PROCEEDINGS VOLUME 5457
PHOTONICS EUROPE | 26-30 APRIL 2004
Optical Metrology in Production Engineering
PHOTONICS EUROPE
26-30 April 2004
Strasbourg, France
New Measurement Principles and Strategies
Proc. SPIE 5457, Photoelastic tomography for residual stress measurement in glass, 0000 (10 September 2004); doi: 10.1117/12.543778
Proc. SPIE 5457, Displacement measurements of technical surfaces with a synchronously pumped external cavity diode laser, 0000 (10 September 2004); doi: 10.1117/12.543886
Proc. SPIE 5457, Ultra-precise distance measurement for nanometrology, 0000 (10 September 2004); doi: 10.1117/12.545924
Proc. SPIE 5457, Signal modeling for modern interference microscopes, 0000 (10 September 2004); doi: 10.1117/12.546226
Proc. SPIE 5457, UV and DUV microscopy for dimensional metrology on micro- and nano-structures, 0000 (10 September 2004); doi: 10.1117/12.554747
Proc. SPIE 5457, Pseudo-phase information of complex analytic signal of speckle fields and its applications: microdisplacement measurement based on phase-only correlation in signal domain, 0000 (10 September 2004); doi: 10.1117/12.545443
Proc. SPIE 5457, All-digital phase code: a proposal for high-speed 3D-shape recording, 0000 (10 September 2004); doi: 10.1117/12.547907
Proc. SPIE 5457, Phasogrammetric optical 3D sensor for the measurement of large objects, 0000 (10 September 2004); doi: 10.1117/12.546696
Proc. SPIE 5457, Fluorescence metrology used for analytics of high-quality optical materials, 0000 (10 September 2004); doi: 10.1117/12.547448
Sensors, Components, and Algorithms
Proc. SPIE 5457, Smart pixels, 0000 (10 September 2004); doi: 10.1117/12.554753
Proc. SPIE 5457, Compact excimer lasers for metrology and inspection applications, 0000 (10 September 2004); doi: 10.1117/12.536845
Proc. SPIE 5457, Fast scanning confocal sensor provides high-fidelity surface profiles on a microscopic scale, 0000 (10 September 2004); doi: 10.1117/12.544689
Proc. SPIE 5457, In-factory calibration of multiocular camera systems, 0000 (10 September 2004); doi: 10.1117/12.545396
Proc. SPIE 5457, A general framework for three-dimensional surface reconstruction by self-consistent fusion of shading and shadow features and its application to industrial quality inspection tasks, 0000 (10 September 2004); doi: 10.1117/12.545454
Proc. SPIE 5457, Black-box calibration methods investigated with a virtual fringe projection system, 0000 (10 September 2004); doi: 10.1117/12.554748
Proc. SPIE 5457, Combined interference and scanning force microscope, 0000 (10 September 2004); doi: 10.1117/12.545693
Proc. SPIE 5457, Dual-technology optical sensor head for 3D surface shape measurements on the micro- and nanoscales, 0000 (10 September 2004); doi: 10.1117/12.545701
Proc. SPIE 5457, Design aspects in the development of a standing wave interferometer, 0000 (10 September 2004); doi: 10.1117/12.546708
Proc. SPIE 5457, Optonumerical system supporting visualization of true 3D variable in time objects in virtual reality environment, 0000 (10 September 2004); doi: 10.1117/12.545835
Proc. SPIE 5457, Practical aspects of curvature detection for LACS free-form measuring systems, 0000 (10 September 2004); doi: 10.1117/12.545498
Proc. SPIE 5457, Evaluation of a residual stresses measurement device combining a radial in-plane ESPI and the blind hole drilling method, 0000 (10 September 2004); doi: 10.1117/12.547269
Proc. SPIE 5457, Multidimensional strain and temperature measurements using a novel high-birefringent fiber Bragg grating interrogation system, 0000 (10 September 2004); doi: 10.1117/12.545746
Proc. SPIE 5457, Digital holography and grating interferometry: a complementary approach, 0000 (10 September 2004); doi: 10.1117/12.545645
Proc. SPIE 5457, Processing of low-intensity CCD images for temperature mapping in industrial processes, 0000 (10 September 2004); doi: 10.1117/12.545372
Proc. SPIE 5457, Etalon of optical frequency for the telecommunication spectral region, 0000 (10 September 2004); doi: 10.1117/12.545714
Shape, Distance, and Surface Measurement
Proc. SPIE 5457, New approaches in depth-scanning optical metrology, 0000 (10 September 2004); doi: 10.1117/12.554754
Proc. SPIE 5457, A new calibration scheme for the three-dimensional depth-scanning fringe projection measurement method, 0000 (10 September 2004); doi: 10.1117/12.544251
