumi Midorikawa

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456899

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Modification

Application of photosensitive GeO₂-B₂O₃-SiO₂ thin films to optical waveguide Paper

Hiroaki Nishiyama, Isamu Miyamoto, Kenji Kintaka, Junji Nishii

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456900

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Ultrafast Laser Processing

Hole formation process in laser deep drilling with short and ultrashort pulses Paper

Taras V. Kononenko, Sergei M. Klimentov, Serge V. Garnov, Vitali I. Konov, Detlef Breitling, Christian Foehl, Andreas Ruf, Joachim Radtke, Friedrich Dausinger

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456901

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Systems and Optics

Highly reliable high-power 266-nm all-solid-state UV laser Paper

Tetsuo Kojima, Susumu Konno, Shuichi Fujikawa, Masaki Seguchi, Yushi Takenaka, Koji Yasui, Tomosumi Kamimura, Masashi Yoshimura, Yusuke Mori, et al.

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456902

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High-power high-brightness diode-pumped solid state laser for precise laser processing Paper

Shuichi Fujikawa, Keisuke Furuta, Masaki Seguchi, Tetsuo Kojima, Yushi Takenaka, Koji Yasui

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456903

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In-situ measurement of VUV optical materials under F₂ laser irradiation Paper

Yasuo Itakura, Akira Sumitani, Fumika Yoshida, Youichi Kawasa, Jing Zhang, Osamu Wakabayashi, Hakaru Mizoguchi

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456904

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Advanced Microfabrication Technology

Precision machining of innovative materials using 157-nm excimer laser radiation Paper

Andreas Ostendorf, Uwe Stamm, Thorsten Temme

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456905

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Industrial Applications

Developments in laser joining and welding of plastics using high-power laser diodes Paper

Tony Hoult, Raymond Ong

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456906

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Systems and Optics

Uniformity initialization optical system for phase-change optical disk Paper

Masaaki Takita, Yoshihiro Okino, Sumio Nakahara

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456907

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Optics Fabrication

Holographic optical element for laser soldering Paper

Sumio Nakahara, Tatsuya Hayashi, Noriyuki Sudou, Shigeyoshi Hisada, Takeyoshi Fujita

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456804

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Overview

Laser microprocessing in data storage industry Paper

Tow Chong Chong, Yongfeng Lu

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456805

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Ultrafast Laser Processing

Laser-induced expansion and ablation mechanisms of organic materials Paper

Yoichiroh Hosokawa, Takashi Mito, Takuji Tada, Tsuyoshi Asahi, Hiroshi M. Masuhara

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456806

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Microsystems and Microelements

Laser processes for MEMS manufacture Paper

Andrew S. Holmes

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456807

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Industrial Applications

High-accuracy laser mask repair technology using ps UV solid state laser Paper

Yukio Morishige

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456808

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Cleaning

Modeling of chemical and mechanical aspects in laser restoration of artworks Paper

Costas Fotakis, Athanassia Athanassiou, Efi Andreou, Vivi Tornari, Antonia Bonarou, Laura Antonucci, Dmitrios Anglos, Savas K. Georgiou, Vassilis Zafiropulos

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456809

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Systems and Optics

Novel ultrashort-pulse fiber lasers and their applications Paper

Heinrich Endert, Almantas Galvanauskes, Gregg Douglas Sucha, Rajesh S. Patel

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456810

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Overview

History and future prospects of excimer lasers Paper

Dirk Basting, Klaus D. Pippert, Uwe Stamm

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456812

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Fundamental Aspects

Scattering of evaporation particles in ultrashort-pulse laser ablation Paper

Etsuji Ohmura, Ichirou Fukumoto, Isamu Miyamoto

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456813

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Systems and Optics

Temperature dependence of SHG conversion efficiency of nonlinear optical crystal Paper

Etsuji Ohmura, Tatsuya Taniguchi, Isamu Miyamoto

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456814

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Industrial Applications

Ultra-line-narrowed F₂ laser for microlithography Paper

Hiroshi Komori, Tatsuya Ariga, Hidenori Watanabe, Takahito Kumazaki, Naoki Kitatochi, Kotaro Sasano, Yoshifumi Ueno, Toshihiro Nishisaka, Ryoichi Nohdomi, et al.

