PROCEEDINGS VOLUME 5717
MOEMS-MEMS MICRO AND NANOFABRICATION | 22-27 JANUARY 2005
MEMS/MOEMS Components and Their Applications II
MOEMS-MEMS MICRO AND NANOFABRICATION
22-27 January 2005
San Jose, California, United States
Aerospace Applications of MEMS
Proc. SPIE 5717, Aerospace applications of MEMS, 0000 (22 January 2005); doi: 10.1117/12.601836
Proc. SPIE 5717, Fabrication and characterization of vertical travel linear microactuator, 0000 (22 January 2005); doi: 10.1117/12.591128
Proc. SPIE 5717, Piezoelectric unimorph MEMS deformable mirror for ultra-large telescopes, 0000 (22 January 2005); doi: 10.1117/12.591275
Proc. SPIE 5717, MEMS adaptive optics system on multiple telescopes: experimental results, 0000 (22 January 2005); doi: 10.1117/12.593917
Proc. SPIE 5717, Mounting a deformable mirror onto a controllable tip/tilt platform, 0000 (22 January 2005); doi: 10.1117/12.593926
Industry Overviews
Proc. SPIE 5717, Status of the MEMS industry, 0000 (22 January 2005); doi: 10.1117/12.594011
Proc. SPIE 5717, RF MEMS: status of the industry and roadmaps, 0000 (22 January 2005); doi: 10.1117/12.588234
RF and Acoustic Applications of MEMS
Proc. SPIE 5717, Compact and high-accuracy RF MEMS capacitive series devices, 0000 (22 January 2005); doi: 10.1117/12.591953
Proc. SPIE 5717, Benzocyclobutene (BCB)-based spiral inductor for wireless application, 0000 (22 January 2005); doi: 10.1117/12.583027
Proc. SPIE 5717, Frequency response of piezoresistive-based MASA resonators with electrostatic vertical comb-drive actuation, 0000 (22 January 2005); doi: 10.1117/12.590876
Optical Applications of MEMS
Proc. SPIE 5717, Optical MEMS: boom, bust, and beyond, 0000 (22 January 2005); doi: 10.1117/12.601839
Proc. SPIE 5717, Design and fabrication of micromirror for MOEMS devices by CMOS-MEMS common process, 0000 (22 January 2005); doi: 10.1117/12.589564
Proc. SPIE 5717, Design and fabrication of pitch-tunable blaze grating, 0000 (22 January 2005); doi: 10.1117/12.590020
Poster Session
Proc. SPIE 5717, Optical and electrodynamic analysis of a novel spatial light modulator, 0000 (22 January 2005); doi: 10.1117/12.590275
Optical Applications of MEMS
Proc. SPIE 5717, Large silicon micromirror modeling and fabrication, 0000 (22 January 2005); doi: 10.1117/12.590270
Proc. SPIE 5717, Novel Hadamard transform spectrometer realized using a dynamically driven micromirror array as a light modulator, 0000 (22 January 2005); doi: 10.1117/12.590335
Proc. SPIE 5717, Discrete microactuator of arbitrary positioning for linearization of VOA characteristic, 0000 (22 January 2005); doi: 10.1117/12.591204
Proc. SPIE 5717, Fabrication of out-of-plane refractive concave and convex microlens arrays, 0000 (22 January 2005); doi: 10.1117/12.601832
Industrial Applications of MEMS
Proc. SPIE 5717, Fabrication options and operation principle for single-crystal silicon vibratory ring gyroscope, 0000 (22 January 2005); doi: 10.1117/12.583593
Proc. SPIE 5717, Investigation of actuation behavior for microarray thermal actuator based upon electrical analysis, 0000 (22 January 2005); doi: 10.1117/12.589574
Proc. SPIE 5717, Fabrication of cantilever probes with integrated piezoresistive read-out and built-in piezoelectric actuators, 0000 (22 January 2005); doi: 10.1117/12.591024
Proc. SPIE 5717, UV-LIGA fabrication of microscale two-level mold inserts for MEMS applications, 0000 (22 January 2005); doi: 10.1117/12.592640
Proc. SPIE 5717, Latching shock sensors for health monitoring and quality control, 0000 (22 January 2005); doi: 10.1117/12.593348
Proc. SPIE 5717, Development of robust self-assembled microvalves for robust hydraulic actuators, 0000 (22 January 2005); doi: 10.1117/12.600773
Poster Session
Proc. SPIE 5717, Novel high-Q torsion microresonator, 0000 (22 January 2005); doi: 10.1117/12.590016
Proc. SPIE 5717, Compensation of model eye’s aberration by using deformable mirror, 0000 (22 January 2005); doi: 10.1117/12.589942
Proc. SPIE 5717, Design of a micropower generator, 0000 (22 January 2005); doi: 10.1117/12.591392
Proc. SPIE 5717, Electrostatic microrelays with adjustable parameters, 0000 (22 January 2005); doi: 10.1117/12.591441
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