PROCEEDINGS VOLUME 5650
SMART MATERIALS, NANO-, AND MICRO-SMART SYSTEMS | 12-15 DECEMBER 2004
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
Proceedings Volume 5650 is from: Logo
SMART MATERIALS, NANO-, AND MICRO-SMART SYSTEMS
12-15 December 2004
Sydney, Australia
Photonics and Applications
Proc. SPIE 5650, Structures and light emission properties of ion beam synthesized FeSi2 in silicon, 0000 (23 February 2005); doi: 10.1117/12.582335
Proc. SPIE 5650, The causes and nature of diameter variations along optical fiber, 0000 (23 February 2005); doi: 10.1117/12.581789
Nanotechnology
Proc. SPIE 5650, Formation of carbon nanoclusters by implantation of keV carbon ions in fused silica followed by thermal annealing, 0000 (23 February 2005); doi: 10.1117/12.582855
Proc. SPIE 5650, Fast donor-based electron spin quantum computing, 0000 (23 February 2005); doi: 10.1117/12.583200
Quantum Computing
Proc. SPIE 5650, Nanofabrication of charge-based Si:P quantum computer devices using single-ion implantation, 0000 (23 February 2005); doi: 10.1117/12.583284
Proc. SPIE 5650, Optimization of single keV ion implantation for the construction of single P-donor devices, 0000 (23 February 2005); doi: 10.1117/12.582208
Proc. SPIE 5650, Scaling of coherent tunneling adiabatic passage in solid-state coherent quantum systems, 0000 (23 February 2005); doi: 10.1117/12.583193
Proc. SPIE 5650, Development of NiFe micromagnet stripes for solid-state NMR quantum computing, 0000 (23 February 2005); doi: 10.1117/12.582248
Proc. SPIE 5650, Single-electron transistor coupled to a silicon nano-MOSFET, 0000 (23 February 2005); doi: 10.1117/12.583293
Proc. SPIE 5650, Exchange in phosphorus donor spin based quantum computers, 0000 (23 February 2005); doi: 10.1117/12.583405
Photonics
Proc. SPIE 5650, Micro/nano-scale fabrication of integrated polymer optical wire circuit arrays for optical printed circuit board (O-PCB) application, 0000 (23 February 2005); doi: 10.1117/12.581833
Proc. SPIE 5650, Progress in InP-based MOEMS, 0000 (23 February 2005); doi: 10.1117/12.582309
Poster Session
Proc. SPIE 5650, Injection molding of grating optical elements with microfeatures, 0000 (23 February 2005); doi: 10.1117/12.582425
Photonics
Proc. SPIE 5650, Self-assembled GaAs micromirrors monolithically integrated with LEDs, 0000 (23 February 2005); doi: 10.1117/12.582315
Fabrication Techniques I
Proc. SPIE 5650, Cure rate and dry etch patterning of thermoset polymers, 0000 (23 February 2005); doi: 10.1117/12.582302
Poster Session
Proc. SPIE 5650, Polygon microlens array design and fabrication using thermal pressing in LIGA-like process, 0000 (23 February 2005); doi: 10.1117/12.581248
Fabrication Techniques I
Proc. SPIE 5650, Fabrication of microstructures with different aspect ratios in a single layer, 0000 (23 February 2005); doi: 10.1117/12.581894
Proc. SPIE 5650, Selective adhesive bonding with SU-8 for zero-level-packaging, 0000 (23 February 2005); doi: 10.1117/12.581829
Proc. SPIE 5650, STM characterization of phosphine adsorption on STM-patterned H:Si(001)surfaces, 0000 (23 February 2005); doi: 10.1117/12.583316
Fabrication Techniques II
Proc. SPIE 5650, Fabrication of PZT microdevices using a high-yield sol-gel process, 0000 (23 February 2005); doi: 10.1117/12.581395
Poster Session
Proc. SPIE 5650, Fabrication of injection-molded diffuser micropumps, 0000 (23 February 2005); doi: 10.1117/12.582419
Fabrication Techniques II
Proc. SPIE 5650, Fabrication of an integrated microfluidic and surface acoustic wave device for fluid analysis, 0000 (23 February 2005); doi: 10.1117/12.582281
Proc. SPIE 5650, Development of a microblood-typing system using assembly-free process based on virtual environment, 0000 (23 February 2005); doi: 10.1117/12.581980
Characterisation and Systems
Proc. SPIE 5650, Characterization of laser micromachining of metals, 0000 (23 February 2005); doi: 10.1117/12.582999
Proc. SPIE 5650, Control of MEMS-based actuator array for micro smart systems, 0000 (23 February 2005); doi: 10.1117/12.582866
Proc. SPIE 5650, EMC problems in microelectronic sensor packaging, 0000 (23 February 2005); doi: 10.1117/12.582371
Proc. SPIE 5650, MEMS-based inductor implementation for RF front end of mobile terminal, 0000 (23 February 2005); doi: 10.1117/12.582305
