PROCEEDINGS VOLUME 5063
FOURTH INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROFABRICATION | 21-24 JUNE 2003
Fourth International Symposium on Laser Precision Microfabrication
FOURTH INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROFABRICATION
21-24 June 2003
Munich, Germany
Plenary Session: Overview on Laser Precision Microfabrication
Proc. SPIE 5063, Reliable laser micro-spot welding of copper, 0000 (18 November 2003); doi: 10.1117/12.540460
Proc. SPIE 5063, Laser-induced single step micro/nanopatterning, 0000 (18 November 2003); doi: 10.1117/12.541052
Proc. SPIE 5063, Resonant infrared laser materials processing at high vibrational excitation density: applications and mechanisms, 0000 (18 November 2003); doi: 10.1117/12.541054
Proc. SPIE 5063, Laser micro-bending for precise micro-fabrication of magnetic disk drive components, 0000 (18 November 2003); doi: 10.1117/12.540475
Thin-Film Processing
Proc. SPIE 5063, Laser-induced diffusion for glass metallization, 0000 (18 November 2003); doi: 10.1117/12.540496
Proc. SPIE 5063, Optimized ablation condition to prepare polyperinaphthalene thin films using the third harmonic wavelength of Nd:YAG laser, 0000 (18 November 2003); doi: 10.1117/12.540530
Proc. SPIE 5063, Laser-assisted chemical cleaning of thin oxide films on carbon steel surfaces, 0000 (18 November 2003); doi: 10.1117/12.540597
Proc. SPIE 5063, Fabrication of three-dimensional microstructures by stacking laser-direct-write layers, 0000 (18 November 2003); doi: 10.1117/12.541056
Proc. SPIE 5063, Comparison of the structural characteristics and surface morphology of ZnO thin films grown on various substrates by pulsed laser deposition, 0000 (18 November 2003); doi: 10.1117/12.541058
Proc. SPIE 5063, Laser cleaning technology of the contact hole for semiconductor manufacturing, 0000 (18 November 2003); doi: 10.1117/12.540598
Proc. SPIE 5063, Optoelectrical and optoacoustic analysis of the laser cleaning process of a photoresist on Si and ITO, 0000 (18 November 2003); doi: 10.1117/12.540603
Proc. SPIE 5063, Carbon nitride films synthesized by pulsed laser deposition with additional laser irradiation to plume, 0000 (18 November 2003); doi: 10.1117/12.540605
Proc. SPIE 5063, Surface modification of silicon and PTFE by laser surface treatment: improvement of wettability, 0000 (18 November 2003); doi: 10.1117/12.541064
Fundamentals of fs-laser Processing
Proc. SPIE 5063, Excitation – melting – ablation: theoretical investigations of key processes during ultrashort pulsed laser machining, 0000 (18 November 2003); doi: 10.1117/12.540606
Proc. SPIE 5063, Material-vapor dynamics during ablation with ultrashort pulses, 0000 (18 November 2003); doi: 10.1117/12.540608
Proc. SPIE 5063, Ablation process induced by femtosecond laser in transparent dielectrics, 0000 (18 November 2003); doi: 10.1117/12.540643
Machining of Silica and Glass
Proc. SPIE 5063, Laser-induced sub-surface modification of the optical properties in transparent materials: nik-engineering (TM), 0000 (18 November 2003); doi: 10.1117/12.540695
Proc. SPIE 5063, Fabrication of 3D microreactor structures embedded in photosensitive glass by femtosecond laser, 0000 (18 November 2003); doi: 10.1117/12.541066
Proc. SPIE 5063, Three-dimensional micro-optical components embedded in Foturan glass by a femtosecond laser, 0000 (18 November 2003); doi: 10.1117/12.540697
Proc. SPIE 5063, Glass processing using microsecond, nanosecond and femtosecond pulsed lasers, 0000 (18 November 2003); doi: 10.1117/12.540701
Proc. SPIE 5063, Fabrication of diffractive phase elements by F2-laser ablation of fused silica, 0000 (18 November 2003); doi: 10.1117/12.541070
Proc. SPIE 5063, Site-selective dye deposition onto micropatterns of fused silica fabricated with laser-induced backside wet etching (LIBWE), 0000 (18 November 2003); doi: 10.1117/12.541072
Proc. SPIE 5063, Titanium-containing glass for laser micromachining, 0000 (18 November 2003); doi: 10.1117/12.540722
Proc. SPIE 5063, Fabrication of micro-holes in silica glass by femtosecond laser pulses, 0000 (18 November 2003); doi: 10.1117/12.541076
Proc. SPIE 5063, Laser microfabrication of glass substrates by pocket scanning, 0000 (18 November 2003); doi: 10.1117/12.540725
