PROCEEDINGS VOLUME 5183
OPTICAL SCIENCE AND TECHNOLOGY, SPIE'S 48TH ANNUAL MEETING | 3-8 AUGUST 2003
Lithographic and Micromachining Techniques for Optical Component Fabrication II
IN THIS VOLUME

0 Sessions, 25 Papers, 0 Presentations
Gratings  (6)
Devices I  (3)
Devices II  (3)
Lithography  (5)
OPTICAL SCIENCE AND TECHNOLOGY, SPIE'S 48TH ANNUAL MEETING
3-8 August 2003
San Diego, California, United States
Gratings
Proc. SPIE 5183, Applications of index-gradient artificial dielectrics, 0000 (3 November 2003); doi: 10.1117/12.512222
Proc. SPIE 5183, Polarizing metal stripe gratings for a micro-optical polarimeter, 0000 (3 November 2003); doi: 10.1117/12.507283
Proc. SPIE 5183, Fabrication of self-assembled photonic-crystal structures by centrifugation and spin coating, 0000 (3 November 2003); doi: 10.1117/12.506337
Proc. SPIE 5183, Structural parameter of color separating grating and its physical characteristics, 0000 (3 November 2003); doi: 10.1117/12.505019
Proc. SPIE 5183, Periodic structures with arbitrary shapes recorded by multiple-beam interference, 0000 (3 November 2003); doi: 10.1117/12.508619
Proc. SPIE 5183, Resonant grating filters at oblique incidence, 0000 (3 November 2003); doi: 10.1117/12.512221
Devices I
Proc. SPIE 5183, New solutions to realize complex optical systems by a combination of diffractive and refractive optical components, 0000 (3 November 2003); doi: 10.1117/12.509459
Proc. SPIE 5183, Diamond micro-optics, 0000 (3 November 2003); doi: 10.1117/12.506303
Proc. SPIE 5183, Micro-optical element on SiN membrane, 0000 (3 November 2003); doi: 10.1117/12.504415
Devices II
Proc. SPIE 5183, Fabrication of polymer cantilevers for force-controlled atomic force microscope, 0000 (3 November 2003); doi: 10.1117/12.505434
Proc. SPIE 5183, Micro-optical sensor system for birefringence characterization of textile fibers, 0000 (3 November 2003); doi: 10.1117/12.505443
Proc. SPIE 5183, Compact interferometer for micro-optic performance and shape characterization, 0000 (3 November 2003); doi: 10.1117/12.506052
Diamond Processing
Proc. SPIE 5183, Application of precision diamond machining to the manufacture of microphotonics components, 0000 (3 November 2003); doi: 10.1117/12.506373
Lithography
Proc. SPIE 5183, Alternative method of gray-tone lithography with potential for the fabrication of combined continuous 3D surface profiles and subwavelength structures, 0000 (3 November 2003); doi: 10.1117/12.508492
Proc. SPIE 5183, Fabrication of micropyramid prism array with coding gray-tone mask method, 0000 (3 November 2003); doi: 10.1117/12.505022
Proc. SPIE 5183, Process development and application of grayscale lithography for efficient three-dimensionally profiled fiber-to-waveguide couplers, 0000 (3 November 2003); doi: 10.1117/12.505834
Proc. SPIE 5183, Analog proximity-photolithography with mask aligners for the manufacturing of micro-optical elements, 0000 (3 November 2003); doi: 10.1117/12.505751
Proc. SPIE 5183, Resist hardening without surface deviation, 0000 (3 November 2003); doi: 10.1117/12.505797
Replication and Polymers
Proc. SPIE 5183, Wafer-scale micro-optics replication technology, 0000 (3 November 2003); doi: 10.1117/12.507769
Proc. SPIE 5183, Photo-induced surface relief on Azo polymer for optical component fabrication, 0000 (3 November 2003); doi: 10.1117/12.508289
Proc. SPIE 5183, Fabrication of micro-optical elements on a glass surface by imprint lithography, 0000 (3 November 2003); doi: 10.1117/12.505413
Proc. SPIE 5183, Melted (reflow) microlens array formation, 0000 (3 November 2003); doi: 10.1117/12.509140
Poster Session
Proc. SPIE 5183, Synthesis of polarization-selective optical components with multilayer subwavelength structures, 0000 (3 November 2003); doi: 10.1117/12.503927
Proc. SPIE 5183, Etching quartz with inductively coupled plasma etching equipment, 0000 (3 November 2003); doi: 10.1117/12.504001
Proc. SPIE 5183, Ring-coded halftone masks for the fabrication of circular micro-optical elements, 0000 (3 November 2003); doi: 10.1117/12.507028
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