Proc. SPIE 5650, Characterization of droplet ejection process for a full-size piezoelectric inkjet printhead, 0000 (23 February 2005); doi: 10.1117/12.582423
Materials and Fabrication Techniques
Proc. SPIE 5650, Nanoimprint lithography: full wafer replication of nanometer features, 0000 (23 February 2005); doi: 10.1117/12.582435
Proc. SPIE 5650, Novel fabrication method of metallic glass thin films using carousel-type sputtering system, 0000 (23 February 2005); doi: 10.1117/12.581811
Proc. SPIE 5650, Surface acoustic wave based ozone sensor with an InOx/Si3N4/36-degree YX LiTaO3 structure, 0000 (23 February 2005); doi: 10.1117/12.582076
Proc. SPIE 5650, Investigation of layered SAW sensors based on a WO3/ZnO/64° YX LiNbO3 structure with gold catalytic layer, 0000 (23 February 2005); doi: 10.1117/12.582222
Poster Session
Proc. SPIE 5650, 100-nm-scale electroplated nickel stamper fabricated by e-beam lithography on chrome/quartz mask, 0000 (23 February 2005); doi: 10.1117/12.568816
Proc. SPIE 5650, Theoretical and experimental comparison of splashing in deposition of copper and graphite thin films by PLD, 0000 (23 February 2005); doi: 10.1117/12.572633
Proc. SPIE 5650, Exploration of a new wafer-level hermetic sealing method by Cu/Sn isothermal solidification technique for MEMS/NEMS devices, 0000 (23 February 2005); doi: 10.1117/12.580355
Proc. SPIE 5650, Development of a MEMS-based micro combustor for a micro gas turbine engine, 0000 (23 February 2005); doi: 10.1117/12.580783
Proc. SPIE 5650, Modal solutions of photonic crystal fibers by using the H-field finite element method, 0000 (23 February 2005); doi: 10.1117/12.581416
Proc. SPIE 5650, A centerless grinding unit used for precisely processing ferrules of optical fiber connector, 0000 (23 February 2005); doi: 10.1117/12.581812
Proc. SPIE 5650, Self-assembling iron silicide nanobars and structure on silicon wafer by microwave plasma method, 0000 (23 February 2005); doi: 10.1117/12.581984
Fabrication Techniques I
Proc. SPIE 5650, Ge nanocrystals embedded in Hf-aluminate high-k gate dielectric for floating gate memory application, 0000 (23 February 2005); doi: 10.1117/12.582062
Poster Session
Proc. SPIE 5650, Plasma-induced processing for microfabrication of transparent materials using a Q-switched Nd:YAG laser, 0000 (23 February 2005); doi: 10.1117/12.582164
Proc. SPIE 5650, Ion beam lithography with single ions, 0000 (23 February 2005); doi: 10.1117/12.582191
Proc. SPIE 5650, The characteristics of LTCC RF switch modules for GSM band, 0000 (23 February 2005); doi: 10.1117/12.582196
Proc. SPIE 5650, Frequency dependency of the characteristics in spiral-type thin film inductors, 0000 (23 February 2005); doi: 10.1117/12.582204
Proc. SPIE 5650, Topology optimization of the optical tweezers setup, 0000 (23 February 2005); doi: 10.1117/12.582260
Proc. SPIE 5650, Method for accurate shape prediction of 3D structure fabricated by x-ray lithography, 0000 (23 February 2005); doi: 10.1117/12.582325
Proc. SPIE 5650, Plastic thermally controllable platform with integrated thin film microcomponents, 0000 (23 February 2005); doi: 10.1117/12.582342
Proc. SPIE 5650, Mechanical behavior of the precision component after synchronous vibratory joining, 0000 (23 February 2005); doi: 10.1117/12.582408
Proc. SPIE 5650, Complex rare-earth-substituted lead titanate piezoceramics II, 0000 (23 February 2005); doi: 10.1117/12.582437
Proc. SPIE 5650, Protein folding and unfolding by force microscopy: a novel inverse methodology, 0000 (23 February 2005); doi: 10.1117/12.582646
Proc. SPIE 5650, Tip-induced nanoscale manipulation of Si and DLC surfaces: the state of the tip, 0000 (23 February 2005); doi: 10.1117/12.582649
Proc. SPIE 5650, AFM-based micro/nanoscale lithography of poly(dimethylsiloxane): stick-slip on softpolymer, 0000 (23 February 2005); doi: 10.1117/12.582650
Proc. SPIE 5650, Investigating the practical implementation of Shor's alagorithm, 0000 (23 February 2005); doi: 10.1117/12.583191
Proc. SPIE 5650, Calculation of the Exchange Coupling in Si:P Donor Systems, 0000 (23 February 2005); doi: 10.1117/12.583192
Proc. SPIE 5650, Measuring decoherence properties of charge qubits using buried donor cellular automata, 0000 (23 February 2005); doi: 10.1117/12.583194