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456815

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Fundamental Aspects

Laser-induced rear ablation of metal thin films Paper

Tomokazu Sano, Hirokazu Yamada, Takayuki Nakayama, Isamu Miyamoto

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456816

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Microfabrication and Microstructuring

Generation of periodic microstructures with femtosecond laser pulses Paper

Hans Kurt Toenshoff, Andreas Ostendorf, Frank Korte, J. Serbin, Thorsten Bauer

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456818

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Industrial Applications

Precise laser-assisted 3D microstructuring of metals and alloys Paper

Gerd Sepold, Andreas Stephen, Thorsten Lilienkamp, Simeon Metev

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456819

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In the following, three different laser-assisted processes are described and herewith produced components in the fields of micromechanics are presented. First, excimer laser projection technology is modified in order to produce large- area microstructures. It enables the transfers of structures having dimensions much larger than the laser beam section by synchronized scanning of the mask and the substrate. This technology is used to manufacture master structures in polymers for injection molding inserts. The insert tool itself is produced by electroforming of the master leading to metallic copy of the master. In this way, a metallic insert tool is performed for the production of microfluidic components. Its structured area is 2 cm² at a resolution better than 3 micrometers . Second, laser-induce wet chemical etching using a sw-Nd:YAG laser is described. The principle of this micromachining method is based on a local thermal activation of chemical etching reactions on the surface of the material. The direct processing of the workpiece resulted in high accuracy microstructuring with smooth surfaces and without any debris or thermal influence on the material properties. Among others, one example in the field of application in micromechanics is the fabrication of superelastic micro-grippers prepared by cutting of temperature sensitive shape memory alloys. The achieved sidewall angle is about 3 degrees and the surface roughness less than 0.4 micrometers for machined 200 micrometers thick foils. Third, a combination of the two afore mentioned processes leads to complex shaped microstructures in metallic parts. Thereby, additional microstructures of specific shape, e.g. V-shaped grooves, are machined by laser-induced wet chemical etching into metallic inserts produced by electroforming of excimer laser-induced wet chemical etching into metallic inserts produce by electroforming of excimer laser machined masters. They are used for hot embossing tools enabling the production of special housings which can be hermetically sealed by ultrasonic welding.

Cleaning

Wavelength dependence of laser cleaning for field emitter arrays Paper

Mikio Takai, Naoki Suzuki, Oguz Yavas, Akihiko Hosono, Soichiro Okuda

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456820

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Laser cleaning of silicon wafers: mechanisms and efficiencies Paper

Mario Mosbacher, M. Bertsch, H.-J. Muenzer, V. Dobler, B.-U. Runge, Dieter Baeuerle, Johannes Boneberg, Paul Leiderer

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456821

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Liquid-assisted pulsed laser cleaning with near-infrared and ultraviolet pulsed lasers Paper

Constantine P. Grigoropoulos, Dongsik Kim

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456822

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Peculiarities of steam laser cleaning Paper

Vadim P. Veiko, Elena A. Shakhno, Boris V. Volkovyski

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456824

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Model for discoloration effect in pigments in laser cleaning of artworks by laser ablation Paper

Boris S. Luk'yanchuk, Vassilis Zafiropulos

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456825

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Laser cleaning of particles from surfaces: issues relating to sample preparation Paper

Deb M. Kane, Alanna Fernandes

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456826

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Microfabrication and Microstructuring

Optical near-field effects in surface nanostructuring and laser cleaning Paper

H.-J. Muenzer, Mario Mosbacher, M. Bertsch, Oliver Dubbers, F. Burmeister, A. Pack, Reinhold Wannemacher, B.-U. Runge, Dieter Baeuerle, et al.

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456827

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Cleaning

Dynamic particle removal by nanosecond dry laser cleaning: theory Paper

Nikita Arnold, G. Schrems, T. Muehlberger, M. Bertsch, Mario Mosbacher, Paul Leiderer, Dieter Baeuerle

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456828

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Laser-induced surface cleaning from diamond particles Paper

Vitali I. Konov, V. V. Kononenko, A. M. Lomonosov, V. G. Mihalevich, Sergej M. Pimenov, K. V. Zhuk

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456829

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Pulsed Laser Deposition

Comparison of ITO ablation characteristics using KrF excimer laser and Nd:YAG laser Paper

KyoungCheol Lee, Cheon Lee

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456831

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Systems and Optics

Inazuma: 12 watts of UV at 355 nm Paper

Dafydd T. Thomas, Mark S. Keirstead, Norman Hodgson

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456832

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Microfabrication and Microstructuring

Laser microfabrication by ultrashort UV pulses Paper

I. Zergioti, D. G. Papazoglou, Nikos A. Vainos, Costas Fotakis

Proceedings Volume Second International Symposium on Laser Precision Microfabrication, (2002) https://doi.org/10.1117/12.456833

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