PROCEEDINGS VOLUME 4559
MICROMACHINING AND MICROFABRICATION | 21-25 OCTOBER 2001
MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication
IN THIS VOLUME

0 Sessions, 23 Papers, 0 Presentations
Session I  (4)
Session II  (3)
Session III  (3)
Session IV  (4)
Session V  (4)
Session VI  (2)
MICROMACHINING AND MICROFABRICATION
21-25 October 2001
San Francisco, CA, United States
Session I
Proc. SPIE 4559, MEMS programs at DARPA, 0000 (1 October 2001); doi: 10.1117/12.443019
Proc. SPIE 4559, Single-layer silicon-on-insulator MEMS gyroscope for wide dynamic range and harsh environment applications, 0000 (1 October 2001); doi: 10.1117/12.443029
Proc. SPIE 4559, MEMS safety switch for controlling critical software operations, 0000 (1 October 2001); doi: 10.1117/12.443036
Proc. SPIE 4559, Single-crystal silicon triple-torsional micro-oscillators for use in magnetic resonance force microscopy, 0000 (1 October 2001); doi: 10.1117/12.443037
Session II
Proc. SPIE 4559, Optimization, simulation, and fabrication of a microgyroscope, 0000 (1 October 2001); doi: 10.1117/12.443038
Proc. SPIE 4559, Simple wireless powering scheme for MEMS devices, 0000 (1 October 2001); doi: 10.1117/12.443039
Proc. SPIE 4559, Laser micromachining for manufacturing MEMS devices, 0000 (1 October 2001); doi: 10.1117/12.443040
Session III
Proc. SPIE 4559, Novel MEMS devices and silicon micromachined components for high-frequency circuits, 0000 (1 October 2001); doi: 10.1117/12.443041
Proc. SPIE 4559, MEMS antennas for millimeter-wave applications, 0000 (1 October 2001); doi: 10.1117/12.443020
Proc. SPIE 4559, Industrial applications for LIGA-fabricated micro heat exchangers, 0000 (1 October 2001); doi: 10.1117/12.443021
Session IV
Proc. SPIE 4559, Gryphon M3 system: integration of MEMS for flight control, 0000 (1 October 2001); doi: 10.1117/12.443022
Proc. SPIE 4559, Piezoelectric aluminum nitride thin films for ultrasonic transducers, 0000 (1 October 2001); doi: 10.1117/12.443023
Proc. SPIE 4559, Micromachined pressure gauge for the vacuum range based on damping of a resonator, 0000 (1 October 2001); doi: 10.1117/12.443024
Proc. SPIE 4559, Modeling of rf MEMS switches, 0000 (1 October 2001); doi: 10.1117/12.443025
Session V
Proc. SPIE 4559, MEMS multisensor system for flight testing, 0000 (1 October 2001); doi: 10.1117/12.443026
Proc. SPIE 4559, Fabrication and performance of d33-mode lead-zirconate-titanate (PZT) MEMS accelerometers, 0000 (1 October 2001); doi: 10.1117/12.443027
Proc. SPIE 4559, Large-displacement microactuators in deep reactive ion-etched single-crystal silicon, 0000 (1 October 2001); doi: 10.1117/12.443028
Proc. SPIE 4559, High-efficiency microscale power using a fuel processor and fuel cell, 0000 (1 October 2001); doi: 10.1117/12.443030
Session VI
Proc. SPIE 4559, GaAs-membrane-supported millimeter-wave filters, 0000 (1 October 2001); doi: 10.1117/12.443031
Proc. SPIE 4559, Microengineered cold gas thruster system for a co-orbiting satellite assistant (COSA), 0000 (1 October 2001); doi: 10.1117/12.443032
Poster Session
Proc. SPIE 4559, Analysis of inertia forces influence on operation voltage of electrostatic microrelays, 0000 (1 October 2001); doi: 10.1117/12.443033
Proc. SPIE 4559, Magnetostatic straight edge resonators on micromachined silicon membrane, 0000 (1 October 2001); doi: 10.1117/12.443034
Proc. SPIE 4559, Micro brands manufacturing by copper vapor laser, 0000 (1 October 2001); doi: 10.1117/12.443035
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