PROCEEDINGS VOLUME 5719
MOEMS-MEMS MICRO AND NANOFABRICATION | 22-27 JANUARY 2005
MOEMS and Miniaturized Systems V
IN THIS VOLUME

0 Sessions, 18 Papers, 0 Presentations
MOEMS I  (4)
MOEMS II  (4)
MOEMS III  (2)
MOEMS IV  (2)
MOEMS V  (4)
MOEMS-MEMS MICRO AND NANOFABRICATION
22-27 January 2005
San Jose, California, United States
MOEMS I
Proc. SPIE 5719, Micromirrors: overview and application roadmap, 0000 (22 January 2005); doi: 10.1117/12.588975
Proc. SPIE 5719, Young's module control of the microcantilever made by micro-stereolithography, 0000 (22 January 2005); doi: 10.1117/12.589197
Proc. SPIE 5719, 1xN rotary vertical micromirror for optical switching applications, 0000 (22 January 2005); doi: 10.1117/12.589810
Proc. SPIE 5719, 2x2 bi-reflection optical add-drop module with variable attenuation using four 45-degree micromirrors, 0000 (22 January 2005); doi: 10.1117/12.591149
MOEMS II
Proc. SPIE 5719, Modeling of electrostatically actuated cylindrical-waveguide-based optical microsystem, 0000 (22 January 2005); doi: 10.1117/12.591368
Proc. SPIE 5719, PVDF-actuated cylindrical-waveguide-based optical attenuation, 0000 (22 January 2005); doi: 10.1117/12.591369
Proc. SPIE 5719, Active membrane in situ read-out by monolithic integration of silicon-based Mach-Zehnder interferometer, 0000 (22 January 2005); doi: 10.1117/12.592237
Proc. SPIE 5719, Performance improvements of MOEMS–based diffractive arrays: address isolation and optical switching, 0000 (22 January 2005); doi: 10.1117/12.591034
MOEMS III
Proc. SPIE 5719, Applications and requirements for MEMS scanner mirrors, 0000 (22 January 2005); doi: 10.1117/12.600076
Proc. SPIE 5719, A novel dual-detector micro-spectrometer, 0000 (22 January 2005); doi: 10.1117/12.592446
MOEMS IV
Proc. SPIE 5719, BSOI MOEMS, 0000 (22 January 2005); doi: 10.1117/12.600807
Proc. SPIE 5719, Miniature biochemical analytical system based on micro-spectrometer, 0000 (22 January 2005); doi: 10.1117/12.591340
MOEMS V
Proc. SPIE 5719, Testing of MEMS/MOEMS/MNT devices and systems, 0000 (22 January 2005); doi: 10.1117/12.598246
Proc. SPIE 5719, Robust control of electrostatic torsional micromirrors using adaptive sliding-mode control, 0000 (22 January 2005); doi: 10.1117/12.600083
Proc. SPIE 5719, Recent advances in electrostatic microactuators for mirror steering, 0000 (22 January 2005); doi: 10.1117/12.600087
Proc. SPIE 5719, High-resolution 3D OCT imaging with a MEMS scanning endoscope, 0000 (22 January 2005); doi: 10.1117/12.600089
Adaptive Optics: Joint Session with Conference 5721
Proc. SPIE 5719, Polymer-based micro-deformable mirror for adaptive optics applications, 0000 (22 January 2005); doi: 10.1117/12.592422
Proc. SPIE 5719, A membrane mirror with transparent electrode for adaptive optics, 0000 (22 January 2005); doi: 10.1117/12.593234
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