PROCEEDINGS VOLUME 5458
PHOTONICS EUROPE | 26-30 APRIL 2004
Optical Micro- and Nanometrology in Manufacturing Technology
PHOTONICS EUROPE
26-30 April 2004
Strasbourg, France
MEMS Characterization I
Proc. SPIE 5458, Three-dimensional dynamic environmental MEMS characterization, 0000 (17 August 2004); doi: 10.1117/12.546646
Proc. SPIE 5458, Application of the vortex transform to microscopic interferometry, 0000 (17 August 2004); doi: 10.1117/12.545509
Proc. SPIE 5458, Interferometric methods for static and dynamic characterizations of micromembranes for sensing functions, 0000 (17 August 2004); doi: 10.1117/12.545574
Proc. SPIE 5458, Analysis of static and dynamic operational behavior of active micromembranes, 0000 (17 August 2004); doi: 10.1117/12.547720
MOEMS Devices and Materials Characterization
Proc. SPIE 5458, Lateral error reduction in the 3D characterization of deep MOEMS devices using white light interference microscopy, 0000 (17 August 2004); doi: 10.1117/12.545663
Proc. SPIE 5458, Metrology of refractive microlens arrays, 0000 (17 August 2004); doi: 10.1117/12.545458
Proc. SPIE 5458, Tomographic microinterferometry of refractive index distribution, 0000 (17 August 2004); doi: 10.1117/12.545553
Proc. SPIE 5458, Thickness measurement of thin transparent plates with a broadband wavelength-scanning interferometer, 0000 (17 August 2004); doi: 10.1117/12.544955
Proc. SPIE 5458, Application on multichannel V-groove inspection, 0000 (17 August 2004); doi: 10.1117/12.544171
Topography and Shape Measurement
Proc. SPIE 5458, Makyoh topography: a simple yet powerful optical method for flatness and defect characterization of mirror-like surfaces, 0000 (17 August 2004); doi: 10.1117/12.546018
Proc. SPIE 5458, Real-time measurement of microscopic surface shape using high-speed cameras with continuously scanning interference microscopy, 0000 (17 August 2004); doi: 10.1117/12.545724
Proc. SPIE 5458, Scanning diffraction microscopy: far-field microscopy by interferometry and diffraction combination, 0000 (17 August 2004); doi: 10.1117/12.545582
Proc. SPIE 5458, Real-time shape measurement system including CG output, 0000 (17 August 2004); doi: 10.1117/12.546268
Novelty Techniques
Proc. SPIE 5458, Performance of a multifiber polarimetric strain sensor, 0000 (17 August 2004); doi: 10.1117/12.544179
Proc. SPIE 5458, Holographic interferometry deformations metrology by using AR modeling, 0000 (17 August 2004); doi: 10.1117/12.544098
Proc. SPIE 5458, Design, testing, and calibration of an integrated Mach-Zehnder-based optical read-out architecture for MEMS characterization, 0000 (17 August 2004); doi: 10.1117/12.546299
Proc. SPIE 5458, Sensitivity-tunable interferometric system based on surface plasmon resonance, 0000 (17 August 2004); doi: 10.1117/12.545327
Near-Field Characterization and Nanostructures
Proc. SPIE 5458, Near-field scanning photoluminescence microscopy of InGaN/GaN quantum structures, 0000 (17 August 2004); doi: 10.1117/12.545352
Proc. SPIE 5458, Near-field optical measurements using rare-earth-doped glass-ceramic particles, 0000 (17 August 2004); doi: 10.1117/12.544106
Proc. SPIE 5458, Study of the roughness and optical near field of mass surface by using a SNOM with shear-force regulation, 0000 (17 August 2004); doi: 10.1117/12.545692
Proc. SPIE 5458, A miniaturized SNOM sensor based on the optical feedback inside the VCSEL cavity, 0000 (17 August 2004); doi: 10.1117/12.546003
Proc. SPIE 5458, Evolutionary approach to an inverse problem in near-field optics microscopy, 0000 (17 August 2004); doi: 10.1117/12.545793
MEMS Characterization II
Proc. SPIE 5458, Optical characterization of micro-electro-mechanical structures, 0000 (17 August 2004); doi: 10.1117/12.546283
Proc. SPIE 5458, Studies of the properties of the temporal phase-shifting method applied to silicone microelement vibration investigations using the time-average method, 0000 (17 August 2004); doi: 10.1117/12.545450
Proc. SPIE 5458, Investigation on mechanical properties of porous alumina thin membranes using temporal sequence speckle pattern interferometry, 0000 (17 August 2004); doi: 10.1117/12.545254
MEMS Characterization III
Proc. SPIE 5458, Digital holographic microscope for thermal characterization of silicon microhotplates for gas sensor, 0000 (17 August 2004); doi: 10.1117/12.546016
Proc. SPIE 5458, Hybrid analysis of micromachined silicon thin film based on digital microscopic holography, 0000 (17 August 2004); doi: 10.1117/12.546600
Proc. SPIE 5458, An optical workstation for characterization and modification of MEMS, 0000 (17 August 2004); doi: 10.1117/12.545596
MOEMS Devices and Materials Characterization
Proc. SPIE 5458, Singular Stokes-polarimetry as new technique for metrology and inspection of polarized speckle fields, 0000 (17 August 2004); doi: 10.1117/12.544681
Poster Session
Proc. SPIE 5458, A plastic fiber polarimetric sensor for dynamic applications, 0000 (17 August 2004); doi: 10.1117/12.545210
Proc. SPIE 5458, Stroboscopic illumination and synchronous imaging for the characterization of MEMS vibrations, 0000 (17 August 2004); doi: 10.1117/12.545586
Proc. SPIE 5458, Femtosecond ablation scaling for different materials, 0000 (17 August 2004); doi: 10.1117/12.545927
Proc. SPIE 5458, Frequency measurement of refraction index of air for high-resolution laser interferometry, 0000 (17 August 2004); doi: 10.1117/12.545929
Proc. SPIE 5458, Photopolymerization-induced materialization of the dipolar response from isolated metallic nanoparticles, 0000 (17 August 2004); doi: 10.1117/12.545655
Proc. SPIE 5458, Modified linear and circular carrier-frequency Fourier-transform method applied for studies of vibrating microelements, 0000 (17 August 2004); doi: 10.1117/12.554287
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