PROCEEDINGS VOLUME 5963
OPTICAL SYSTEMS DESIGN 2005 | 12-16 SEPTEMBER 2005
Advances in Optical Thin Films II
Proceedings Volume 5963 is from: Logo
OPTICAL SYSTEMS DESIGN 2005
12-16 September 2005
Jena, Germany
Invited Session
Proc. SPIE 5963, Milestones in optical coating technology-from A. Smakula/John Strong until today, 596301 (1 October 2005); doi: 10.1117/12.625235
Proc. SPIE 5963, Antireflection coatings: key optical components, 596303 (5 October 2005); doi: 10.1117/12.626147
Design
Proc. SPIE 5963, New optimization algorithm for the synthesis of rugate optical coatings, 596304 (5 October 2005); doi: 10.1117/12.625072
Proc. SPIE 5963, Colorimetry in optical coating, 596305 (5 October 2005); doi: 10.1117/12.624782
Proc. SPIE 5963, Fourier Transform estimation of reflecting thin film thickness, 596306 (5 October 2005); doi: 10.1117/12.626713
Proc. SPIE 5963, Thin-film coatings and transmission-polarization-devices: negative system, 596307 (5 October 2005); doi: 10.1117/12.627426
Filters
Proc. SPIE 5963, Laser trimming of thin-film filters, 596308 (5 October 2005); doi: 10.1117/12.625149
Proc. SPIE 5963, Optical coatings for artwork preservation and enhanced viewing, 596309 (5 October 2005); doi: 10.1117/12.624644
Proc. SPIE 5963, Steep-edge filter design with equivalent layers, 59630A (5 October 2005); doi: 10.1117/12.624112
Proc. SPIE 5963, Manufacturing of linear variable filters with straight iso-thickness lines, 59630B (5 October 2005); doi: 10.1117/12.624779
Proc. SPIE 5963, Studies on superprism effects in multilayer thin film stacks, 59630C (5 October 2005); doi: 10.1117/12.625018
Monitoring
Proc. SPIE 5963, Substantial progress in optical monitoring by intermittent measurement technique, 59630D (6 October 2005); doi: 10.1117/12.624865
Proc. SPIE 5963, Real-time lateral optical monitoring for the production of complex multilayer stacks, 59630E (5 October 2005); doi: 10.1117/12.625110
Proc. SPIE 5963, Re-engineering of inhomogeneous coatings based on in-situ optical broadband monitoring data, 59630F (5 October 2005); doi: 10.1117/12.624818
Proc. SPIE 5963, Plasma monitoring of the RLVIP-process with a Langmuir probe, 59630G (5 October 2005); doi: 10.1117/12.624856
Proc. SPIE 5963, Ion source characterization based on an array of retarding field analyzers, 59630H (5 October 2005); doi: 10.1117/12.625215
DUV/VUV Coatings I
Proc. SPIE 5963, IBS deposition of dense fluoride coatings for the vacuum ultraviolet free electron laser, 59630I (5 October 2005); doi: 10.1117/12.625387
Proc. SPIE 5963, Performance data of a variable transmission phase shifting mask blank for 193nm lithography enhanced by inspection contrast tuning, 59630J (5 October 2005); doi: 10.1117/12.625210
Proc. SPIE 5963, Influence of the amorphous character of Al2O3 layers on their use in the deep UV spectral range, 59630K (5 October 2005); doi: 10.1117/12.625203
Proc. SPIE 5963, Oxide and fluoride coatings for the excimer wavelength 193nm, 59630L (5 October 2005); doi: 10.1117/12.625152
Proc. SPIE 5963, Aluminum-enhanced optical coatings for the VUV spectral range, 59630M (5 October 2005); doi: 10.1117/12.625133
DUV/VUV Coatings II
Proc. SPIE 5963, Lanthanide tri-fluorides: a survey of the optical, mechanical and structural properties of thin films with emphasis of their use in the DUV– VUV–spectral range, 59630N (5 October 2005); doi: 10.1117/12.625100
Proc. SPIE 5963, Optical, structural, and mechanical properties of gadolinium tri-fluoride thin films grown on amorphous substrates, 59630O (5 October 2005); doi: 10.1117/12.625096
Proc. SPIE 5963, Absorption and fluorescence measurements of DUV/VUV coatings, 59630P (5 October 2005); doi: 10.1117/12.625079
Proc. SPIE 5963, Nanostructure and optical properties of fluoride films for high-quality DUV/VUV optical components, 59630R (5 October 2005); doi: 10.1117/12.624499
XUV Coatings
Proc. SPIE 5963, Multilayers for the EUV and soft X-ray region, 59630S (5 October 2005); doi: 10.1117/12.624988
Proc. SPIE 5963, Interface-engineered multilayer mirrors, 59630U (5 October 2005); doi: 10.1117/12.624861
Proc. SPIE 5963, X-UV chirped mirror fabrication for phase control of attosecond pulses, 59630W (5 October 2005); doi: 10.1117/12.625097
Proc. SPIE 5963, Performances and stability of Sc/Si multilayers with barrier layers for wavelengths around 46 nm, 59630X (5 October 2005); doi: 10.1117/12.625030
