PROCEEDINGS VOLUME 5344
MICROMACHINING AND MICROFABRICATION | 24-29 JANUARY 2004
MEMS/MOEMS Components and Their Applications
MICROMACHINING AND MICROFABRICATION
24-29 January 2004
San Jose, California, United States
Technology, Market, and Reliability Status of MEMS Applications
Proc. SPIE 5344, Emerging MEMS technology and applications, 0000 (24 January 2004); doi: 10.1117/12.538381
Proc. SPIE 5344, Electroactive polymers: an emerging technology for MEMS, 0000 (24 January 2004); doi: 10.1117/12.538382
Acoustics
Proc. SPIE 5344, Curved MEMS resonators yield infrasonic resonant frequencies on single-chip in simulation study, 0000 (24 January 2004); doi: 10.1117/12.524620
Proc. SPIE 5344, Sensitivity of piezoresistive readout device for microfabricated acoustic spectrum analyzer, 0000 (24 January 2004); doi: 10.1117/12.524628
Proc. SPIE 5344, Simulation and characterization of silicon-based 0.5-MHz ultrasonic nozzles, 0000 (24 January 2004); doi: 10.1117/12.527862
Proc. SPIE 5344, Resistively actuated micromechanical dome resonators, 0000 (24 January 2004); doi: 10.1117/12.524175
RF MEMS
Proc. SPIE 5344, Extended tuning range RF MEMS variable capacitors using electrostatic and electrothermal actuators, 0000 (24 January 2004); doi: 10.1117/12.524422
Proc. SPIE 5344, Development of an amorphous diamond (a-D) RF MEMS switch, 0000 (24 January 2004); doi: 10.1117/12.527969
Proc. SPIE 5344, Fabrication and characterization of ohmic contacting RF MEMS switches, 0000 (24 January 2004); doi: 10.1117/12.527984
Space Applications
Proc. SPIE 5344, A micromachined flat plasma spectrometer (FlaPS), 0000 (24 January 2004); doi: 10.1117/12.530880
Proc. SPIE 5344, MEMS thermal switch for spacecraft thermal control, 0000 (24 January 2004); doi: 10.1117/12.530906
Applications of Sensors and Actuators
Proc. SPIE 5344, Piezoelectric microflextensional actuator, 0000 (24 January 2004); doi: 10.1117/12.524817
Proc. SPIE 5344, Microaccelerometers using cured SU-8 as structural material, 0000 (24 January 2004); doi: 10.1117/12.530783
Proc. SPIE 5344, Accelerometer by means of a resonant microactuator, 0000 (24 January 2004); doi: 10.1117/12.524130
Current Topics I
Proc. SPIE 5344, Tether and joint design for microcomponents used in microassembly of 3D microstructures, 0000 (24 January 2004); doi: 10.1117/12.524685
Proc. SPIE 5344, Low-stressed high-aspect-ratio ultrathick SU-8 UV-LIGA process for the fabrication of a micro heat exchanger, 0000 (24 January 2004); doi: 10.1117/12.524608
Proc. SPIE 5344, Confirmation of large-periphery compressible gas flow model for microvalves, 0000 (24 January 2004); doi: 10.1117/12.532665
Current Topics II
Proc. SPIE 5344, Miniaturized proton exchange fuel cell in micromachined silicon surface, 0000 (24 January 2004); doi: 10.1117/12.524446
Proc. SPIE 5344, Application of microaccelerometer in target recognition, 0000 (24 January 2004); doi: 10.1117/12.523916
Poster Session
Proc. SPIE 5344, Accurate neural network-based modeling for RF MEMS component synthesizing, 0000 (24 January 2004); doi: 10.1117/12.523954
Proc. SPIE 5344, Development of an all-metal electrothermal actuator and its applications, 0000 (24 January 2004); doi: 10.1117/12.524098
Current Topics II
Proc. SPIE 5344, Investigation of microarray thermal actuator for MEMS, 0000 (24 January 2004); doi: 10.1117/12.524438
Poster Session
Proc. SPIE 5344, Production and optimization of a MEMS-based flow direction and velocity sensor, 0000 (24 January 2004); doi: 10.1117/12.526395
Proc. SPIE 5344, Analysis of the influence of electrode gap on parameters of optical microscanners, 0000 (24 January 2004); doi: 10.1117/12.527362
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