PROCEEDINGS VOLUME 4928
PHOTONICS ASIA | 14-18 OCTOBER 2002
MEMS/MOEMS Technologies and Applications
IN THIS VOLUME

0 Sessions, 46 Papers, 0 Presentations
Session 1  (7)
Session 2  (4)
Session 3  (7)
Session 4  (5)
Session 5  (5)
PHOTONICS ASIA
14-18 October 2002
Shanghai, China
Session 1
Proc. SPIE 4928, Novel device of passive and fixed alignment of optical fiber using SU-8 photoresist, 0000 (10 September 2002); doi: 10.1117/12.483159
Proc. SPIE 4928, Optical MEMS for high-end microspectrometers, 0000 (10 September 2002); doi: 10.1117/12.483168
Proc. SPIE 4928, Intelligent vision systems, 0000 (10 September 2002); doi: 10.1117/12.483175
Proc. SPIE 4928, Subwavelength antireflection structure for optical detector fabricated by fast atom beam etching, 0000 (10 September 2002); doi: 10.1117/12.483186
Proc. SPIE 4928, Micro translation table for near-field data storage using inverted-scratch-drive actuators, 0000 (10 September 2002); doi: 10.1117/12.483192
Proc. SPIE 4928, Optical-electromechanical performance of MEMS tilting micromirrors for AON communication system, 0000 (10 September 2002); doi: 10.1117/12.483193
Proc. SPIE 4928, Nano-stepper-driven optical shutter for applications in free-space micro-optics, 0000 (10 September 2002); doi: 10.1117/12.483194
Session 2
Proc. SPIE 4928, Error-compensation technology to deal with axis misalignment of multi MEMS sensors, 0000 (10 September 2002); doi: 10.1117/12.483149
Proc. SPIE 4928, Microgripper for handling and assembly in MEMS produced by SU-8 technology, 0000 (10 September 2002); doi: 10.1117/12.483150
Proc. SPIE 4928, Fabrication of 1.3-um Si-based MEMS tunable optical filter, 0000 (10 September 2002); doi: 10.1117/12.483151
Proc. SPIE 4928, Microfabrication of color filter for liquid crystal display by inkjet-based method, 0000 (10 September 2002); doi: 10.1117/12.483152
Session 3
Proc. SPIE 4928, Fabrication of integrated microlens array mold and mold insert for mass production, 0000 (10 September 2002); doi: 10.1117/12.483153
Proc. SPIE 4928, Laser fabrication technology for micromachines, 0000 (10 September 2002); doi: 10.1117/12.483154
Proc. SPIE 4928, Excimer laser micromachining technology in biochip, 0000 (10 September 2002); doi: 10.1117/12.483155
Proc. SPIE 4928, Fabrication of reflective micromirror in micromechanical optical switches, 0000 (10 September 2002); doi: 10.1117/12.483156
Proc. SPIE 4928, Laterally driven variable capacitor for displacement measurement of microactuators, 0000 (10 September 2002); doi: 10.1117/12.483157
Proc. SPIE 4928, Optimum design of levitating coil and stability coils in the micromachined gyroscope of electromagnetic levitated rotor, 0000 (10 September 2002); doi: 10.1117/12.483158
Proc. SPIE 4928, Design and simulation of integrated CMOS-compatible capacitive absolute pressure-sensing microsystems, 0000 (10 September 2002); doi: 10.1117/12.483160
Session 4
Proc. SPIE 4928, Development of microvision system for manipulation robot, 0000 (10 September 2002); doi: 10.1117/12.483161
Proc. SPIE 4928, Micro mobile robot system for inspection between pipes, 0000 (10 September 2002); doi: 10.1117/12.483162
Proc. SPIE 4928, MEMS microrotor technology and aerodynamics for a hovering micro air vehicle, 0000 (10 September 2002); doi: 10.1117/12.483163
Proc. SPIE 4928, Designing, fabrication, and test of a MEMS colloid thruster, 0000 (10 September 2002); doi: 10.1117/12.483164
