Commercial Status of MOEMS Applications
Proc. SPIE 4983, European roadmaps for MOEMS applications, (21 January 2003);doi: 10.1117/12.480762
Testing Methods for MOEMS
Proc. SPIE 4983, Novel optoelectronic methodology for testing MOEMS, (21 January 2003);doi: 10.1117/12.480763
Proc. SPIE 4983, Measurement of thermal-mechanical noise in MEMS microstructures, (21 January 2003);doi: 10.1117/12.472753
Proc. SPIE 4983, Integrated optical monitoring of MEMS for closed-loop control, (21 January 2003);doi: 10.1117/12.477925
Mirror Arrays and Switches I
Proc. SPIE 4983, Single-chip 1x84 MEMS mirror array for optical telecommunication applications, (21 January 2003);doi: 10.1117/12.477936
Proc. SPIE 4983, SOI/DRIE all-fiber optical switch for high-power applications, (21 January 2003);doi: 10.1117/12.477928
Proc. SPIE 4983, High-power optical microswitch fabricated by deep reactive ion etching (DRIE), (21 January 2003);doi: 10.1117/12.477927
Proc. SPIE 4983, Stress and curvature in MEMS mirrors, (21 January 2003);doi: 10.1117/12.472899
MOEMS Interconnects
Proc. SPIE 4983, Optical system properties of a reconfigurable MEMS interconnect, (21 January 2003);doi: 10.1117/12.473690
Proc. SPIE 4983, MOEMS device design, development, and integration for interconnect applications, (21 January 2003);doi: 10.1117/12.477926
Mirror Arrays and Switches II
Proc. SPIE 4983, Development of 1X4 micro-optical switch based on SOI vertical micromirror technology, (21 January 2003);doi: 10.1117/12.472787
Proc. SPIE 4983, Out-of-plane rotary micromirrors for reconfigurable photonic applications, (21 January 2003);doi: 10.1117/12.472904
Proc. SPIE 4983, Microelectromechanical optical switch, (21 January 2003);doi: 10.1117/12.480764
New MOEMS Applications: Spectrometers, Probes, and Microfluidics
Proc. SPIE 4983, Thin-film-technology-based micro-Fourier spectrometer, (21 January 2003);doi: 10.1117/12.477919
Proc. SPIE 4983, Miniature thermoacoustic cryocooler driven by a vertical comb-drive, (21 January 2003);doi: 10.1117/12.472893
Proc. SPIE 4983, Micromachined near-field probe arrays, (21 January 2003);doi: 10.1117/12.472895
Proc. SPIE 4983, Novel micro fiber spectrometer, (21 January 2003);doi: 10.1117/12.477935
MOEMS Optical Components: VOAs and Lasers
Proc. SPIE 4983, DWDM variable attenuator and multiple-channel power equalizer using MEMS technology, (21 January 2003);doi: 10.1117/12.477922
Proc. SPIE 4983, Micromachined VOA with perpendicularly aligned tapered optic fibers, (21 January 2003);doi: 10.1117/12.477921
Proc. SPIE 4983, Widely tunable lasers using MEMS gratings and mirrors, (21 January 2003);doi: 10.1117/12.477923
MOEMS Optical Components: Filters
Proc. SPIE 4983, Micromachined in-plane tunable optical filter using thermo-optic effect, (21 January 2003);doi: 10.1117/12.477918
Proc. SPIE 4983, Bionics: precise color tuning by interference in nature and technology: applications in surface-micromachined 1.55-um vertical air-cavity filters, (21 January 2003);doi: 10.1117/12.477916
Proc. SPIE 4983, Tunable Fabry-Perot interferometer for 3- to 4.5-um wavelength with bulk micromachined reflector carrier, (21 January 2003);doi: 10.1117/12.472762
Joint Session I. MEMS Adaptive Optic I: Large Scale Integration
Proc. SPIE 4983, MOEMS spatial light modulator development at the Center for Adaptive Optics, (20 January 2003);doi: 10.1117/12.478562
Proc. SPIE 4983, Improved vision by eye aberration correction using an active-matrix-addressed micromirror array, (20 January 2003);doi: 10.1117/12.472902
Proc. SPIE 4983, MEMS spatial light modulators with integrated electronics, (20 January 2003);doi: 10.1117/12.477931
Proc. SPIE 4983, Large-scale polysilicon surface-micromachined spatial light modulator, (20 January 2003);doi: 10.1117/12.477932
Joint Session II. MEMS Adaptive Optics II: Applications
Proc. SPIE 4983, A micromachined deformable mirror for adaptive optics, (20 January 2003);doi: 10.1117/12.477924
Joint Session IV. MEMS Adaptive Optics IV: Membrane Mirrors
Proc. SPIE 4983, Electrostatically actuated membrane mirrors for adaptive optics, (20 January 2003);doi: 10.1117/12.473642
Proc. SPIE 4983, Design and fabrication of a continuous membrane deformable mirror, (20 January 2003);doi: 10.1117/12.472730
Proc. SPIE 4983, Concept, modeling, and fabrication techniques for large-stroke piezoelectric unimorph deformable mirrors, (20 January 2003);doi: 10.1117/12.473715
Proc. SPIE 4983, Nodal model for continuous face sheet deformable mirrors, (20 January 2003);doi: 10.1117/12.477917
Poster Session
Proc. SPIE 4983, Fabrication of micromachined focusing mirrors with seamless reflective surface, (21 January 2003);doi: 10.1117/12.472909
Joint Session III. MEMS Adaptive Optics III: Late News
Proc. SPIE 4983, DLP switched blaze grating: the heart of optical signal processing, (20 January 2003);doi: 10.1117/12.480906
Testing Methods for MOEMS
Proc. SPIE 4983, Fiber optic switch concept with analog micromirror device, (21 January 2003);doi: 10.1117/12.499274
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