Proceedings Volume 5858 is from: Logo
OPTICAL METROLOGY
13-17 June 2005
Munich, Germany
Optical Characterisation of Micro- and Nano-Optical Components
Proc. SPIE 5858, Micro-optic measurement techniques and instrumentation in the European Network of Excellence for Micro-Optics (NEMO), 585801 (29 August 2005); doi: 10.1117/12.622751
Proc. SPIE 5858, International standards for metrology of microlens arrays, 585802 (27 August 2005); doi: 10.1117/12.612827
Proc. SPIE 5858, Real-time in situ sag characterization of microlenses fabricated with Deep Lithography with Protons, 585803 (27 August 2005); doi: 10.1117/12.612579
Proc. SPIE 5858, Interferometric method for measuring the refractive index profile of optical waveguides directly written in glass substrates by femtosecond laser, 585804 (27 August 2005); doi: 10.1117/12.612889
Proc. SPIE 5858, Application of the microinterferometric tomography setup to the reliability tests of the fiber sensors exposed to cumulated gamma radiation, 585805 (29 August 2005); doi: 10.1117/12.612932
Optical and Interferometric Microscopy
Proc. SPIE 5858, High accuracy optoelectronic control system for near field characterization of millimeter long wave guiding structures, 585806 (27 August 2005); doi: 10.1117/12.611900
Proc. SPIE 5858, Mapping of surface refractive-index distribution by reflection SNOM, 585807 (29 August 2005); doi: 10.1117/12.612554
Proc. SPIE 5858, Compact laser scanning confocal microscope, 585808 (27 August 2005); doi: 10.1117/12.611819
Proc. SPIE 5858, Comparison of different approaches for modelling microscope images on the basis of rigorous diffraction calculation, 585809 (29 August 2005); doi: 10.1117/12.612632
Proc. SPIE 5858, Two-dimensional power spectral density measurements of x-ray optics with the Micromap interferometric microscope, 58580A (29 August 2005); doi: 10.1117/12.612383
Proc. SPIE 5858, Automated fringe-pattern extrapolation for patterned surface profiling by interference microscopy with Fourier transform analysis, 58580B (29 August 2005); doi: 10.1117/12.612270
Scatterometry, Ellipsometry, and Polarimetry
Proc. SPIE 5858, Influence of the real-life structures in optical metrology using spectroscopic scatterometry analysis, 58580C (27 August 2005); doi: 10.1117/12.612081
Proc. SPIE 5858, Determination of the optical properties of thin absorbing layers with spectroscopic ellipsometry and interferometric microscopy, 58580F (29 August 2005); doi: 10.1117/12.612629
Proc. SPIE 5858, Polarimetry: measurements, error analysis, and application, 58580H (27 August 2005); doi: 10.1117/12.612648
Principles and Applications of Optical Tomography
Proc. SPIE 5858, Optical coherence tomography with a Fizeau interferometer configuration, 58580I (29 August 2005); doi: 10.1117/12.612737
Proc. SPIE 5858, Full-field optical coherence tomography, 58580J (27 August 2005); doi: 10.1117/12.612566
Proc. SPIE 5858, Optimisation of low-coherence speckle interferometry (LCSI) for characterisation of multi-layered materials, 58580K (27 August 2005); doi: 10.1117/12.613170
Optical Interferometry I
Proc. SPIE 5858, Portable interference device for roughness measurement, 58580L (27 August 2005); doi: 10.1117/12.612533
Proc. SPIE 5858, Sub-0.1µm optical track width measurement, 58580M (29 August 2005); doi: 10.1117/12.611999
Proc. SPIE 5858, Absolute distance measurement using femtosecond laser, 58580N (27 August 2005); doi: 10.1117/12.612238
Proc. SPIE 5858, Testing a new method for small-angle rotation measurements, 58580O (27 August 2005); doi: 10.1117/12.612252
Optical Interferometry II
Proc. SPIE 5858, Measurement advances for micro-refractive fabrication, 58580P (27 August 2005); doi: 10.1117/12.622753
Proc. SPIE 5858, Investigation of thermal expansion homogeneity by optical interferometry, 58580Q (27 August 2005); doi: 10.1117/12.612582
Proc. SPIE 5858, Characterization and engineering of ferroelectric microstructures by interferometric methods, 58580R (27 August 2005); doi: 10.1117/12.613016
Poster Session
Proc. SPIE 5858, Displacement metrology based on grating imaging with a cylindrical lens array and a phase grating, 58580T (27 August 2005); doi: 10.1117/12.612088
Proc. SPIE 5858, High accuracy reflectometry technique and statistical measurements treatment method for refraction index determination, 58580U (27 August 2005); doi: 10.1117/12.612116
Proc. SPIE 5858, Two methods to determine topological charge in regular net of optical vortices, 58580V (27 August 2005); doi: 10.1117/12.612251
Proc. SPIE 5858, Optimum instrumentation of a tapping mode, non-optically regulated near-field scanning optical microscope and its applications, 58580W (27 August 2005); doi: 10.1117/12.612255
Proc. SPIE 5858, Elimination of ‘ghost’-effect-related systematic errors in metrology of x-ray optics with a long trace profiler, 58580X (27 August 2005); doi: 10.1117/12.612386
Proc. SPIE 5858, Airy-like internal reflection series applied in scatterometry and simulations of gratings, 58580Y (27 August 2005); doi: 10.1117/12.612496
Proc. SPIE 5858, Comparison of methods for the determination of the aperture correction of interference microscopes, 585810 (27 August 2005); doi: 10.1117/12.612594
Proc. SPIE 5858, Biological specimens analysis using dynamic speckle spectral bands, 585811 (27 August 2005); doi: 10.1117/12.612606
Proc. SPIE 5858, Investigation and evaluation of scatterometric CD metrology methods, 585813 (27 August 2005); doi: 10.1117/12.612610
Proc. SPIE 5858, Analytical model of a double grating system with partial temporal and spatial coherence, 585814 (27 August 2005); doi: 10.1117/12.612621
Proc. SPIE 5858, Non-destructive optical system based on digital holographic microscope for quasi real-time characterization of micromechanical shunt switch, 585815 (27 August 2005); doi: 10.1117/12.612746
Proc. SPIE 5858, Uncertainty analysis for phase measurement on PSM with a 193nm common-path shearing interferometer, 585816 (27 August 2005); doi: 10.1117/12.612749
Proc. SPIE 5858, Effect of the refraction index in the diameter estimation of thin metallic wires, 585819 (27 August 2005); doi: 10.1117/12.612652
Proc. SPIE 5858, Development and test of a profilometer based on a low-cost white-light bench microscope with a linear sensor, 58581A (27 August 2005); doi: 10.1117/12.637258
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