PROCEEDINGS VOLUME 4447
INTERNATIONAL SYMPOSIUM ON OPTICAL SCIENCE AND TECHNOLOGY | 29 JULY - 3 AUGUST 2001
Surface Scattering and Diffraction for Advanced Metrology
IN THIS VOLUME

0 Sessions, 18 Papers, 0 Presentations
Proceedings Volume 4447 is from: Logo
INTERNATIONAL SYMPOSIUM ON OPTICAL SCIENCE AND TECHNOLOGY
29 July - 3 August 2001
San Diego, CA, United States
Theory and Analysis I
Proc. SPIE 4447, Enhanced backscattering at grazing angle, 0000 (23 October 2001); doi: 10.1117/12.446719
Proc. SPIE 4447, Scattering of electromagnetic waves from the random surface of a left-handed medium, 0000 (23 October 2001); doi: 10.1117/12.446730
Proc. SPIE 4447, Fabrication of one-dimensional random surfaces that display enhanced backscattering for only one specified angle of incidence, 0000 (23 October 2001); doi: 10.1117/12.446732
Proc. SPIE 4447, Excitation of surface plasmon polaritons by the scattering of a volume electromagnetic beam from a circularly symmetric defect on a planar metal surface, 0000 (23 October 2001); doi: 10.1117/12.446733
Proc. SPIE 4447, Numerical study of an inverse scattering algorithm for metallic and dielectric surfaces, 0000 (23 October 2001); doi: 10.1117/12.446734
Instruments and Application
Proc. SPIE 4447, Phase-shifting interference microscope for the characterization of metallic interconnections of flat panel displays, 0000 (23 October 2001); doi: 10.1117/12.446735
Proc. SPIE 4447, Metrological characterization of an ARS sensor based on an elliptical mirror system and a calibrated CMOS photo detector array, 0000 (23 October 2001); doi: 10.1117/12.446736
Proc. SPIE 4447, Optical characterization of MEMS deformable mirror array structures, 0000 (23 October 2001); doi: 10.1117/12.446720
Proc. SPIE 4447, Modeling the appearance of special effect pigment coatings, 0000 (23 October 2001); doi: 10.1117/12.446721
Proc. SPIE 4447, Influence of target surfaces and speckles for eye-safe scannerless imaging laser radar, 0000 (23 October 2001); doi: 10.1117/12.446722
Proc. SPIE 4447, Reflectivity of Al coating sputtered by using the nitrogen-containing plasma, 0000 (23 October 2001); doi: 10.1117/12.446723
Theory and Analysis II
Proc. SPIE 4447, Angular spectrum redistribution from rough surface scattering, 0000 (23 October 2001); doi: 10.1117/12.446724
Proc. SPIE 4447, Spectral coherence from rough surface scattering with a secondary source, 0000 (23 October 2001); doi: 10.1117/12.446725
Proc. SPIE 4447, Redistribution of modes in a surface disordered waveguide, 0000 (23 October 2001); doi: 10.1117/12.446726
Proc. SPIE 4447, Band-limited uniform diffuser in transmission II: a multilayer system, 0000 (23 October 2001); doi: 10.1117/12.446727
Proc. SPIE 4447, Measuring correlation between speckle patterns reflected from rough surfaces at different wavelengths by adaptive photo-EMF detector, 0000 (23 October 2001); doi: 10.1117/12.446728
Proc. SPIE 4447, Spectral invariance propagation of ultrashort laser pulses and its changes by aperture, 0000 (23 October 2001); doi: 10.1117/12.446729
Proc. SPIE 4447, Mueller matrix measurements of small spherical particles deposited on c-Si wafer, 0000 (23 October 2001); doi: 10.1117/12.446731
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