PROCEEDINGS VOLUME 4561
MICROMACHINING AND MICROFABRICATION | 21-25 OCTOBER 2001
MOEMS and Miniaturized Systems II
MICROMACHINING AND MICROFABRICATION
21-25 October 2001
San Francisco, CA, United States
Hot Topics
Proc. SPIE 4561, MEMS devices for all optical networks, 0000 (2 October 2001); doi: 10.1117/12.443074
Proc. SPIE 4561, MOEMS for optical communication: status of the European industrial activities and technical and economical trends for the next three years, 0000 (2 October 2001); doi: 10.1117/12.443083
Proc. SPIE 4561, Thermal management in optical MEMS, 0000 (2 October 2001); doi: 10.1117/12.443090
Shutter, Modulator, and Scanner I
Proc. SPIE 4561, MEMS spatial light modulators with integrated electronics, 0000 (2 October 2001); doi: 10.1117/12.443099
Proc. SPIE 4561, Design optimization of an electrostatically driven micro scanning mirror, 0000 (2 October 2001); doi: 10.1117/12.443106
Proc. SPIE 4561, High-frequency raster pinch correction scanner for retinal scanning displays, 0000 (2 October 2001); doi: 10.1117/12.443107
Shutter, Modulator, and Scanner II
Proc. SPIE 4561, Membrane mirrors for vision science adaptive optics, 0000 (2 October 2001); doi: 10.1117/12.443108
Proc. SPIE 4561, Magnetically actuated microshutter arrays, 0000 (2 October 2001); doi: 10.1117/12.443109
Proc. SPIE 4561, PLZT-based electro-optic modules for micromachined biophotonics systems, 0000 (2 October 2001); doi: 10.1117/12.443110
Fiber Optics and MOEMS Switches
Proc. SPIE 4561, MOEMS: enabling technologies for large optical cross-connects, 0000 (2 October 2001); doi: 10.1117/12.443075
Proc. SPIE 4561, Self-assembly of surface-micromachined structures using electrostatic attraction, 0000 (2 October 2001); doi: 10.1117/12.443076
Proc. SPIE 4561, Fast 1x2 and 2x2 fiber optic switches with piezoelectric actuation, 0000 (2 October 2001); doi: 10.1117/12.443077
Proc. SPIE 4561, Silicon-on-insulator micromechanical optical switch with postprocessed polymeric waveguides, 0000 (2 October 2001); doi: 10.1117/12.443078
Proc. SPIE 4561, Low-cost fiber collimation for MOEMS switches by ink-jet printing, 0000 (2 October 2001); doi: 10.1117/12.443079
Micro-optic Technologies
Proc. SPIE 4561, Transfer of micro-optical structures into GaAs and diamond, 0000 (2 October 2001); doi: 10.1117/12.443080
Proc. SPIE 4561, Microlens fabrication using glass transition temperature modification by the LIGA process, 0000 (2 October 2001); doi: 10.1117/12.443081
Proc. SPIE 4561, Improvement on the surface roughness of microlens array in the excimer laser machining process, 0000 (2 October 2001); doi: 10.1117/12.443082
Proc. SPIE 4561, Integration nanometer indicating system for reducing temperature drift of interferometer, 0000 (2 October 2001); doi: 10.1117/12.443084
MOEM Integration
Proc. SPIE 4561, High-efficiency optical MEMS by the integration of photonic lattices with surface MEMS, 0000 (2 October 2001); doi: 10.1117/12.443085
Proc. SPIE 4561, Light-activated self-generation and parametric amplification for MEMS oscillators, 0000 (2 October 2001); doi: 10.1117/12.443086
Proc. SPIE 4561, Component development and integration issues for MOEMS, 0000 (2 October 2001); doi: 10.1117/12.443087
Proc. SPIE 4561, Flip-chip fabrication of integrated micromirror arrays using a novel latching off-chip hinge mechanism, 0000 (2 October 2001); doi: 10.1117/12.443088
MOEMS for Monitoring and Control
Proc. SPIE 4561, MOEMS integrated optical monitoring, 0000 (2 October 2001); doi: 10.1117/12.443089
Proc. SPIE 4561, Vertical stiffening members for flatness control of surface-micromachined structures, 0000 (2 October 2001); doi: 10.1117/12.443091
Proc. SPIE 4561, Control of image-shifting coils for vibration isolation of an electron microscope, 0000 (2 October 2001); doi: 10.1117/12.443092
Proc. SPIE 4561, Optomechanical variations and control in a MOEMS switch model, 0000 (2 October 2001); doi: 10.1117/12.443093
Micromirrors
Proc. SPIE 4561, Design and fabrication of micromirror arrays for UV lithography, 0000 (2 October 2001); doi: 10.1117/12.443094
Proc. SPIE 4561, Active-matrix-addressed micromirror array for wavefront correction in adaptive optics, 0000 (2 October 2001); doi: 10.1117/12.443095
Proc. SPIE 4561, Silicon nitride biaxial pointing mirrors with stiffening ribs, 0000 (2 October 2001); doi: 10.1117/12.443096
Proc. SPIE 4561, Optical performance of pivoting micromirrors, 0000 (2 October 2001); doi: 10.1117/12.443097
Proc. SPIE 4561, Fabrication of five-level ultraplanar micromirror arrays by flip-chip assembly, 0000 (2 October 2001); doi: 10.1117/12.443098
MOEMS-Related Sensors
Fiber Optics and MOEMS Switches
Proc. SPIE 4561, Development of advanced micromirror arrays by flip-chip assembly, 0000 (2 October 2001); doi: 10.1117/12.443105
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