Proc. SPIE 5063, Laser amorphization of glass-ceramics (LAGS) laws and new possibility to form a number of micro-optical components, 0000 (18 November 2003); doi: 10.1117/12.540728
Manufacturing of Microsystems
Proc. SPIE 5063, Selective laser micro sintering with a novel process, 0000 (18 November 2003); doi: 10.1117/12.540730
Proc. SPIE 5063, Laser profiling of 3D microturbine blades, 0000 (18 November 2003); doi: 10.1117/12.540733
Proc. SPIE 5063, Laser-assisted forming of metallic micro-parts, 0000 (18 November 2003); doi: 10.1117/12.541079
Proc. SPIE 5063, Laser microprocessing: facts and trends, 0000 (18 November 2003); doi: 10.1117/12.540742
Proc. SPIE 5063, Sapphire tools for laser-assisted microforming, 0000 (18 November 2003); doi: 10.1117/12.541442
Proc. SPIE 5063, Laser adjustable actuators for high-accuracy positioning of micro components, 0000 (18 November 2003); doi: 10.1117/12.540461
Proc. SPIE 5063, Process assembly for µm-scale SLS, reaction sintering, and CVD, 0000 (18 November 2003); doi: 10.1117/12.540466
Proc. SPIE 5063, 3D micro channels in laminated resins by UV laser ablation, 0000 (18 November 2003); doi: 10.1117/12.540471
Precise Structuring
Proc. SPIE 5063, Surface microstructuring of transparent materials by laser-induced backside wet etching using excimer laser, 0000 (18 November 2003); doi: 10.1117/12.540486
Proc. SPIE 5063, Comparison of laser induced front- and rear-side ablation, 0000 (18 November 2003); doi: 10.1117/12.540498
Proc. SPIE 5063, Surface structuring of metals with short and ultrashort laser pulses, 0000 (18 November 2003); doi: 10.1117/12.541081
Proc. SPIE 5063, Nanosecond laser micro machining using an external beam attenuator, 0000 (18 November 2003); doi: 10.1117/12.540504
Proc. SPIE 5063, Laser structuring and modification of surfaces for chemical and medical micro components, 0000 (18 November 2003); doi: 10.1117/12.541084
Proc. SPIE 5063, Two- and three-dimensional periodic structures produced by nano-pulsed laser irradiation in Ag-doped glass, 0000 (18 November 2003); doi: 10.1117/12.541085
Proc. SPIE 5063, Principles and applications of laser-induced liquid-phase jet-chemical etching, 0000 (18 November 2003); doi: 10.1117/12.540525
Proc. SPIE 5063, Machining of optical microstructures with 157 nm laser radiation, 0000 (18 November 2003); doi: 10.1117/12.540527
Proc. SPIE 5063, Rotational micromachining tool controlled by optical radiation pressure, 0000 (18 November 2003); doi: 10.1117/12.540508
Proc. SPIE 5063, Model for pulsed ultraviolet laser ablation, 0000 (18 November 2003); doi: 10.1117/12.540528
Proc. SPIE 5063, Micro sculpting technology using DPSSL, 0000 (18 November 2003); doi: 10.1117/12.540534
Proc. SPIE 5063, Sub-wavelength grid patterns on silicon surface by pulsed CO2 laser irradiation, 0000 (18 November 2003); doi: 10.1117/12.540537
Special Session on EUV Technology
Proc. SPIE 5063, Extreme ultraviolet sources and measurement tools for EUV-lithography and system development, 0000 (18 November 2003); doi: 10.1117/12.541147
Proc. SPIE 5063, Compact electron-based EUV source, 0000 (18 November 2003); doi: 10.1117/12.540546
Proc. SPIE 5063, EUV light source development in Japan, 0000 (18 November 2003); doi: 10.1117/12.540548
Proc. SPIE 5063, EUV emission of solid targets irradiated by femto- and picosecond laser pulses, 0000 (18 November 2003); doi: 10.1117/12.541149
Proc. SPIE 5063, Development of capillary z-pinch discharge EUV light source, 0000 (18 November 2003); doi: 10.1117/12.540550
Micro-Welding and Melting
Proc. SPIE 5063, Pseudo-elastic and bio-chemical properties of Ti-Ni shape memory alloy wires micro-welded by YAG laser, 0000 (18 November 2003); doi: 10.1117/12.540551
Proc. SPIE 5063, Micro-welding of thin foil with direct diode laser, 0000 (18 November 2003); doi: 10.1117/12.540554
Proc. SPIE 5063, Microjoining of dissimilar materials for life science applications, 0000 (18 November 2003); doi: 10.1117/12.541153
Proc. SPIE 5063, Precision microwelding of thin metal foil with single-mode fibre laser, 0000 (18 November 2003); doi: 10.1117/12.541155
Proc. SPIE 5063, Laser beam micro-welding of dissimilar metals, 0000 (18 November 2003); doi: 10.1117/12.540557
Proc. SPIE 5063, Laser welding of polymer micro-fluidic devices using novel diode laser sources, 0000 (18 November 2003); doi: 10.1117/12.540601