PROCEEDINGS VOLUME 4936
SPIE'S INTERNATIONAL SYMPOSIUM ON SMART MATERIALS, NANO-, AND MICRO- SMART SYSTEMS | 16-18 DECEMBER 2002
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
SPIE'S INTERNATIONAL SYMPOSIUM ON SMART MATERIALS, NANO-, AND MICRO- SMART SYSTEMS
16-18 December 2002
Melbourne, Australia
Poster Session
Proc. SPIE 4936, Micromachined magnetometer-accelerometer for navigation systems, 0000 (13 November 2002); doi: 10.1117/12.469429
Sensors
Proc. SPIE 4936, Fabrication and characterization of resonant SOI micromechanical silicon sensors based on DRIE micromachining, freestanding release process and silicon direct bonding, 0000 (13 November 2002); doi: 10.1117/12.469740
Actuators
Proc. SPIE 4936, Modeling and control of a micro magnetic bearing, 0000 (13 November 2002); doi: 10.1117/12.476102
Proc. SPIE 4936, Resonant-type microscanners fabricated by hybrid PZT deposition process on SOI wafers, 0000 (13 November 2002); doi: 10.1117/12.469675
Proc. SPIE 4936, Study for piezoelectricity characterization of PZT actuators deposited by RF magnetron sputtering for MEMS, 0000 (13 November 2002); doi: 10.1117/12.469669
Proc. SPIE 4936, Fabrication of microfluidic device (diffuser or mixer) using aerosol deposition method, 0000 (13 November 2002); doi: 10.1117/12.471922
Proc. SPIE 4936, New magnetic viscous damper with intelligent or smart fluid for the next generation, 0000 (13 November 2002); doi: 10.1117/12.469423
Nanotechnology III
Proc. SPIE 4936, Nanobioceramics: synthesis, characterization, and applications, 0000 (13 November 2002); doi: 10.1117/12.469745
Materials
Proc. SPIE 4936, Innovative machining method on CVD diamond film, 0000 (13 November 2002); doi: 10.1117/12.469742
Proc. SPIE 4936, Ba(Mg1/3Ta2/3)O3 substrate for BaxSr1-xTiO3 thin film used for phase shifter, 0000 (13 November 2002); doi: 10.1117/12.469680
Post-Deadline Papers
Proc. SPIE 4936, Characterization of TiNi, TiNiPd thin films by ion beam analysis techniques, 0000 (13 November 2002); doi: 10.1117/12.471925
Materials
Proc. SPIE 4936, Ti-Mo and Mo-W mixed oxides for gas sensing applications, 0000 (13 November 2002); doi: 10.1117/12.476100
Optical MEMS
Proc. SPIE 4936, High placement and leveling accuracy flip-chip assembly for MOEMS, 0000 (13 November 2002); doi: 10.1117/12.469670
Proc. SPIE 4936, Development of a micro hot embossing process for fabricating micro optical devices, 0000 (13 November 2002); doi: 10.1117/12.469430
Post-Deadline Papers
Proc. SPIE 4936, Three-dimensional polymer MEMS with functionalized carbon nanotubes by microstereolithography, 0000 (13 November 2002); doi: 10.1117/12.473342
LIGA, High Aspect Ratio Structuring
Proc. SPIE 4936, Study of hot embossed microchannels using confocal microscopy, 0000 (13 November 2002); doi: 10.1117/12.469671
Packaging and Bonding
Proc. SPIE 4936, A world-to-chip socket for microfluidic prototype development, 0000 (13 November 2002); doi: 10.1117/12.469433
Proc. SPIE 4936, Novel fabrication method for 3D microstructures using surface-activated bonding and its application to micromechanical parts, 0000 (13 November 2002); doi: 10.1117/12.469668
Fluidic MEMS
Proc. SPIE 4936, Novel low-cost fabrication of microneedle arrays for drug delivery applications, 0000 (13 November 2002); doi: 10.1117/12.469435
Materials
Proc. SPIE 4936, Characterization of lithographically patterned monofilms by preferential adsorption of dye molecules, 0000 (13 November 2002); doi: 10.1117/12.469428
Measurement
Proc. SPIE 4936, Nanometer-accurate grating fabrication with scanning beam interference lithography, 0000 (13 November 2002); doi: 10.1117/12.469431
Micromachining and Manipulation
Proc. SPIE 4936, Patterning of thin films of TiNi deposited on silicon substrate, 0000 (13 November 2002); doi: 10.1117/12.471927
Proc. SPIE 4936, Real-time monitoring of excimer laser ablation of multilayer thin films by detecting acoustic emission, 0000 (13 November 2002); doi: 10.1117/12.469427
Poster Session
Proc. SPIE 4936, Fabrication of microstructure using electrochemical etching in hydrofluoric acid, 0000 (13 November 2002); doi: 10.1117/12.469434
Micromachining and Manipulation
Proc. SPIE 4936, Modification of photoresist profile in lift-off process for MEMS application, 0000 (13 November 2002); doi: 10.1117/12.476090
Proc. SPIE 4936, Multiple-degree-of-freedom compliant mechanism possessing nearly uncoupled dynamics: experimental findings, 0000 (13 November 2002); doi: 10.1117/12.469672
Post-Deadline Papers
Proc. SPIE 4936, Investigation of ultra-low-load nanoindentation for the patterning of nanostructures, 0000 (13 November 2002); doi: 10.1117/12.476103
