PROCEEDINGS VOLUME 4985
MICROMACHINING AND MICROFABRICATION | 25-31 JANUARY 2003
MOEMS Display and Imaging Systems
MICROMACHINING AND MICROFABRICATION
25-31 January 2003
San Jose, CA, United States
Array-based MOEMS Devices and Applications
Proc. SPIE 4985, Optics and MEMS: a new opportunity for innovation, 0000 (20 January 2003); doi: 10.1117/12.477814
Proc. SPIE 4985, Emerging digital micromirror device (DMD) applications, 0000 (20 January 2003); doi: 10.1117/12.480761
Proc. SPIE 4985, Design and fabrication of microlens and spatial filter array by self-alignment, 0000 (20 January 2003); doi: 10.1117/12.472865
Proc. SPIE 4985, High-resolution maskless lithography by the integration of micro-optics and point array technique, 0000 (20 January 2003); doi: 10.1117/12.472856
Proc. SPIE 4985, Flexible micromirror linear array for high-resolution projection display, 0000 (20 January 2003); doi: 10.1117/12.472860
MEMS Scanners for Displays and Imaging I
Proc. SPIE 4985, Miniature high-fidelity displays using a biaxial MEMS scanning mirror, 0000 (20 January 2003); doi: 10.1117/12.477816
Proc. SPIE 4985, Nonlinear dynamics and control of a dual-capacitively driven torsional MEMS scanning mirror, 0000 (20 January 2003); doi: 10.1117/12.472864
Proc. SPIE 4985, Improved layout for a resonant 2D micro scanning mirror with low operation voltages, 0000 (20 January 2003); doi: 10.1117/12.472863
Proc. SPIE 4985, Single two-axis micromachined tilt mirror and linear array, 0000 (20 January 2003); doi: 10.1117/12.472858
MEMS Scanners for Displays and Imaging II
Proc. SPIE 4985, MEMS electromagnetic optical scanner for a commercial laser scanning microscope, 0000 (20 January 2003); doi: 10.1117/12.478564
Proc. SPIE 4985, MEMS raster correction scanner for SXGA resolution retinal scanning display, 0000 (20 January 2003); doi: 10.1117/12.477811
Proc. SPIE 4985, Magnetic actuation for MEMS scanners for retinal scanning displays, 0000 (20 January 2003); doi: 10.1117/12.477808
Proc. SPIE 4985, Driver ASIC for synchronized excitation of resonant micromirrors, 0000 (20 January 2003); doi: 10.1117/12.477810
Grating and Interference-based Systems
Proc. SPIE 4985, Interferometric modulation: MOEMS as an enabling technology for high-performance reflective displays, 0000 (20 January 2003); doi: 10.1117/12.477813
Proc. SPIE 4985, Micromachined acoustic sensor array with diffraction-based optical interferometric detection, 0000 (20 January 2003); doi: 10.1117/12.472862
Proc. SPIE 4985, Assembly and testing of a grating-based electrostatic comb-drive visible microspectrometer, 0000 (20 January 2003); doi: 10.1117/12.477809
Proc. SPIE 4985, System simulation of a GLV projection system, 0000 (20 January 2003); doi: 10.1117/12.472861
Joint Session II. MEMS Adaptive Optics II: Applications
Proc. SPIE 4985, Characterization of spatial light modulators for microlithography, 0000 (20 January 2003); doi: 10.1117/12.477803
Proc. SPIE 4985, Operation of spatial light modulators in DUV light, 0000 (20 January 2003); doi: 10.1117/12.477805
Joint Session IV. MEMS Adaptive Optics IV: Membrane Mirrors
Proc. SPIE 4985, Technological approaches for fabrication of elastomer-based spatial light modulators, 0000 (20 January 2003); doi: 10.1117/12.477804
Proc. SPIE 4985, Off-axis variable focus and aberration control mirrors, 0000 (20 January 2003); doi: 10.1117/12.477815
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