Radiation Resistant Coatings
Proc. SPIE 5963, Engineering meter-scale laser resistant coatings for the near IR, 59630Y (6 October 2005); doi: 10.1117/12.625422
Proc. SPIE 5963, Comparative study of IR and UV laser damage resistance of silica thin films deposited by Electron Beam deposition, Ion Plating, Ion Assisted Deposition and Dual Ion Beam Sputtering, 59630Z (5 October 2005); doi: 10.1117/12.624643
Proc. SPIE 5963, LIDT improvement of multilayer coatings by accurate analysis of fabrication steps, 596311 (5 October 2005); doi: 10.1117/12.625186
Proc. SPIE 5963, Laser thin films with very high damage threshold, 596312 (5 October 2005); doi: 10.1117/12.625028
Manufacturing I
Proc. SPIE 5963, Ion beam sputter coatings for laser technology, 596313 (5 October 2005); doi: 10.1117/12.624772
Proc. SPIE 5963, Highly reflective thin film coatings for high power applications of micro scanning mirrors in the NIR-VIS-UV spectral region, 596314 (5 October 2005); doi: 10.1117/12.625246
Proc. SPIE 5963, Temperature dependence of the optical properties of mixed oxide thin films deposited by reactive magnetron sputtering, 596315 (5 October 2005); doi: 10.1117/12.625069
Manufacturing II
Proc. SPIE 5963, Correlation between the optical performance of TiO2-Ag-TiO2 multilayers and the interface roughness between the layers, 596317 (5 October 2005); doi: 10.1117/12.625193
Proc. SPIE 5963, High-rate deposition of optical coatings by closed-field magnetron sputtering, 596318 (5 October 2005); doi: 10.1117/12.624774
Proc. SPIE 5963, Innovative production of thin film laser components, 596319 (5 October 2005); doi: 10.1117/12.625226
Proc. SPIE 5963, Thorium-free interference coatings for infrared applications, 59631A (5 October 2005); doi: 10.1117/12.625146
Proc. SPIE 5963, Precision optical and antireflection multilayer and gradient coatings containing reactively sputtered oxides, nitrides and fluorides, 59631B (5 October 2005); doi: 10.1117/12.624633
Manufacturing III
Proc. SPIE 5963, Organically modified SiO2 coatings on polycarbonate, 59631C (5 October 2005); doi: 10.1117/12.621089
Proc. SPIE 5963, Design of hybrid coatings composed of homogeneous layers and refractive index gradients, 59631D (5 October 2005); doi: 10.1117/12.624348
Proc. SPIE 5963, Gravure printing of transparent conducting ITO coatings for display applications, 59631E (5 October 2005); doi: 10.1117/12.625208
Proc. SPIE 5963, Optical and mechanical properties of thin RLVIP Nb2O5-films, 59631F (5 October 2005); doi: 10.1117/12.624851
Proc. SPIE 5963, Chemical vapour deposition of optical coatings onto small scale complex optical components, 59631G (5 October 2005); doi: 10.1117/12.625178
Poster Session
Proc. SPIE 5963, Comparison of optical resistance of ion assisted deposition and standard electron beam deposition methods for high reflectance dielectric coatings, 59631H (5 October 2005); doi: 10.1117/12.619987
Proc. SPIE 5963, Multiple pulse laser-induced damage of antireflection coated lithium triborate, 59631I (5 October 2005); doi: 10.1117/12.619991
Proc. SPIE 5963, Optical sensitivity of thin films to hydrocarbons and ozone, 59631K (5 October 2005); doi: 10.1117/12.622221
Proc. SPIE 5963, Growth and thermal stability of interfaces in ion beam sputtered Mo/Si mirrors, 59631L (5 October 2005); doi: 10.1117/12.624342
Proc. SPIE 5963, Zr–silicate co-evaporated thin films, 59631M (5 October 2005); doi: 10.1117/12.624488
Proc. SPIE 5963, Properties of chirped mirrors manufactured by plasma ion assisted electron beam evaporation, 59631N (5 October 2005); doi: 10.1117/12.624603
Proc. SPIE 5963, Comparison of gradient index and classical designs of a narrow band notch filter, 59631O (5 October 2005); doi: 10.1117/12.624640
Proc. SPIE 5963, Synthesis and manufacturing the mirrors for ultrafast optics, 59631P (5 October 2005); doi: 10.1117/12.624771
Proc. SPIE 5963, Optical thin films deposition by MDECR-PECVD, 59631Q (5 October 2005); doi: 10.1117/12.624825
Proc. SPIE 5963, Ageing of optical components under laser irradiation at 532nm, 59631R (5 October 2005); doi: 10.1117/12.624828
Proc. SPIE 5963, Determination of complex optical indices in the 80-140nm VUV wavelength region from reflectivity measurements under normal incidence: application to ZnSe, 59631S (5 October 2005); doi: 10.1117/12.624848