PROCEEDINGS VOLUME 5190
OPTICAL SCIENCE AND TECHNOLOGY, SPIE'S 48TH ANNUAL MEETING | 3-8 AUGUST 2003
Recent Developments in Traceable Dimensional Measurements II
OPTICAL SCIENCE AND TECHNOLOGY, SPIE'S 48TH ANNUAL MEETING
3-8 August 2003
San Diego, California, United States
Gauge Blocks I
Proc. SPIE 5190, Principal length specifying parameters of material artifacts, their physical meaning, methods for their measurements, and typical uncertainties, 0000 (20 November 2003); doi: 10.1117/12.505552
Proc. SPIE 5190, Next-generation Kösters interferometer, 0000 (20 November 2003); doi: 10.1117/12.503565
Proc. SPIE 5190, Primary level gauge block interferometers for realization of the SI length unit, 0000 (20 November 2003); doi: 10.1117/12.505666
Proc. SPIE 5190, Minimizing interferometer misalignment errors for measurement of subnanometer length changes, 0000 (20 November 2003); doi: 10.1117/12.503677
Gauge Blocks II
Proc. SPIE 5190, Wringing deformation effects in basic length measurements by optical interferometry, 0000 (20 November 2003); doi: 10.1117/12.505703
Proc. SPIE 5190, Low-coherence tandem interferometer for remote calibration of gauge blocks, 0000 (20 November 2003); doi: 10.1117/12.505410
Proc. SPIE 5190, Issues and advantages of gauge block calibration by mechanical comparison, 0000 (20 November 2003); doi: 10.1117/12.506131
Proc. SPIE 5190, Static calibrations of LVDT sensors for traceable gauge blocks, 0000 (20 November 2003); doi: 10.1117/12.505286
Line Scales
Proc. SPIE 5190, New capabilities of the CEM-TEK 1200 interferometric comparator for calibrating long gauges, step gauges, and now line scales, 0000 (20 November 2003); doi: 10.1117/12.508135
Proc. SPIE 5190, Image processing automatic interferometric calibration system for line scales, 0000 (20 November 2003); doi: 10.1117/12.503865
Proc. SPIE 5190, Laser interferometer for calibration of a line scale module with analog output, 0000 (20 November 2003); doi: 10.1117/12.508118
Proc. SPIE 5190, Line scale comparison Nano3, 0000 (20 November 2003); doi: 10.1117/12.506894
Joint Session with Conference 5188: Complex Surfaces and Angles
Proc. SPIE 5190, Defining the measurand in radius of curvature measurements, 0000 (20 November 2003); doi: 10.1117/12.504884
Proc. SPIE 5190, Angle metrology using AAMACS and two small-angle measurement systems, 0000 (20 November 2003); doi: 10.1117/12.506481
Proc. SPIE 5190, Pitch calibration by reflective laser diffraction, 0000 (20 November 2003); doi: 10.1117/12.505559
Joint Session with Conference 5188: Measuring Nanometer-sized Dimensions
Proc. SPIE 5190, Metrological characterization of nanometer film thickness standards for XRR and ellipsometry applications, 0000 (20 November 2003); doi: 10.1117/12.512216
Proc. SPIE 5190, Developments on the NMi-VSL traceable scanning probe microscope, 0000 (20 November 2003); doi: 10.1117/12.503082
Proc. SPIE 5190, Calibration of nanotransducer by a monolithic x-ray interferometer, 0000 (20 November 2003); doi: 10.1117/12.509725
Proc. SPIE 5190, Miniature interferometers for applications in microtechnology and nanotechnology, 0000 (20 November 2003); doi: 10.1117/12.507906
Form Measurement
Proc. SPIE 5190, Improved shape measurement in optical profiler, 0000 (20 November 2003); doi: 10.1117/12.506946
Proc. SPIE 5190, Method for approximate noise elimination in form and roughness measurements, 0000 (20 November 2003); doi: 10.1117/12.508550
Proc. SPIE 5190, High-accuracy form measurement of large optical surfaces, 0000 (20 November 2003); doi: 10.1117/12.503700
Proc. SPIE 5190, Contact model of the probe in form measurement, 0000 (20 November 2003); doi: 10.1117/12.507499
Proc. SPIE 5190, Investigation into applying self-calibration techniques to measuring large optical components on a CMM, 0000 (20 November 2003); doi: 10.1117/12.503650
Coordinate Measurements
