PROCEEDINGS VOLUME 6037
MICROELECTRONICS, MEMS, AND NANOTECHNOLOGY | 11-14 DECEMBER 2005
Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
IN THIS VOLUME

0 Sessions, 62 Papers, 0 Presentations
Optics  (4)
Materials  (2)
Devices I  (3)
Devices II  (2)
Proceedings Volume 6037 is from: Logo
MICROELECTRONICS, MEMS, AND NANOTECHNOLOGY
11-14 December 2005
Brisbane, Australia
Fabrication Techniques I
Proc. SPIE 6037, Process optimisation for compact high aspect ratio SU-8 microstructures using x-ray lithography, 603701 (21 December 2005); doi: 10.1117/12.638457
Proc. SPIE 6037, Ion beam synthesis of WC-SiC nanocomposite thin layers and their electron field emission properties, 603702 (21 December 2005); doi: 10.1117/12.638686
Proc. SPIE 6037, Non-contact implant dose and energy metrology for advanced CMOS low-energy implants, 603703 (29 December 2005); doi: 10.1117/12.639875
Proc. SPIE 6037, Microchannel fabrication in PMMA based on localized heating using high-repetition rate femtosecond pulses, 603704 (29 December 2005); doi: 10.1117/12.638336
Proc. SPIE 6037, μ-Device fabrication and packaging below 300°C utilizing plasma-assisted wafer-to-wafer bonding, 603705 (29 December 2005); doi: 10.1117/12.638577
Optics
Proc. SPIE 6037, Deep-UV LEDs: physics, performance, and applications, 603706 (29 December 2005); doi: 10.1117/12.638266
Proc. SPIE 6037, Effects of dielectric overcoating on the absorption enhancement of SOI LEDs with metal island films, 603707 (29 December 2005); doi: 10.1117/12.638456
Proc. SPIE 6037, Enhancement of scattering and light-extraction by metal particles on silicon waveguides, 603708 (29 December 2005); doi: 10.1117/12.638391
Proc. SPIE 6037, Polymer microlens with independent control of radius and focal length for an imaging fiber, 603709 (29 December 2005); doi: 10.1117/12.639016
Fabrication Techniques II
Proc. SPIE 6037, Characterization of deep wet etching of glass, 60370A (29 December 2005); doi: 10.1117/12.638521
Proc. SPIE 6037, In-situ optical monitoring of silicon membrane etching, 60370B (29 December 2005); doi: 10.1117/12.638894
Proc. SPIE 6037, Anomalous backward scattering of light by a two-side-open subwavelength metallic slit, 60370C (29 December 2005); doi: 10.1117/12.638513
Proc. SPIE 6037, Preparation of photo functional material, 60370D (31 December 2005); doi: 10.1117/12.639019
Materials
Proc. SPIE 6037, Microstructures and photocatalytic properties of nitrogen-implanted titania nanostructured films, 60370F (29 December 2005); doi: 10.1117/12.638195
Proc. SPIE 6037, Preparation of DNA-polymer microsphere and its optical property, 60370H (31 December 2005); doi: 10.1117/12.638938
Devices I
Proc. SPIE 6037, Portable blood extraction device integrated with biomedical monitoring system, 60370J (29 December 2005); doi: 10.1117/12.638589
Proc. SPIE 6037, Development of micro motion sensors based on piezoresistive and thermo-resistive effects in silicon, 60370K (29 December 2005); doi: 10.1117/12.638380
Proc. SPIE 6037, Optical applications of marine DNA, 60370L (5 January 2006); doi: 10.1117/12.639018
Devices II
Proc. SPIE 6037, Design and implementation issues for ceramic substrate micro RF relay switches for re-configurable antennas, 60370M (29 December 2005); doi: 10.1117/12.637743
Proc. SPIE 6037, Antennas miniaturization by means of optimized EBG materials, 60370O (29 December 2005); doi: 10.1117/12.638584
Characterisation
Proc. SPIE 6037, Concept design of a novel tactile probe tip for down scaled 3D CMMs, 60370Q (29 December 2005); doi: 10.1117/12.638223
Proc. SPIE 6037, Thermal and mechanical responses of the thermomechanical microprobe for high-density storage technology, 60370R (29 December 2005); doi: 10.1117/12.638562
Proc. SPIE 6037, Capacitance-voltage measurement in memory devices using ferroelectric polymer, 60370S (29 December 2005); doi: 10.1117/12.638284
Materials and Characterisation
Proc. SPIE 6037, Conductivity of self-organized silicon quantum dots embedded in silicon dioxide, 60370T (29 December 2005); doi: 10.1117/12.638399
Proc. SPIE 6037, Nanofabrication of single-crystalline flat-panel display microemitters: a plasma-building unit approach, 60370U (29 December 2005); doi: 10.1117/12.638235
Proc. SPIE 6037, Formation of thick spin-on glass (SOG) sacrificial layer for capacitive accelerometer encapsulation, 60370V (29 December 2005); doi: 10.1117/12.638570
Proc. SPIE 6037, Improving the sensitivity of biosensor by use of the Ag and SiO<sub>2</sub> films, 60370W (29 December 2005); doi: 10.1117/12.637735
Nanotechnology
Proc. SPIE 6037, Nano-explosions in porous silicon, 60370X (29 December 2005); doi: 10.1117/12.637967
