PROCEEDINGS VOLUME 5721
MOEMS-MEMS MICRO AND NANOFABRICATION | 22-27 JANUARY 2005
MOEMS Display and Imaging Systems III
IN THIS VOLUME

0 Sessions, 19 Papers, 0 Presentations
Scanners  (4)
MOEMS-MEMS MICRO AND NANOFABRICATION
22-27 January 2005
San Jose, California, United States
Scanners
Proc. SPIE 5721, Bi-axial magnetic drive for scanned beam display mirrors, 0000 (22 January 2005); doi: 10.1117/12.596942
Proc. SPIE 5721, Eye-type scanning mirror with dual vertical combs for laser display, 0000 (22 January 2005); doi: 10.1117/12.591276
Proc. SPIE 5721, A novel 24-kHz resonant scanner for high-resolution laser display, 0000 (22 January 2005); doi: 10.1117/12.590847
Proc. SPIE 5721, Micromechanical scanning mirrors with highly reflective NIR coatings for high-power applications, 0000 (22 January 2005); doi: 10.1117/12.590448
Microlithography
Proc. SPIE 5721, A high-end mask writer using a spatial light modulator, 0000 (22 January 2005); doi: 10.1117/12.590934
Proc. SPIE 5721, Maskless optical lithography using MEMS-based spatial light modulators, 0000 (22 January 2005); doi: 10.1117/12.593624
Proc. SPIE 5721, Mechanical stability of spatial light modulators in microlithography, 0000 (22 January 2005); doi: 10.1117/12.590082
Proc. SPIE 5721, Highly reflective coatings for micromechanical mirror arrays operating in the DUV and VUV spectral range, 0000 (22 January 2005); doi: 10.1117/12.590522
Bio-imaging I
Proc. SPIE 5721, MEMS-based endoscopic optical coherence tomography, 0000 (22 January 2005); doi: 10.1117/12.597616
Proc. SPIE 5721, Polyimide MEMS actuators for medical imaging, 0000 (22 January 2005); doi: 10.1117/12.593663
Proc. SPIE 5721, Micromachined capacitive transducer arrays for intravascular ultrasound, 0000 (22 January 2005); doi: 10.1117/12.596021
Proc. SPIE 5721, A microfabricated intravascular ultrasound scanner for intravascular interventions, 0000 (22 January 2005); doi: 10.1117/12.597160
Bio-imaging II
Proc. SPIE 5721, A miniature confocal optical scanning microscope for endoscopes, 0000 (22 January 2005); doi: 10.1117/12.597342
Proc. SPIE 5721, High-resolution microelectromechanical scanners for miniaturized dual-axes confocal microscopes, 0000 (22 January 2005); doi: 10.1117/12.597331
Membrane Devices
Proc. SPIE 5721, Performance of uncooled microcantilever thermal detectors, 0000 (22 January 2005); doi: 10.1117/12.590823
Proc. SPIE 5721, Actively controlled diffraction grating interferometer MEMS devices, 0000 (22 January 2005); doi: 10.1117/12.592215
Adaptive Optics: Joint Session with Conference 5719
Proc. SPIE 5721, Integrated deformable mirror on silicon for optical data storage, 0000 (22 January 2005); doi: 10.1117/12.589123
Proc. SPIE 5721, Fluid-actuated variable focal length polymer microlens system, 0000 (22 January 2005); doi: 10.1117/12.591194
Poster Session
Proc. SPIE 5721, Micromirror array theory for imaging sensors, 0000 (22 January 2005); doi: 10.1117/12.590327
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