PROCEEDINGS VOLUME 6032
ICO20:OPTICAL DEVICES AND INSTRUMENTS | 21-26 AUGUST 2005
ICO20: MEMS, MOEMS, and NEMS
IN THIS VOLUME

0 Sessions, 30 Papers, 0 Presentations
ICO20:OPTICAL DEVICES AND INSTRUMENTS
21-26 August 2005
Changchun, China
MEMS, MOEMS, and NEMS
Proc. SPIE 6032, Photonics-to-electronics integration for optical interconnects in the early 21<sup>st</sup> century, 603201 (7 February 2006); doi: 10.1117/12.667843
Proc. SPIE 6032, Nano self-assembly for MEMS and microelectronics applications, 603202 (7 February 2006); doi: 10.1117/12.667845
Proc. SPIE 6032, Packaged MEMS and MOEMS measurement using through-transmissive-media (TTM) profiler, 603203 (7 February 2006); doi: 10.1117/12.667846
Proc. SPIE 6032, Tunable guided mode resonant gratings for passive and active devices: Si subwavelength MEMS structures and the combination with GaN film, 603204 (7 February 2006); doi: 10.1117/12.667847
Proc. SPIE 6032, Monolithic PZT microstage wth multidegrees of freedom for high-precision positioning, 603205 (7 February 2006); doi: 10.1117/12.667849
Proc. SPIE 6032, High temperature sealing of Kovar-glass-silicon for power MEMS application, 603206 (7 February 2006); doi: 10.1117/12.667850
Proc. SPIE 6032, MEMS-based thin palladium membrane microreactors, 603207 (7 February 2006); doi: 10.1117/12.667851
Proc. SPIE 6032, Parameters analysis of few-modes optical fiber evanescent absorption sensor, 603208 (7 February 2006); doi: 10.1117/12.667852
Proc. SPIE 6032, Design research of nanopositioner based on SPM and its simulation of FEM, 603209 (7 February 2006); doi: 10.1117/12.667854
Proc. SPIE 6032, Novel temperature sensor based on Fabry-Perot cavity structure and micro-mechanical bi-layered membranes, 60320A (7 February 2006); doi: 10.1117/12.667855
Proc. SPIE 6032, Research on micro/nano film getters for vacuum maintenance of MEMS, 60320B (7 February 2006); doi: 10.1117/12.667858
Proc. SPIE 6032, Process simulation of Kovar-glass-silicon bonding for micromachined combustor, 60320C (7 February 2006); doi: 10.1117/12.667859
Proc. SPIE 6032, Fabrication of optical waveguide multilayer storage devices, 60320D (7 February 2006); doi: 10.1117/12.667860
Proc. SPIE 6032, Light-induced waveguide arrays in photorefractive crystals, 60320E (7 February 2006); doi: 10.1117/12.667861
Proc. SPIE 6032, Negative chemical amplification process simulation in integrated circuits and microelectromechanical systems fabrication, 60320F (7 February 2006); doi: 10.1117/12.667862
Proc. SPIE 6032, An ICP etch model based on time multiplexed deep etching, 60320G (7 February 2006); doi: 10.1117/12.667865
Proc. SPIE 6032, Study of lag effect in LPHD plasma etching of Si for MEMS applications by variable time steps in numerical methods, 60320H (7 February 2006); doi: 10.1117/12.667866
Proc. SPIE 6032, System-level modeling of segmented deformable micromirror using multi-port-element network method, 60320I (7 February 2006); doi: 10.1117/12.667867
Proc. SPIE 6032, Theory and simulation of MEMS deformable mirror, 60320J (7 February 2006); doi: 10.1117/12.667868
Proc. SPIE 6032, Refractive microlensarray made of silver-halide sensitized gelatin (SHSG) etched by enzyme with SLM-based lithography, 60320K (7 February 2006); doi: 10.1117/12.667869
Proc. SPIE 6032, Measurement of residual stress in multilayered thin films by a full-field optical method, 60320L (7 February 2006); doi: 10.1117/12.667870
Proc. SPIE 6032, Study of micro-actuator with electrostatic actuating, 60320M (7 February 2006); doi: 10.1117/12.667871
Proc. SPIE 6032, Measuring the profile and out-of-plane motion of microstructures using microscopic interferometry with FTM analysis, 60320N (7 February 2006); doi: 10.1117/12.667872
Proc. SPIE 6032, The packaging technology of optical switch arrays, 60320O (7 February 2006); doi: 10.1117/12.667874
Proc. SPIE 6032, The deflection and frequency analysis of micro silicon cantilever beam actuated by electrostatic force, 60320P (7 February 2006); doi: 10.1117/12.667875
Proc. SPIE 6032, A study on high isolation RF MEMS switch, 60320Q (7 February 2006); doi: 10.1117/12.667883
Proc. SPIE 6032, On the architecture of the micro machine vision system, 60320R (7 February 2006); doi: 10.1117/12.667884
Proc. SPIE 6032, Electromechanical characteristics analysis and simulation of grating light modulator, 60320S (7 February 2006); doi: 10.1117/12.667885
Proc. SPIE 6032, Analysis of the throughput of onboard polarization interference imaging spectrometer, 60320T (7 February 2006); doi: 10.1117/12.667886
Proc. SPIE 6032, The study on the epoxy resin compound x-ray refractive lens, 60320U (7 February 2006); doi: 10.1117/12.667887
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