PROCEEDINGS VOLUME 5347
MICROMACHINING AND MICROFABRICATION | 24-29 JANUARY 2004
Micromachining Technology for Micro-Optics and Nano-Optics II
IN THIS VOLUME

0 Sessions, 32 Papers, 0 Presentations
MICROMACHINING AND MICROFABRICATION
24-29 January 2004
San Jose, California, United States
X-Ray and Femtosecond Optics
Proc. SPIE 5347, At the limit of nondispersive micro- and nanofocusing mirror optics, 0000 (29 December 2003); doi: 10.1117/12.533345
Proc. SPIE 5347, Design and fabrication of advanced EUV diffractive elements, 0000 (29 December 2003); doi: 10.1117/12.537195
Proc. SPIE 5347, Femtosecond laser microstructuring and refractive index modification applied to laser and photonic devices, 0000 (29 December 2003); doi: 10.1117/12.538386
Etching Micro- and Nano-Optics
Proc. SPIE 5347, Gray-scale fabrication of micro-optics in bulk zinc selenide and bulk multispectral zinc sulfide, 0000 (29 December 2003); doi: 10.1117/12.524580
Proc. SPIE 5347, Diamond optics: fabrication and applications, 0000 (29 December 2003); doi: 10.1117/12.537595
Proc. SPIE 5347, Developments in Si and SiO2 etching for MEMS-based optical applications, 0000 (29 December 2003); doi: 10.1117/12.524471
Proc. SPIE 5347, Developments in SiO2 multistep diffractive optical element for beam homogenizing, 0000 (29 December 2003); doi: 10.1117/12.528817
Advanced Lithography
Proc. SPIE 5347, Analog micro-optics fabrication by use of a binary phase grating mask, 0000 (29 December 2003); doi: 10.1117/12.522221
Proc. SPIE 5347, Design of continuous full-complex modulation proximity printing masks using a quadratic phase distribution, 0000 (29 December 2003); doi: 10.1117/12.524564
Proc. SPIE 5347, MEMS-based lithography for the fabrication of micro-optical components, 0000 (29 December 2003); doi: 10.1117/12.524447
Proc. SPIE 5347, Presculpting of photoresists using additive lithography, 0000 (29 December 2003); doi: 10.1117/12.538385
Applications I
Proc. SPIE 5347, Design and fabrication of sol-gel microlens array as a fiber-to-fiber and fiber-to-waveguide coupler, 0000 (29 December 2003); doi: 10.1117/12.523571
Proc. SPIE 5347, Thick microlens array fabricated by soft lithography in hybrid sol-gel glass, 0000 (29 December 2003); doi: 10.1117/12.524204
Proc. SPIE 5347, High-sensitivity material systems for two-photon three dimensional microfabrication, 0000 (29 December 2003); doi: 10.1117/12.532614
Proc. SPIE 5347, Novel inter-core-cladding lithium niobate thin-film-coated fiber modulator/sensor, 0000 (29 December 2003); doi: 10.1117/12.524650
Applications II
Proc. SPIE 5347, Formation of complex wavefronts by use of quasiperiodic subwavelength structures, 0000 (29 December 2003); doi: 10.1117/12.524283
Proc. SPIE 5347, Monolithic integration of optical waveguides and MEMS-based switching in silicon-on-insulator, 0000 (29 December 2003); doi: 10.1117/12.532618
Proc. SPIE 5347, Microfabrication technologies for missile components, 0000 (29 December 2003); doi: 10.1117/12.532616
Proc. SPIE 5347, Proton beam writing of passive polymer optical waveguides, 0000 (29 December 2003); doi: 10.1117/12.524083
Nanofabrication I
Proc. SPIE 5347, Microfabrication of chiral optic materials and devices, 0000 (29 December 2003); doi: 10.1117/12.531754
Proc. SPIE 5347, Fabrication of 3D photonic crystals with embedded defects, 0000 (29 December 2003); doi: 10.1117/12.524462
Proc. SPIE 5347, Laser microfabrication of photonic crystal structures on silicon wafers, 0000 (29 December 2003); doi: 10.1117/12.524569
Proc. SPIE 5347, Fabrication of 3D silicon photonic crystal structures using conventional micromachining technology, 0000 (29 December 2003); doi: 10.1117/12.524659
Proc. SPIE 5347, Fabrication of passively aligned micro-optics using focused ion beam, 0000 (29 December 2003); doi: 10.1117/12.522067
Nanofabrication II
Proc. SPIE 5347, Surface plasmons for nanofabrication, 0000 (29 December 2003); doi: 10.1117/12.532613
Proc. SPIE 5347, Fabrication of three-dimensional photonic crystals using lithographic processes, 0000 (29 December 2003); doi: 10.1117/12.538388
Proc. SPIE 5347, Micro-optic enhancement and fabrication through variable in-plane index of refraction (VIPIR) engineered silicon nanocomposite technology, 0000 (29 December 2003); doi: 10.1117/12.532617
Proc. SPIE 5347, Inadvertent and intentional subwavelength surface texture on micro-optical components, 0000 (29 December 2003); doi: 10.1117/12.524606
Poster Session
Proc. SPIE 5347, Fabrication of micro-optical components in polymer using proton beam writing, 0000 (29 December 2003); doi: 10.1117/12.524300
Proc. SPIE 5347, Fabrication of silicon microstructures using a high-energy ion beam, 0000 (29 December 2003); doi: 10.1117/12.524314
Proc. SPIE 5347, Si3N4-based photonic crystal membranes, 0000 (29 December 2003); doi: 10.1117/12.530314
Proc. SPIE 5347, Fabrication of ball-type spherical microlens array for optical fiber coupling, 0000 (29 December 2003); doi: 10.1117/12.524226
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