PROCEEDINGS VOLUME 4608
WORKSHOP ON NANOSTRUCTURE SCIENCE, METROLOGY, AND TECHNOLOGY | 5-7 SEPTEMBER 2001
Nanostructure Science, Metrology, and Technology
IN THIS VOLUME

0 Sessions, 34 Papers, 0 Presentations
WORKSHOP ON NANOSTRUCTURE SCIENCE, METROLOGY, AND TECHNOLOGY
5-7 September 2001
Gaithersburg, MD, United States
General Session
Proc. SPIE 4608, Silicon technology: from micro to nano and why federal investment matters, 0000 (24 July 2002); doi: 10.1117/12.427103
Biological Sciences
Proc. SPIE 4608, Nanostructures and biology: some introductory remarks, 0000 (24 July 2002); doi: 10.1117/12.427104
Military Sciences
Proc. SPIE 4608, Nanoelectronics: a military perspective, 0000 (24 July 2002); doi: 10.1117/12.427105
Metrological Sciences
Proc. SPIE 4608, The challenge of nanometrology, 0000 (24 July 2002); doi: 10.1117/12.427107
Military Sciences
Proc. SPIE 4608, Nanometer science and technology (Viewgraphs Only), 0000 (24 July 2002); doi: 10.1117/12.427109
Electronics Sciences
Proc. SPIE 4608, New methods for fabricating step and flash imprint lithography templates, 0000 (24 July 2002); doi: 10.1117/12.437269
Proc. SPIE 4608, Ultrashallow p+ junctions in silicon formed by molecular-beam epitaxy using boron delta doping, 0000 (24 July 2002); doi: 10.1117/12.437270
Biological Sciences
Proc. SPIE 4608, Toward a retinal prosthesis for the blind: advanced microelectronics combined with a nanochannel glass electrode array, 0000 (24 July 2002); doi: 10.1117/12.437271
Electronics Sciences
Proc. SPIE 4608, Fabrication of photonic crystals in multilayer organic films, 0000 (24 July 2002); doi: 10.1117/12.437272
Metrological Sciences
Proc. SPIE 4608, The critical role of metrology in nanotechnology, 0000 (24 July 2002); doi: 10.1117/12.437273
Electronics Sciences
Proc. SPIE 4608, Clusters on semiconductor surfaces, 0000 (24 July 2002); doi: 10.1117/12.437690
Proc. SPIE 4608, Chemical modification of surfaces utilizing noncovalent interactions, 0000 (24 July 2002); doi: 10.1117/12.437739
Metrological Sciences
Proc. SPIE 4608, Calibrated displacement actuator for nanometer metrology, 0000 (24 July 2002); doi: 10.1117/12.437740
Proc. SPIE 4608, Nanometer-scale metrology: meeting the nanotechnology measurement challenges, 0000 (24 July 2002); doi: 10.1117/12.437742
Electronics Sciences
Proc. SPIE 4608, Low-cost nanostructure patterning using step and flash imprint lithography, 0000 (24 July 2002); doi: 10.1117/12.437804
Biological Sciences
Proc. SPIE 4608, On-the-spot laser therapy using a smart tissue-activated fiber probe, 0000 (24 July 2002); doi: 10.1117/12.437971
Metrological Sciences
Proc. SPIE 4608, Scan linearity: a hidden factor in SEM magnification calibration, 0000 (24 July 2002); doi: 10.1117/12.437972
Biological Sciences
Proc. SPIE 4608, Nano- and microscale manipulation of biological particles by laser-guided direct writing, 0000 (24 July 2002); doi: 10.1117/12.438454
Electronics Sciences
Proc. SPIE 4608, Optical energy conversion in crystalline nanowires, 0000 (24 July 2002); doi: 10.1117/12.438455
Proc. SPIE 4608, Fractal characterization of nanoscale powder agglomerates, 0000 (24 July 2002); doi: 10.1117/12.438491
Metrological Sciences
Proc. SPIE 4608, Facility for nanoscience research: an overview, 0000 (24 July 2002); doi: 10.1117/12.438493
Electronics Sciences
Proc. SPIE 4608, Effects of etching time and wafer miscut on the morphology of etched Si(111) surfaces, 0000 (24 July 2002); doi: 10.1117/12.465124
Metrological Sciences
Proc. SPIE 4608, New design and uncertainty budget for a metrology UHV-STM used in direct measurements of atom spacings, 0000 (24 July 2002); doi: 10.1117/12.465125
Electronics Sciences
Proc. SPIE 4608, Power actuators for nanotechnology, 0000 (24 July 2002); doi: 10.1117/12.465224
Proc. SPIE 4608, Performance of a nanocrystalline tungsten composite in ballistic impacts, 0000 (24 July 2002); doi: 10.1117/12.465225
General Session
Proc. SPIE 4608, Nanoscience: a new thrust for science in the 21st century?, 0000 (24 July 2002); doi: 10.1117/12.465226
Proc. SPIE 4608, Facilities for fabricating nanostructures, 0000 (24 July 2002); doi: 10.1117/12.465456
Military Sciences
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Proc. SPIE 4608, Report from the military sciences working group, 0000 (24 July 2002); doi: 10.1117/12.465462
Proc. SPIE 4608, Nanoscience research for advanced military electronics, 0000 (24 July 2002); doi: 10.1117/12.465464
Metrological Sciences
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Proc. SPIE 4608, Metrology break-out group, 0000 (24 July 2002); doi: 10.1117/12.465472
Electronics Sciences
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Proc. SPIE 4608, Notes from the NIST/NRL/SPIE workshop on nanostructure science, metrology, and technology: microelectronics group, 0000 (24 July 2002); doi: 10.1117/12.465494
Biological Sciences
Proc. SPIE 4608, Biology and nanoscience: summary of discussions of the biology and nanoscience panel of the SPIE workshop on nanotechnology, 0000 (24 July 2002); doi: 10.1117/12.465476
Proc. SPIE 4608, Sensing macromolecules with microelectronics, 0000 (24 July 2002); doi: 10.1117/12.465477
Proc. SPIE 4608, Nanomedicine (Viewgraphs Only), 0000 (24 July 2002); doi: 10.1117/12.465484
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