PROCEEDINGS VOLUME 4981
MICROMACHINING AND MICROFABRICATION | 25-31 JANUARY 2003
MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II
IN THIS VOLUME

0 Sessions, 27 Papers, 0 Presentations
Session 1  (3)
Session 2  (3)
Session 3  (4)
Session 4  (4)
Session 5  (5)
Session 6  (6)
MICROMACHINING AND MICROFABRICATION
25-31 January 2003
San Jose, CA, United States
Session 1
Proc. SPIE 4981, MEMS high-Q tunable capacitor for reconfigurable microwave integrated circuits, 0000 (16 January 2003); doi: 10.1117/12.480768
Proc. SPIE 4981, Emerging leadership of surface-micromachined MEMS for wavelength switching in telecommunication systems, 0000 (16 January 2003); doi: 10.1117/12.472873
Proc. SPIE 4981, Robust microvalves for hydraulic actuators, 0000 (16 January 2003); doi: 10.1117/12.479560
Session 2
Proc. SPIE 4981, Computational design and analysis of a microtab-based aerodynamic load control system for lifting surfaces, 0000 (16 January 2003); doi: 10.1117/12.478170
Proc. SPIE 4981, Microcombustor array and microflame ionization detector for hydrocarbon detection, 0000 (16 January 2003); doi: 10.1117/12.476318
Proc. SPIE 4981, Fabrication of binary photomask by femtosecond laser, 0000 (16 January 2003); doi: 10.1117/12.478173
Session 3
Proc. SPIE 4981, Automotive sensors, 0000 (16 January 2003); doi: 10.1117/12.480769
Proc. SPIE 4981, Monocrystalline Si membranes for pressure sensors fabricated by a novel surface-micromachining process using porous silicon, 0000 (16 January 2003); doi: 10.1117/12.479564
Proc. SPIE 4981, Electrostatic beam actuator for switching applications fabricated by Ni microelectroplating and thermal postprocessing, 0000 (16 January 2003); doi: 10.1117/12.476281
Proc. SPIE 4981, Microfabricated recurve bimetallic actuator, 0000 (16 January 2003); doi: 10.1117/12.472869
Session 4
Proc. SPIE 4981, Micro/nanotechnology for the satellite world, 0000 (16 January 2003); doi: 10.1117/12.476315
Proc. SPIE 4981, Design and fabrication of a large vertical-travel silicon inchworm microactuator for the Advanced Segmented Silicon Space Telescope, 0000 (16 January 2003); doi: 10.1117/12.476282
Proc. SPIE 4981, Microshutter arrays for near-infrared applications on the James Webb Space Telescope, 0000 (16 January 2003); doi: 10.1117/12.476285
Proc. SPIE 4981, UV-LIGA microfabrication of a power relay based on electrostatic actuation, 0000 (16 January 2003); doi: 10.1117/12.478171
Session 5
Proc. SPIE 4981, Monolithic integration of RF MEMS and semiconductor devices for the K-band, 0000 (16 January 2003); doi: 10.1117/12.479563
Proc. SPIE 4981, RF MEMS compiler: automatic design synthesizer for passive MEMS wireless components, 0000 (16 January 2003); doi: 10.1117/12.476284
Proc. SPIE 4981, High-Q RF coils on silicon-integrated circuits, 0000 (16 January 2003); doi: 10.1117/12.472875
Proc. SPIE 4981, Bandstop magnetostatic wave resonators on micromachined silicon membrane, 0000 (16 January 2003); doi: 10.1117/12.473375
Proc. SPIE 4981, RF MEMS and reconfigurable antennas for communication systems, 0000 (16 January 2003); doi: 10.1117/12.479562
Session 6
Proc. SPIE 4981, Wireless microsensors for health monitoring of aircraft structures, 0000 (16 January 2003); doi: 10.1117/12.479561
Proc. SPIE 4981, 3D self-aligned microassembled electrical interconnects for heterogeneous integration, 0000 (16 January 2003); doi: 10.1117/12.476319
Proc. SPIE 4981, Electrostatic actuators and tunable micro capacitors/switches with expanded tuning range due to intrinsic stress gradients, 0000 (16 January 2003); doi: 10.1117/12.478172
Proc. SPIE 4981, Design and characterization of micro-inertia switches fabricated using low-temperature metal-electroplating technology, 0000 (16 January 2003); doi: 10.1117/12.478285
Proc. SPIE 4981, Nonassembled planar electrostatic microrelay, 0000 (16 January 2003); doi: 10.1117/12.480767
Poster Session
Proc. SPIE 4981, Tapered-width microcantilever for pull-in voltage control, 0000 (16 January 2003); doi: 10.1117/12.476283
Proc. SPIE 4981, Surface-micromachined tunneling-based accelerometer, 0000 (16 January 2003); doi: 10.1117/12.472877
Session 6
Proc. SPIE 4981, Compact MMIC-compatible RF MEMS switch, 0000 (16 January 2003); doi: 10.1117/12.498237
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