PROCEEDINGS VOLUME 4593
INTERNATIONAL SYMPOSIUM ON MICROELECTRONICS AND MEMS | 17-19 DECEMBER 2001
Design, Characterization, and Packaging for MEMS and Microelectronics II
IN THIS VOLUME

0 Sessions, 34 Papers, 0 Presentations
MOEMS  (6)
RF MEMS  (1)
INTERNATIONAL SYMPOSIUM ON MICROELECTRONICS AND MEMS
17-19 December 2001
Adelaide, Australia
MOEMS
Proc. SPIE 4593, MOEM-based optical switch collimating lens, 0000 (19 November 2001); doi: 10.1117/12.448848
Poster Session
Proc. SPIE 4593, Packaging of the rf MEMS switch, 0000 (19 November 2001); doi: 10.1117/12.448864
Microelectronics I
Proc. SPIE 4593, Coupling and quality factors in RFID, 0000 (19 November 2001); doi: 10.1117/12.448865
Proc. SPIE 4593, New architecture of fast parallel multiplier using fast parallel counter with FPA (first partial product addition), 0000 (19 November 2001); doi: 10.1117/12.448866
Proc. SPIE 4593, Novel testing scheme for selection of capacitive fingerprint sensor LSIs, 0000 (19 November 2001); doi: 10.1117/12.448833
Device Design and Characterization
Proc. SPIE 4593, MEMS cantilever beam electrostatic pull-in model, 0000 (19 November 2001); doi: 10.1117/12.448834
Proc. SPIE 4593, Electrostatic interactions in micro-electro-mechanical resonant oscillators, 0000 (19 November 2001); doi: 10.1117/12.448835
Proc. SPIE 4593, Design of low-cost resonant mode sensors, 0000 (19 November 2001); doi: 10.1117/12.448836
Proc. SPIE 4593, Design considerations of the biaxial frequency-shifted microaccelerometer, 0000 (19 November 2001); doi: 10.1117/12.448837
Proc. SPIE 4593, Design and simulation of a novel micromachined vibratory gyroscope with enhanced-sensitivity performance, 0000 (19 November 2001); doi: 10.1117/12.448838
Proc. SPIE 4593, MEMS-based micromirror device for optical add/drop module, 0000 (19 November 2001); doi: 10.1117/12.448839
MOEMS
Proc. SPIE 4593, Design of a fully compliant bistable micromechanism for switching devices, 0000 (19 November 2001); doi: 10.1117/12.448840
Proc. SPIE 4593, Design of an acoustic wave actuator using Lorentz force, 0000 (19 November 2001); doi: 10.1117/12.448841
Proc. SPIE 4593, Monolithic fabrication of Rotman lenses, 0000 (19 November 2001); doi: 10.1117/12.448842
Proc. SPIE 4593, Shape analysis of cylindrical micromirrors for angular focusing, 0000 (19 November 2001); doi: 10.1117/12.448843
Proc. SPIE 4593, Novel design and fabrication of Si optical bench, 0000 (19 November 2001); doi: 10.1117/12.448844
MEMS Packaging and Design
Proc. SPIE 4593, LIGA: a fabrication technology for industry?, 0000 (19 November 2001); doi: 10.1117/12.448845
Proc. SPIE 4593, Modeling and fabrication of a planar thin film airflow sensor, 0000 (19 November 2001); doi: 10.1117/12.448846
Proc. SPIE 4593, Thermal modeling of a MEMS for determination of fluid and flow characteristics, 0000 (19 November 2001); doi: 10.1117/12.448847
Proc. SPIE 4593, Simulation and optimization of a micromachined gyroscope using high-aspect-ratio micromachining fabrication process, 0000 (19 November 2001); doi: 10.1117/12.448849
RF MEMS
Proc. SPIE 4593, Design of rotating MEMS tunable capacitors for use at rf and microwave frequencies, 0000 (19 November 2001); doi: 10.1117/12.448850
Microelectronics II
Proc. SPIE 4593, Massively parallel per-pixel-based zerotree processing architecture for real-time video compression, 0000 (19 November 2001); doi: 10.1117/12.448851
Proc. SPIE 4593, Improved heuristics for optimal parallel multiplier synthesis, 0000 (19 November 2001); doi: 10.1117/12.448852
Proc. SPIE 4593, 60Co gamma-irradiation-induced defects in MOCVD n-GaN, 0000 (19 November 2001); doi: 10.1117/12.448853
Proc. SPIE 4593, Fully digital pixel readout architecture with a current-mode A/D converter, 0000 (19 November 2001); doi: 10.1117/12.448854
Poster Session
Proc. SPIE 4593, Force-deflection behavior of piezoelectric actuators, 0000 (19 November 2001); doi: 10.1117/12.448855
Proc. SPIE 4593, Modeling of electromechanical forces in electrostatic microrelay with elastically deformed anchor, 0000 (19 November 2001); doi: 10.1117/12.448856
Proc. SPIE 4593, Investigation of stress in aluminum thin film for MEMS applications, 0000 (19 November 2001); doi: 10.1117/12.448857
Proc. SPIE 4593, Novel wafer-through technique for interconnects, 0000 (19 November 2001); doi: 10.1117/12.448858
Proc. SPIE 4593, Analytical study of microchannel and passive microvalve: application to micropump simulator, 0000 (19 November 2001); doi: 10.1117/12.448859
Proc. SPIE 4593, Electrical analogies applied on a volumetric micropump: highlights of its fluidic resonant frequency, 0000 (19 November 2001); doi: 10.1117/12.448860
Proc. SPIE 4593, Design of the rf-MEMS voltage-tunable capacitor for wide tunable range, 0000 (19 November 2001); doi: 10.1117/12.448861
Proc. SPIE 4593, Damping caused by the gas flow in the holes of perforated structures, 0000 (19 November 2001); doi: 10.1117/12.448862
Proc. SPIE 4593, Mobility spectrum techniques for characterizing multilayer semiconductor structures, 0000 (19 November 2001); doi: 10.1117/12.448863
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