PROCEEDINGS VOLUME 4780
INTERNATIONAL SYMPOSIUM ON OPTICAL SCIENCE AND TECHNOLOGY | 7-11 JULY 2002
Surface Scattering and Diffraction for Advanced Metrology II
IN THIS VOLUME

0 Sessions, 21 Papers, 0 Presentations
INTERNATIONAL SYMPOSIUM ON OPTICAL SCIENCE AND TECHNOLOGY
7-11 July 2002
Seattle, WA, United States
Theory and Analysis I
Proc. SPIE 4780, Scattering from high-sloped surfaces using the Kirchhoff approximation, 0000 (22 October 2002); doi: 10.1117/12.451845
Proc. SPIE 4780, Numerical analysis of scattered waves from rough surfaces with and without an object, 0000 (22 October 2002); doi: 10.1117/12.452307
Proc. SPIE 4780, High-order correlation from rough surface scattering, 0000 (22 October 2002); doi: 10.1117/12.452320
Proc. SPIE 4780, Changes in spectrum of light scattered from double passage configuration, 0000 (22 October 2002); doi: 10.1117/12.452319
Theory and Analysis II
Proc. SPIE 4780, Theoretical comparison of scattering losses in planar waveguides with wall roughness and core inhomogeneity, 0000 (22 October 2002); doi: 10.1117/12.453787
Proc. SPIE 4780, Design of one-dimensional random surfaces with specified scattering properties, 0000 (22 October 2002); doi: 10.1117/12.451838
Proc. SPIE 4780, Two-dimensional random surfaces that act as circular diffusers, 0000 (22 October 2002); doi: 10.1117/12.452306
Instruments and Applications I
Proc. SPIE 4780, Surface and interface roughness in magnetic thin films: a comparison using carbon-nanotube atomic force microscopy and soft-x-ray scattering, 0000 (22 October 2002); doi: 10.1117/12.453790
Proc. SPIE 4780, Measurement of lithographic overlay by light-scattering ellipsometry, 0000 (22 October 2002); doi: 10.1117/12.453789
Proc. SPIE 4780, Reflectivity of the AL-N coating: results of mechanical and environmental tests, 0000 (22 October 2002); doi: 10.1117/12.452311
Proc. SPIE 4780, Polarization of scattering by a rough paint surface, 0000 (22 October 2002); doi: 10.1117/12.453785
Proc. SPIE 4780, Analysis and characterization of surface defects in ophthalmic lenses, 0000 (22 October 2002); doi: 10.1117/12.451806
Instruments and Applications II
Proc. SPIE 4780, Advanced system model for 1574-nm imaging scannerless eye-safe laser radar, 0000 (22 October 2002); doi: 10.1117/12.452316
Proc. SPIE 4780, Modeling of an ARS sensor system in spatial and time domain, 0000 (22 October 2002); doi: 10.1117/12.452315
Poster Session
Proc. SPIE 4780, Models of surface-active substance influence on resolution-phase rheological media, 0000 (22 October 2002); doi: 10.1117/12.452313
Instruments and Applications II
Proc. SPIE 4780, Power spectral density (PSD) in stitching interferometer, 0000 (22 October 2002); doi: 10.1117/12.451843
Poster Session
Proc. SPIE 4780, Analysis of experimental reflection spectra from diffraction gratings using the Rayleigh theory and a rigorous method, 0000 (22 October 2002); doi: 10.1117/12.451833
Proc. SPIE 4780, Scatterometer for measuring the visible light scattered from 2D rough surfaces, 0000 (22 October 2002); doi: 10.1117/12.451847
Instruments and Applications II
Proc. SPIE 4780, Anisotropic scatter behaviour of fiber-containing surfaces analyzed by 3D BRDF measurements and simulations, 0000 (22 October 2002); doi: 10.1117/12.458870
Poster Session
Proc. SPIE 4780, Bidirectional reflectance distribution function and hemispherical reflectance of JSC MARS-1, 0000 (22 October 2002); doi: 10.1117/12.461934
Proc. SPIE 4780, Time-resolved x-ray diffraction on laser-shocked crystals, 0000 (22 October 2002); doi: 10.1117/12.469723
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