Proc. SPIE 6037, Characterisation of nano-crystalline titanium dioxide films grown by atmospheric pressure plasma electrolytic deposition, 60370Y (29 December 2005); doi: 10.1117/12.637950
Proc. SPIE 6037, Influence of dispersed carbon nanotubes on the optical and structural properties of a conjugated polymer, 60370Z (29 December 2005); doi: 10.1117/12.638671
Proc. SPIE 6037, Nanosieves fabricated by interference lithography and electroforming, 603710 (29 December 2005); doi: 10.1117/12.637935
Poster Session
Proc. SPIE 6037, A new empirical model for heterojunction phototransistors, 603711 (31 December 2005); doi: 10.1117/12.638694
Proc. SPIE 6037, Effect of a buffer layer on the photovoltaic properties of AZO/Cu<sub>2</sub>O solar cells, 603712 (4 January 2006); doi: 10.1117/12.638649
Proc. SPIE 6037, Coating materials and particle size effect of nano- and micro-sized iron powder composites, 603713 (31 December 2005); doi: 10.1117/12.638573
Proc. SPIE 6037, Evaluation of flexible Bi<sub>2</sub>Te<sub>2.5</sub>Se<sub>0.5</sub> and Bi<sub>0.5</sub>Sb<sub>1.5</sub>Te<sub>3</sub> thermopile generator, 603714 (31 December 2005); doi: 10.1117/12.638537
Proc. SPIE 6037, Tuning the sensing range of silicon pressure sensor by trench etching technology, 603715 (31 December 2005); doi: 10.1117/12.638727
Proc. SPIE 6037, Preparation of cyanine complex microdomes in self-organized dewetted films, 603716 (4 January 2006); doi: 10.1117/12.638474
Proc. SPIE 6037, Development of fabrication process for shape-control of three-dimensional submicron structure by synchrotron radiation lithography, 603717 (4 January 2006); doi: 10.1117/12.638569
Proc. SPIE 6037, Micropatterning research of silicon-based ferroelectric PMNT thin films, 603718 (4 January 2006); doi: 10.1117/12.638531
Proc. SPIE 6037, Carbon-nanotube-based nanoelectromechanical switch, 603719 (4 January 2006); doi: 10.1117/12.638440
Proc. SPIE 6037, MEMS mechanical logic units: characterization and improvements of devices fabricated with MicraGEM and PolyMUMPs, 60371A (30 January 2006); doi: 10.1117/12.638261
Proc. SPIE 6037, Patterning frictional differentiation to a polymer surface by atomic force microscopy, 60371B (30 December 2005); doi: 10.1117/12.638345
Proc. SPIE 6037, Lithography of diamond-like-carbon (DLC) films for use as masters in soft lithography, 60371C (4 January 2006); doi: 10.1117/12.638361
Proc. SPIE 6037, Tunable natural nano-arrays: controlling surface properties and light reflectance, 60371D (30 December 2005); doi: 10.1117/12.638366
Proc. SPIE 6037, Nitridation of thin metal layers by plasma immersion ion implantation for diffusion barrier applications, 60371E (4 January 2006); doi: 10.1117/12.638332
Proc. SPIE 6037, Nanoparticle manipulation in plasma-assisted nanofabrication of electron field emitters based on single crystalline carbon nanotip patterns, 60371G (4 January 2006); doi: 10.1117/12.638236
Proc. SPIE 6037, Nanostripes in superconducting REBa<sub>2</sub>Cu<sub>3</sub>O<sub>7</sub><sub>-&#948;</sub> superconductors: robust vortex pinning sites, 60371H (4 January 2006); doi: 10.1117/12.638196
Proc. SPIE 6037, I-V response of a two-terminal nanodevice using tight-binding theory, 60371I (30 December 2005); doi: 10.1117/12.638151
Proc. SPIE 6037, Advanced simulation for shape-prediction of microstructures fabricated by PCT technique, 60371J (4 January 2006); doi: 10.1117/12.638522
Proc. SPIE 6037, Electrical and optical properties of VO<sub>2</sub> thin films affected by preparation process, 60371K (4 January 2006); doi: 10.1117/12.638378
Proc. SPIE 6037, Nitrogen ion implantation and characterization of tungsten oxide films, 60371L (4 January 2006); doi: 10.1117/12.640054
Proc. SPIE 6037, Dynamic analysis of a compliant bistable micromechanism with one DOF system, 60371N (4 January 2006); doi: 10.1117/12.638351
Proc. SPIE 6037, Modelling of sacrificial spin-on glass (SOG) etching in non-straight microchannels using hydrofluoric acid, 60371O (4 January 2006); doi: 10.1117/12.638572
Proc. SPIE 6037, Fabrication of submicron three-dimensional structure by plane-pattern to the cross-section transfer method using synchrotron radiation lithography, 60371R (4 January 2006); doi: 10.1117/12.638600
Proc. SPIE 6037, Optical scanning devices based on PZT thick films formed by aerosol deposition method, 60371S (4 January 2006); doi: 10.1117/12.638489
Proc. SPIE 6037, Nanocontact printing of nonplanar substrate by using flexible h-PDMS stamp, 60371T (4 January 2006); doi: 10.1117/12.638436
Proc. SPIE 6037, Combinatorial deposition by r.f. magnetron sputtering using subdivided powder targets as new development method for thin-film phosphors, 60371U (4 January 2006); doi: 10.1117/12.638724