Proc. SPIE 4928, Wafer lever packaging for gyroscope by Au/Si eutectic bonding, 0000 (10 September 2002); doi: 10.1117/12.483165
Session 5
Proc. SPIE 4928, Design optimization and fabrication process of MEMS micro-magnetometer based on tunneling effect, 0000 (10 September 2002); doi: 10.1117/12.483166
Proc. SPIE 4928, Reduction of thermal nonreciprocity in fiber-optic Sagnac interferometer via hybrid winding pattern, 0000 (10 September 2002); doi: 10.1117/12.483167
Proc. SPIE 4928, Three-degrees-of-freedom precision stage, 0000 (10 September 2002); doi: 10.1117/12.483169
Proc. SPIE 4928, Comparison of theoretical and experimental determination of the flexing of scratch drive actuator plates, 0000 (10 September 2002); doi: 10.1117/12.483170
Poster Session
Proc. SPIE 4928, Important theory of array microjet based on MEMS, 0000 (10 September 2002); doi: 10.1117/12.483171
Proc. SPIE 4928, Pd/Ni bilayer electrochemical microactuator, 0000 (10 September 2002); doi: 10.1117/12.483172
Proc. SPIE 4928, Microstructures of PMMA sheet fabricated by RIE, 0000 (10 September 2002); doi: 10.1117/12.483173
Proc. SPIE 4928, Optimal design for the alignment of single mode-fibers using thermal microactuators, 0000 (10 September 2002); doi: 10.1117/12.483174
Proc. SPIE 4928, Low-voltage micromachining-based scalable optical switch, 0000 (10 September 2002); doi: 10.1117/12.483176
Proc. SPIE 4928, Micromechanical variable optical attenuator based on EDM micromachining, 0000 (10 September 2002); doi: 10.1117/12.483177
Proc. SPIE 4928, Optimization and simulation of the surface acoustic wave motor, 0000 (10 September 2002); doi: 10.1117/12.483178
Proc. SPIE 4928, Silicon microchannel array based on MEMS process, 0000 (10 September 2002); doi: 10.1117/12.483179
Proc. SPIE 4928, Error analysis of micro strain gauge with a mechanical amplifier, 0000 (10 September 2002); doi: 10.1117/12.483180
Proc. SPIE 4928, Capacitive rf MEMS switch with composite beam, 0000 (10 September 2002); doi: 10.1117/12.483181
Proc. SPIE 4928, Equivalent circuit macromodel for a beam-structure electromechanical system in F-I analogy, 0000 (10 September 2002); doi: 10.1117/12.483182
Proc. SPIE 4928, Silicon micromechanical accelerometer using an optical fiber, 0000 (10 September 2002); doi: 10.1117/12.483183
Proc. SPIE 4928, New test structure for measuring thermal conductivity of polysilicon thin films, 0000 (10 September 2002); doi: 10.1117/12.483184
Proc. SPIE 4928, Design and simulation of a bulk micromachined relay with lateral contact, 0000 (10 September 2002); doi: 10.1117/12.483185
Proc. SPIE 4928, Simulation and optimization of dynamic passive valve micropump, 0000 (10 September 2002); doi: 10.1117/12.483187
Proc. SPIE 4928, Structural design of novel low-actuation MEMS switches for X-band application, 0000 (10 September 2002); doi: 10.1117/12.483188
Proc. SPIE 4928, Designing a diffractive optical element used as a ring-beam convertor to control the wavefront propagation in a three-dimensional space, 0000 (10 September 2002); doi: 10.1117/12.483189
Proc. SPIE 4928, Novel structure of passive ring waveguide resonator on silicon substrate, 0000 (10 September 2002); doi: 10.1117/12.483190
Session 5
Proc. SPIE 4928, Microfluidics-related research and applications, 0000 (10 September 2002); doi: 10.1117/12.483191
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