Proc. SPIE 5190, Canister-free videogrammetry system for thermal vacuum and space applications, 0000 (20 November 2003); doi: 10.1117/12.503457
Proc. SPIE 5190, Precision metrology system for the Hubble Space Telescope Wide Field Camera 3 instrument, 0000 (20 November 2003); doi: 10.1117/12.502248
Proc. SPIE 5190, Fully traceable miniature CMM with submicrometer uncertainty, 0000 (20 November 2003); doi: 10.1117/12.503349
Proc. SPIE 5190, Measurements of large silicon spheres using the NIST M48 coordinate measuring machine, 0000 (20 November 2003); doi: 10.1117/12.506317
Distance Measurement and Wavelengths in Air
Proc. SPIE 5190, Extension of traceable calibration for electronic distance measuring instruments beyond the length of the laboratory, 0000 (20 November 2003); doi: 10.1117/12.503649
Proc. SPIE 5190, Automated calibration system for laser interferometers, 0000 (20 November 2003); doi: 10.1117/12.508607
Proc. SPIE 5190, High-precision long-distance measurement using a frequency comb of a femtosecond mode-locked laser, 0000 (20 November 2003); doi: 10.1117/12.505422
Proc. SPIE 5190, Acoustic method for the determination of the effective temperature and refractive index of air, 0000 (20 November 2003); doi: 10.1117/12.504468
Proc. SPIE 5190, Wavelength-tracking capabilities of a Fabry-Perot cavity, 0000 (20 November 2003); doi: 10.1117/12.506313
Proc. SPIE 5190, Improved second-harmonic two-wavelength interferometer with refractive index correction without effect modulation, 0000 (20 November 2003); doi: 10.1117/12.509868
Distance Measurement
Proc. SPIE 5190, Improving a commercially available heterodyne laser interferometer to sub-nm uncertainty, 0000 (20 November 2003); doi: 10.1117/12.508542
Proc. SPIE 5190, Interferometric calibration of microdisplacement actuators, 0000 (20 November 2003); doi: 10.1117/12.505909
Proc. SPIE 5190, Absolute distance measurement with the MSTAR sensor, 0000 (20 November 2003); doi: 10.1117/12.503760
Proc. SPIE 5190, Analytical solution of excess fractions method in absolute distance interferometry, 0000 (20 November 2003); doi: 10.1117/12.507797
Proc. SPIE 5190, Recent work at NML to establish traceability for survey electronic distance measurement (EDM), 0000 (20 November 2003); doi: 10.1117/12.503659
Poster Session
Proc. SPIE 5190, Recent activities at PTB nanometer comparator, 0000 (20 November 2003); doi: 10.1117/12.506908
Proc. SPIE 5190, Automatic high-precision calibration system for angle encoder (II), 0000 (20 November 2003); doi: 10.1117/12.506473
Proc. SPIE 5190, Traceability in metrology and uncertainty evaluation of a calibration system for GPS receivers, 0000 (20 November 2003); doi: 10.1117/12.505610
Proc. SPIE 5190, 5-m measurement system for traceable measurements of tapes and rules, 0000 (20 November 2003); doi: 10.1117/12.505579
Proc. SPIE 5190, Stability of the reference flat used in Fizeau interferometer and its contribution to measurement uncertainty, 0000 (20 November 2003); doi: 10.1117/12.505537
Proc. SPIE 5190, Device for calibration of the height micrometers and the squareness standards, 0000 (20 November 2003); doi: 10.1117/12.505412
Proc. SPIE 5190, Simple rubidium stabilized diode laser for gauge block interferometer, 0000 (20 November 2003); doi: 10.1117/12.504025
Proc. SPIE 5190, Alternative measuring modes for scanning probe instrumentation, 0000 (20 November 2003); doi: 10.1117/12.503069
Proc. SPIE 5190, Development of a digital controller for iodine stabilized lasers, 0000 (20 November 2003); doi: 10.1117/12.503056
Line Scales
Proc. SPIE 5190, Ultrahigh-resolution Cartesian absolute optical encoder, 0000 (20 November 2003); doi: 10.1117/12.518376
Poster Session
Proc. SPIE 5190, Ultrahigh resolution absolute Cartesian electronic autocollimator, 0000 (20 November 2003); doi: 10.1117/12.518377
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