PROCEEDINGS VOLUME 6002
OPTICS EAST 2005 | 23-26 OCTOBER 2005
Nanofabrication: Technologies, Devices, and Applications II
OPTICS EAST 2005
23-26 October 2005
Boston, MA, United States
Nano-Bio-Application
Proc. SPIE 6002, E-beam-patterned hydrogels to control nanoscale surface bioactivity, 600201 (11 November 2005); doi: 10.1117/12.631709
Nano-Photonics and Optical Devices I
Proc. SPIE 6002, Gap effects on whispering-gallery mode microresonances, 600204 (11 November 2005); doi: 10.1117/12.628867
Proc. SPIE 6002, Left-handed high energy density waveguides: nano-light propagation and focusing, 600205 (15 November 2005); doi: 10.1117/12.630023
Proc. SPIE 6002, The development of surface-plasmon-based sensors using arrays of sub-wavelength holes, 600207 (15 November 2005); doi: 10.1117/12.630995
Nano-Lithography I: Top Down Approach
Proc. SPIE 6002, Enabling nanoscale science and engineering via highly flexible low-cost maskless lithography, 60020B (15 November 2005); doi: 10.1117/12.632117
Nano-Material Growth and Deposition
Proc. SPIE 6002, Epitaxial and endotaxial semiconductor quantum dots: atomic order, morphological transformations, and structural transitions, 60020F (24 November 2005); doi: 10.1117/12.634870
Proc. SPIE 6002, Photoluminescence properties of Er-doped Y<sub>2</sub>O<sub>3</sub> thin films by radical-enhanced atomic layer deposition, 60020H (23 November 2005); doi: 10.1117/12.634531
Nano-Electronics Device Integration I
Proc. SPIE 6002, Single nanoparticle semiconductor devices, 60020I (23 November 2005); doi: 10.1117/12.630852
Proc. SPIE 6002, ALD as enabling technology for the next generation of microprocessors, 60020J (17 November 2005); doi: 10.1117/12.634884
Proc. SPIE 6002, Self-assembling formation of Si-based quantum dots and control of their electric charged states for multi-valued memories, 60020K (23 November 2005); doi: 10.1117/12.632483
Nano-Electronics Device Integration II
Proc. SPIE 6002, Self-assembled porous silica/Cu damascene interconnects for 45nm node and beyond, 60020M (17 November 2005); doi: 10.1117/12.632119
Proc. SPIE 6002, Fabrication of mesoporous silica for ultra-low-k interlayer dielectrics, 60020N (17 November 2005); doi: 10.1117/12.633597
Proc. SPIE 6002, Process control and material properties of thin electroless Co-based capping layers for copper interconnects, 60020O (23 November 2005); doi: 10.1117/12.632504
Nano-Lithography II: Top Down Approach
Proc. SPIE 6002, Nanoimprint lithography: review of aspects and applications, 60020R (23 November 2005); doi: 10.1117/12.631046
Nano-Metrology
Proc. SPIE 6002, Atomic force microscopy at the 100-nm scale: practical, theoretical, and metrological outlook, 60020S (23 November 2005); doi: 10.1117/12.637486
Proc. SPIE 6002, New routes for imaging the optical near-fields of plasmonic nanostructures, 60020T (11 November 2005); doi: 10.1117/12.630715
Proc. SPIE 6002, The shear-force/ultrasonic microscope: a nanometrology tool for surface science and technology, 60020U (17 November 2005); doi: 10.1117/12.631898
Proc. SPIE 6002, Theoretical study of nonlocal effects in the optical response of metallic nanoshells, 60020V (18 November 2005); doi: 10.1117/12.629076
Nano-Fabrication: Bottom Up Approach
Proc. SPIE 6002, Nanomaterials fabrication and physics, 60020Y (23 November 2005); doi: 10.1117/12.631158
Proc. SPIE 6002, Fabrication and primary photoevents in self-assembled nanocomposites based on semiconductor quantum dots and tetrapyrrole chromophores, 60020Z (23 November 2005); doi: 10.1117/12.631440
Nano-Photonics and Optical Devices II
Proc. SPIE 6002, Kinoform lenses: toward nanometer resolution, 600210 (15 November 2005); doi: 10.1117/12.631188
Proc. SPIE 6002, Generation and manipulation of multi-cycle terahertz pulses via optical rectification in poled lithium niobate, 600211 (24 November 2005); doi: 10.1117/12.630019
Proc. SPIE 6002, 2D photonic crystals fabricated in wide bandgap nanocrystalline diamond, 600213 (11 November 2005); doi: 10.1117/12.631871
Poster Session
Proc. SPIE 6002, High resolution angular measurement using surface-plasmon-resonance heterodyne interferometry at optimal incident wavelengths, 600218 (11 November 2005); doi: 10.1117/12.630594
Proc. SPIE 6002, Reactive ion etching of motheye and photonic crystal silicon nanostructures using CBrF<sub>3</sub>, 600219 (11 November 2005); doi: 10.1117/12.631025
Proc. SPIE 6002, Investigation of C<sub>60</sub> films for surface finishing applications, 60021A (24 November 2005); doi: 10.1117/12.631051
Proc. SPIE 6002, Preparation of ZnO films in sol-gel method using novel monomers, 60021B (17 November 2005); doi: 10.1117/12.631055
Proc. SPIE 6002, Focus image feedback-controlled 3D laser microstructuring, 60021C (23 November 2005); doi: 10.1117/12.631116
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