PROCEEDINGS VOLUME 5455
PHOTONICS EUROPE | 26-30 APRIL 2004
MEMS, MOEMS, and Micromachining
IN THIS VOLUME

0 Sessions, 46 Papers, 0 Presentations
Biomems  (4)
RF MEMS  (5)
Telecom I  (3)
Telecom II  (4)
Fabrication  (4)
PHOTONICS EUROPE
26-30 April 2004
Strasbourg, France
Microsystems and Sensors
Proc. SPIE 5455, Infrared MEMS-based Lamellar grating spectrometer, 0000 (16 August 2004); doi: 10.1117/12.545587
Proc. SPIE 5455, Development of a NIR microspectrometer based on a MOEMS scanning grating, 0000 (16 August 2004); doi: 10.1117/12.544638
Proc. SPIE 5455, Compact triangulation distance sensor realized by wafer bending technique, 0000 (16 August 2004); doi: 10.1117/12.545267
Proc. SPIE 5455, Integrated asymmetric vertical coupler pressure sensors, 0000 (16 August 2004); doi: 10.1117/12.546070
Proc. SPIE 5455, Polymer-based pixel matrix display in MOEMS technology, 0000 (16 August 2004); doi: 10.1117/12.548753
Testing and Packaging
Proc. SPIE 5455, Design for reliability of drift-free MEMS micromirrors, 0000 (16 August 2004); doi: 10.1117/12.549111
Proc. SPIE 5455, Fabrication end-test of the micro scanning mirror, 0000 (16 August 2004); doi: 10.1117/12.545247
Proc. SPIE 5455, Experimental investigation on the dynamics of MEMS structures, 0000 (16 August 2004); doi: 10.1117/12.547544
Proc. SPIE 5455, Single-mode microwave sealing of polymer-based microfluidic devices using conductive polymer, 0000 (16 August 2004); doi: 10.1117/12.543763
Biomems
Proc. SPIE 5455, MEMS application to characterization of field emitters and biomolecules, 0000 (16 August 2004); doi: 10.1117/12.548984
Proc. SPIE 5455, Optical systems based on electrowetting, 0000 (16 August 2004); doi: 10.1117/12.543367
Proc. SPIE 5455, Micro-electro-mechanical systems (MEMS) for enzymatic detection, 0000 (16 August 2004); doi: 10.1117/12.547545
Proc. SPIE 5455, Artificial muscle valves for responsive drug delivery systems, 0000 (16 August 2004); doi: 10.1117/12.548756
Design and Modeling
Proc. SPIE 5455, Designing manufacturable MEMS in CMOS-compatible processes: methodology and case studies, 0000 (16 August 2004); doi: 10.1117/12.544971
Proc. SPIE 5455, Analysis of parametric resonances in comb-driven microscanners, 0000 (16 August 2004); doi: 10.1117/12.547444
Proc. SPIE 5455, Mathematical modeling and design of a novel 2-DOF micro attraction actuator for a micro optical switch, 0000 (16 August 2004); doi: 10.1117/12.545993
Proc. SPIE 5455, Damping analysis and measurement for a comb-drive scanning mirror, 0000 (16 August 2004); doi: 10.1117/12.550529
Proc. SPIE 5455, A tilting micromirror with well-controlled digital angle through constrained lever structure, 0000 (16 August 2004); doi: 10.1117/12.545378
RF MEMS
Proc. SPIE 5455, A surface micromachined tunable film bulk acoustic resonator, 0000 (16 August 2004); doi: 10.1117/12.545532
Proc. SPIE 5455, Piezoelectric actuation for application in RF-MEMS switches, 0000 (16 August 2004); doi: 10.1117/12.545687
Proc. SPIE 5455, MEMS-based redundancy ring for low-noise millimeter-wave front-end, 0000 (16 August 2004); doi: 10.1117/12.548751
Proc. SPIE 5455, CMOS-compatible RF MEMS switch, 0000 (16 August 2004); doi: 10.1117/12.544120
Proc. SPIE 5455, Infrastructure for the design and fabrication of MEMS for RF/microwave and millimeter wave applications, 0000 (16 August 2004); doi: 10.1117/12.549813