Proc. SPIE 5457, Light-scattered measurements using Fourier optics: a new tool for surface characterization, 0000 (10 September 2004); doi: 10.1117/12.545390
Proc. SPIE 5457, Use of in-situ spectroscopic ellipsometry to study the behavior of metallic surfaces in different solutions, 0000 (10 September 2004); doi: 10.1117/12.545392
Proc. SPIE 5457, Phase measuring deflectometry: a new approach to measure specular free-form surfaces, 0000 (10 September 2004); doi: 10.1117/12.545704
Proc. SPIE 5457, High-resolution shape measurements with phase-shifting Schlieren (PSS), 0000 (10 September 2004); doi: 10.1117/12.545536
Proc. SPIE 5457, Visual robot control for close-range inspections, 0000 (10 September 2004); doi: 10.1117/12.545603
Proc. SPIE 5457, A 3D scanning device for architectural survey based on time-of-flight technology, 0000 (10 September 2004); doi: 10.1117/12.545629
Proc. SPIE 5457, A new method and a novel facility for ultra precise 2D topography measurement of large optical surfaces, 0000 (10 September 2004); doi: 10.1117/12.545646
Proc. SPIE 5457, High-resolution 3D shape measurement on specular surfaces by fringe reflection, 0000 (10 September 2004); doi: 10.1117/12.545987
Interferometry and Digital Holography
Proc. SPIE 5457, Recent advancements in digital holographic microscopy and its applications, 0000 (10 September 2004); doi: 10.1117/12.554755
Proc. SPIE 5457, Comparative displacement measurement by digital holographic interferometry, 0000 (10 September 2004); doi: 10.1117/12.546707
Proc. SPIE 5457, Digital holographic microscopy applied to metrology, 0000 (10 September 2004); doi: 10.1117/12.546014
Proc. SPIE 5457, Novel solution for digital holographic interferometer design, 0000 (10 September 2004); doi: 10.1117/12.545616
Proc. SPIE 5457, Fringe pattern projection method combined with digital holography, 0000 (10 September 2004); doi: 10.1117/12.545528
Proc. SPIE 5457, Short-coherence digital holography for the investigation of 3D microscopic samples, 0000 (10 September 2004); doi: 10.1117/12.544107
Proc. SPIE 5457, Two-wavelength contouring in difference holographic interferometry and DISCO, 0000 (10 September 2004); doi: 10.1117/12.546053
Proc. SPIE 5457, Multicomponent laser shearography for the investigation of defects in rotating machinery, 0000 (10 September 2004); doi: 10.1117/12.545125
Proc. SPIE 5457, Dispersion of group and phase modal birefringence in optical fibers measured by time-domain and spectral-domain tandem interferometry, 0000 (10 September 2004); doi: 10.1117/12.543773
Proc. SPIE 5457, Surface plasmon resonance heterodyne interferometry for measuring physical parameters, 0000 (10 September 2004); doi: 10.1117/12.544484
Proc. SPIE 5457, Nanodisplacement control with optical heterodyne interferometry, 0000 (10 September 2004); doi: 10.1117/12.544651
Proc. SPIE 5457, Holographic interferometric microscopy systems for the application on biological samples, 0000 (10 September 2004); doi: 10.1117/12.543996
Proc. SPIE 5457, Correction of aberrations in an optical correlator by using it as a point diffraction interferometer, 0000 (10 September 2004); doi: 10.1117/12.545753
Proc. SPIE 5457, Application of comparative digital holography for distant shape control, 0000 (10 September 2004); doi: 10.1117/12.554757
Proc. SPIE 5457, Analogue and digital developments for project DISCO at Budapest University of Technology and Economics, 0000 (10 September 2004); doi: 10.1117/12.554759
Proc. SPIE 5457, An all-fiber Pr/Yb-doped up-conversion laser in different laser operation modes, 0000 (10 September 2004); doi: 10.1117/12.554768
Proc. SPIE 5457, Nematic LCoS spatial light modulators: performance in diffractive optics, 0000 (10 September 2004); doi: 10.1117/12.546020
Proc. SPIE 5457, Optical characterization of liquid-crystal-on-silicon displays, 0000 (10 September 2004); doi: 10.1117/12.554769
Applications
Proc. SPIE 5457, Ultra/thin hard films: optical characterization and metrology in industrial manufacturing, 0000 (10 September 2004); doi: 10.1117/12.544608
Proc. SPIE 5457, Color prediction in textile application, 0000 (10 September 2004); doi: 10.1117/12.544800
Proc. SPIE 5457, Absolute deflectometric measurement of topography: influence of systematic deviations, 0000 (10 September 2004); doi: 10.1117/12.545666
Proc. SPIE 5457, Bulk absorption measurements of highly transparent DUV/VUV optical materials, 0000 (10 September 2004); doi: 10.1117/12.545601