Proc. SPIE 4936, Large-scale synthesis of single- and multiwalled carbon nanotubes by microwave CVD, 0000 (13 November 2002); doi: 10.1117/12.473343
Nanotechnology I
Proc. SPIE 4936, Nickel nanoparticles dispersed in SiO2 fabricated by high-flux negative-ion implantation of 60 keV, 0000 (13 November 2002); doi: 10.1117/12.469676
Nanotechnology II
Proc. SPIE 4936, Single ion implantation in the quantum computer construction project, 0000 (13 November 2002); doi: 10.1117/12.471924
Proc. SPIE 4936, New technique for the manipulation of nanostructured metal-oxide properties, 0000 (13 November 2002); doi: 10.1117/12.476089
Proc. SPIE 4936, Connection of nanostructures using nanowires grown by a self-field-emission process, 0000 (13 November 2002); doi: 10.1117/12.476097
Poster Session
Proc. SPIE 4936, Two-channel “star” fiber optic network for quantum cryptography, 0000 (13 November 2002); doi: 10.1117/12.469420
Proc. SPIE 4936, Experimental investigation of the effect of the MPL (magnetic polishing liquid) on surface finishing, 0000 (13 November 2002); doi: 10.1117/12.469422
Proc. SPIE 4936, An integrated biochip design and fabrication, 0000 (13 November 2002); doi: 10.1117/12.469426
Proc. SPIE 4936, Investigation of Pt/Ga2O3-ZnO/SiC Schottky-diode-based hydrocarbon gas sensors, 0000 (13 November 2002); doi: 10.1117/12.469674
Proc. SPIE 4936, Comparison between mechanical method and chemical-assisted mechanical method for CVD diamond film polishing, 0000 (13 November 2002); doi: 10.1117/12.469741
LIGA, High Aspect Ratio Structuring
Proc. SPIE 4936, Delineation of MEMS microstructures in silicon using CF4/O2 gas mixtures in reactive ion etching, 0000 (13 November 2002); doi: 10.1117/12.469743
Poster Session
Proc. SPIE 4936, Thick PZT film/stainless steel actuator fabricated by aerosol deposition method: fatigue property, 0000 (13 November 2002); doi: 10.1117/12.471923
Proc. SPIE 4936, Electrochemical deposition of Al on semiconductors, 0000 (13 November 2002); doi: 10.1117/12.469746
Proc. SPIE 4936, Optimization of Au mask fabrication processes for LIGA applications, 0000 (13 November 2002); doi: 10.1117/12.471926
Proc. SPIE 4936, Microfabrication of thick and bulk PZT materials for piezoelectric actuator, 0000 (13 November 2002); doi: 10.1117/12.476088
Materials
Proc. SPIE 4936, LCVD-grown microcarbon rod for MEMS applications: a study on the Raman spectroscopic characterization, 0000 (13 November 2002); doi: 10.1117/12.476091
Poster Session
Proc. SPIE 4936, Design on MBE material structure of GaAs-based RTD, 0000 (13 November 2002); doi: 10.1117/12.476092
Proc. SPIE 4936, Development of position sensors for macro- and microelectronic devices, 0000 (13 November 2002); doi: 10.1117/12.476093
Proc. SPIE 4936, Capacitive microsensor for monitoring the deterioration of automobile engine oil, 0000 (13 November 2002); doi: 10.1117/12.476098
Sensors
Proc. SPIE 4936, Selective semiconductor gas sensor based on surface photovoltage, 0000 (13 November 2002); doi: 10.1117/12.476101
Poster Session
Proc. SPIE 4936, Effect of argon gas pressure and substrate temperature on magnetic properties of magnetron-sputtered SmCo thin films, 0000 (13 November 2002); doi: 10.1117/12.476346
Micromachining and Manipulation
Proc. SPIE 4936, Patterning of magnetron sputtered SmCo films by excimer laser ablation, 0000 (13 November 2002); doi: 10.1117/12.476351
Post-Deadline Papers
Proc. SPIE 4936, NSF-EC workshop on nanomanufacturing and processing: a summary report, 0000 (13 November 2002); doi: 10.1117/12.484270
Nanotechnology III
Proc. SPIE 4936, A nanoscale soft-ionization membrane: a novel ionizer for ion mobility spectrometers for space applications, 0000 (13 November 2002); doi: 10.1117/12.484271
Proc. SPIE 4936, Fabrication and testing of nanomechanical <100> silicon beam structures using a scanning probe system, 0000 (13 November 2002); doi: 10.1117/12.484272
Proc. SPIE 4936, Quantum models of Parrondo's games, 0000 (13 November 2002); doi: 10.1117/12.469069
Micromachining and Manipulation
Proc. SPIE 4936, Microfabricated ionic conducting polymer film actuators for aqueous micromanipulation, 0000 (13 November 2002); doi: 10.1117/12.486399
Measurement
Proc. SPIE 4936, A modular approach for development of miniature detection systems, 0000 (13 November 2002); doi: 10.1117/12.489851
Post-Deadline Papers
Proc. SPIE 4936, Nano-film assisted anodic bonding, 0000 (13 November 2002); doi: 10.1117/12.499575
Proc. SPIE 4936, Strategy towards fusion of nano and micro systems, 0000 (13 November 2002); doi: 10.1117/12.499601