Telecom I
Proc. SPIE 5455, 4x4 and 8x8 optical cross connect for optical fiber networks, 0000 (16 August 2004); doi: 10.1117/12.544915
Proc. SPIE 5455, Design and fabrication of a circular digital variable optical attenuator, 0000 (16 August 2004); doi: 10.1117/12.544997
Proc. SPIE 5455, A MEMS-based all-dielectric tunable optical filter with increased tuning range, 0000 (16 August 2004); doi: 10.1117/12.545346
Telecom II
Proc. SPIE 5455, MEMS tunable filter for telecom applications, 0000 (16 August 2004); doi: 10.1117/12.545581
Proc. SPIE 5455, Micromachined tunable optical microfilters design and experimental processing, 0000 (16 August 2004); doi: 10.1117/12.545470
Proc. SPIE 5455, A new micromachined optical fiber switch for instrumentation purposes, 0000 (16 August 2004); doi: 10.1117/12.544798
Proc. SPIE 5455, Fabrication of micro-optical switch by post-CMOS micromachining process, 0000 (16 August 2004); doi: 10.1117/12.545307
Fabrication
Proc. SPIE 5455, Deep lithography with protons as an alternative fabrication technology for high-precision 2D fiber connector components, 0000 (16 August 2004); doi: 10.1117/12.547719
Proc. SPIE 5455, Carbon-MEMS architectures for 3D microbatteries, 0000 (16 August 2004); doi: 10.1117/12.548755
Proc. SPIE 5455, MOEMS industrial infrastructure, 0000 (16 August 2004); doi: 10.1117/12.546937
Proc. SPIE 5455, Real-time monitoring of thickness of silicon membrane during wet etching using a novel surface acoustic wave sensor, 0000 (16 August 2004); doi: 10.1117/12.544959
Poster Session
Proc. SPIE 5455, Reagentless cell lysis on a PDMS CD using beads, 0000 (16 August 2004); doi: 10.1117/12.548757
Proc. SPIE 5455, CD (compact disc)-based DNA hybridization and detection, 0000 (16 August 2004); doi: 10.1117/12.548754
Proc. SPIE 5455, An SU-8 liquid cell for surface acoustic wave biosensors, 0000 (16 August 2004); doi: 10.1117/12.544779
Proc. SPIE 5455, A VHDL-AMS package for microsystems polychromatic optical modeling, 0000 (16 August 2004); doi: 10.1117/12.544845
Proc. SPIE 5455, Microengraving of a potassium dihydrogen phosphate crystal by laser ablation technique, 0000 (16 August 2004); doi: 10.1117/12.544992
Proc. SPIE 5455, Optical MEMS components fabrication using micromachning of (111)-oriented silicon wafers, 0000 (16 August 2004); doi: 10.1117/12.545022
Proc. SPIE 5455, An in situ test structure for simultaneously determining multimaterial properties of a film, 0000 (16 August 2004); doi: 10.1117/12.545231
Proc. SPIE 5455, Characterization of waferstepper and process-related front- to backwafer overlay errors in bulk micromachining using electrical overlay test structures, 0000 (16 August 2004); doi: 10.1117/12.545900
Proc. SPIE 5455, FEM calculations on laser bending of silicon with a moving laser source, 0000 (16 August 2004); doi: 10.1117/12.544814
Proc. SPIE 5455, Modeling of microstrip lines on micromachined silicon substrates, 0000 (16 August 2004); doi: 10.1117/12.545541
Proc. SPIE 5455, Bragg reflector based on periodic structures for silicon MOEMS applications, 0000 (16 August 2004); doi: 10.1117/12.545585
Proc. SPIE 5455, Static and dynamic characterization of MEMS and MOEMS devices using optical interference microscopy, 0000 (16 August 2004); doi: 10.1117/12.546211
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