PROCEEDINGS VOLUME 5193
OPTICAL SCIENCE AND TECHNOLOGY, SPIE'S 48TH ANNUAL MEETING | 3-8 AUGUST 2003
Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications
OPTICAL SCIENCE AND TECHNOLOGY, SPIE'S 48TH ANNUAL MEETING
3-8 August 2003
San Diego, California, United States
Mirror Fabrication and Metrology I
Proc. SPIE 5193, Fabrication and metrology of 10X Schwarzschild optics for EUV imaging, 0000 (13 January 2004); doi: 10.1117/12.510318
Proc. SPIE 5193, Fabrication and metrology of diffraction-limited soft x-ray optics for the EUV microlithography, 0000 (13 January 2004); doi: 10.1117/12.511489
Proc. SPIE 5193, Fabrication of EUV components with MRF, 0000 (13 January 2004); doi: 10.1117/12.506274
Mirrors, Coatings, and Multilayers I
Proc. SPIE 5193, Smoothing of diamond-turned substrates for extreme-ultraviolet lithography illuminators, 0000 (13 January 2004); doi: 10.1117/12.509220
Mirror Fabrication and Metrology II
Proc. SPIE 5193, EUV collectors: design, development, fabrication, and testing, 0000 (13 January 2004); doi: 10.1117/12.507736
Proc. SPIE 5193, Fabrication of meter-scale laser-resistant mirrors for the National Ignition Facility: a fusion laser, 0000 (13 January 2004); doi: 10.1117/12.511677
Mirror Fabrication and Metrology III
Proc. SPIE 5193, Replicated multilayer x-ray mirrors, 0000 (13 January 2004); doi: 10.1117/12.507975
Proc. SPIE 5193, EUV spectral purity filter: optical and mechanical design, grating fabrication, and testing, 0000 (13 January 2004); doi: 10.1117/12.507741
Proc. SPIE 5193, Equal optical path beam splitters by use of amplitude-splitting and wavefront-splitting methods for pencil beam interferometer, 0000 (13 January 2004); doi: 10.1117/12.508024
Mirrors, Coatings, and Multilayers I
Proc. SPIE 5193, High-performance multilayer coatings for EUV lithography, 0000 (13 January 2004); doi: 10.1117/12.507237
Mirrors, Coatings, and Multilayers II
Proc. SPIE 5193, Deposition of multilayer mirrors with arbitrary period thickness distributions, 0000 (13 January 2004); doi: 10.1117/12.505401
Proc. SPIE 5193, Multilayer mirror design for different applications in the XUV using a versatile simulation program, 0000 (13 January 2004); doi: 10.1117/12.508791
Proc. SPIE 5193, Development of Mo/Si multilayers deposited by low-pressure rotary magnet cathode sputtering for EUV lithography, 0000 (13 January 2004); doi: 10.1117/12.508116
Proc. SPIE 5193, Enhanced reflectivity and stability of Sc/Si multilayers, 0000 (13 January 2004); doi: 10.1117/12.505582
Posters - Thursday
Proc. SPIE 5193, Development of an extreme-ultraviolet imaging spectrometer for the Mercury mission, 0000 (13 January 2004); doi: 10.1117/12.504964
Proc. SPIE 5193, High-performance Cr/Sc multilayers for the soft x-ray range, 0000 (13 January 2004); doi: 10.1117/12.505688
Proc. SPIE 5193, Recoating mirrors having a chromium underlayer, 0000 (13 January 2004); doi: 10.1117/12.512779
Proc. SPIE 5193, Rigorous wavefront analysis of the visible-light point diffraction interferometer for EUVL, 0000 (13 January 2004); doi: 10.1117/12.507046
Mirror Fabrication and Metrology I
Proc. SPIE 5193, Fabrication technology of hard x-ray aspherical mirror optics and application to nanospectroscopy, 0000 (13 January 2004); doi: 10.1117/12.515127
Mirrors, Coatings, and Multilayers II
Proc. SPIE 5193, Development of a figure correction method having spatial resolution close to 0.1 mm, 0000 (13 January 2004); doi: 10.1117/12.520825
Proc. SPIE 5193, Performance of an adaptive u-focusing Kirkpatrick-Baez system for high-pressure studies at the Advanced Photon Source, 0000 (13 January 2004); doi: 10.1117/12.520827
Posters - Thursday
Proc. SPIE 5193, A comparison of uranium oxide and nickle as single-layer reflectors from 2.7 to 11.6 nm, 0000 (13 January 2004); doi: 10.1117/12.523478
Proc. SPIE 5193, Cooled mirror for a double-undulator beamline, 0000 (13 January 2004); doi: 10.1117/12.524908
Proc. SPIE 5193, Optimized performance of graded multilayer optics for x-ray single-crystal diffraction, 0000 (13 January 2004); doi: 10.1117/12.530264
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