PROCEEDINGS VOLUME 6113
MOEMS-MEMS 2006 MICRO AND NANOFABRICATION | 21-27 JANUARY 2006
MEMS/MOEMS Components and Their Applications III
MOEMS-MEMS 2006 MICRO AND NANOFABRICATION
21-27 January 2006
San Jose, California, United States
Gyro and Inertial Sensors
Proc. SPIE 6113, Silicon on insulator inertial MEMS device processing, 611302 (23 January 2006); doi: 10.1117/12.657138
Proc. SPIE 6113, The effects of collateral modes on MEMS gyro bias, 611304 (23 January 2006); doi: 10.1117/12.648428
Proc. SPIE 6113, A novel excitation scheme for MEMS gyroscopes using parametric pumping for near inertial grade performance, 611305 (23 January 2006); doi: 10.1117/12.656323
Proc. SPIE 6113, Markets and applications for MEMS inertial sensors, 611306 (23 January 2006); doi: 10.1117/12.647765
Applications of MEMS AO I
Proc. SPIE 6113, MEMS for the next generation of giant astronomical telescopes, 611307 (23 January 2006); doi: 10.1117/12.659159
Proc. SPIE 6113, MEMS-based extreme adaptive optics for planet detection, 611308 (23 January 2006); doi: 10.1117/12.657463
Proc. SPIE 6113, Requirements for MEMS mirrors for adaptive optics in the eye, 611309 (23 January 2006); doi: 10.1117/12.653409
Proc. SPIE 6113, MEMS deformable mirror for ophthalmic imaging, 61130A (23 January 2006); doi: 10.1117/12.657611
Proc. SPIE 6113, Varifocal optics for a novel accommodative intraocular lens, 61130B (23 January 2006); doi: 10.1117/12.658280
Proc. SPIE 6113, Adaptive laser resonator control with deformable MOEMS mirrors, 61130C (23 January 2006); doi: 10.1117/12.652064
Proc. SPIE 6113, Tiny bimorph mirrors for laser beam control, 61130D (23 January 2006); doi: 10.1117/12.658201
MEMS AO Systems and Performance
Proc. SPIE 6113, MEMs based adaptive optics systems: the Naval Research Laboratory Program, 61130E (23 January 2006); doi: 10.1117/12.649286
Proc. SPIE 6113, Frequency stability of combined wavefront corrective elements for adaptive optics, 61130F (23 January 2006); doi: 10.1117/12.647270
Proc. SPIE 6113, Wavefront-sensorless aberration correction of extended objects using a MEMS deformable mirror, 61130G (23 January 2006); doi: 10.1117/12.653415
Proc. SPIE 6113, Characterization of contour shapes achievable with a MEMS deformable mirror, 61130H (23 January 2006); doi: 10.1117/12.651924
Proc. SPIE 6113, Extreme adaptive optics testbed: performance and characterization of a 1024-MEMS deformable mirror, 61130I (23 January 2006); doi: 10.1117/12.648977
MEMS AO Devices I
Proc. SPIE 6113, MEMS analog light processing: an enabling technology for adaptive optical phase control, 61130K (23 January 2006); doi: 10.1117/12.651731
Proc. SPIE 6113, Performance of a high-stroke segmented MEMS deformable-mirror technology, 61130L (23 January 2006); doi: 10.1117/12.647884
Proc. SPIE 6113, High-performance adaptive optics using microscale assembly, 61130M (23 January 2006); doi: 10.1117/12.658058
MEMS AO Devices II
Proc. SPIE 6113, A novel elevating structure design applied on the motion behavior analysis of micro optical devices by CMOS-MEMS Process, 61130N (23 January 2006); doi: 10.1117/12.645027
Proc. SPIE 6113, Design and development of a 329-segment tip-tilt piston mirror array for space-based adaptive optics, 61130O (23 January 2006); doi: 10.1117/12.651373
Proc. SPIE 6113, MEMS actuated deformable mirror, 61130P (23 January 2006); doi: 10.1117/12.657667
Proc. SPIE 6113, Large scale nanolaminate deformable mirror, 61130Q (23 January 2006); doi: 10.1117/12.657666
Proc. SPIE 6113, Polymer-based micro-deformable mirror for adaptive optics, 61130R (23 January 2006); doi: 10.1117/12.647833
Proc. SPIE 6113, Poly-SiGe MEMS actuators for adaptive optics, 61130S (23 January 2006); doi: 10.1117/12.652247
Proc. SPIE 6113, Large-stroke self-aligned vertical comb drive actuators for adaptive optics applications, 61130T (23 January 2006); doi: 10.1117/12.656508
Proc. SPIE 6113, Large stroke actuators for adaptive optics, 61130U (23 January 2006); doi: 10.1117/12.644796
Electronics and Controls for MEMS AO
Proc. SPIE 6113, MEMS deformable mirror embedded wavefront sensing and control system, 61130V (23 January 2006); doi: 10.1117/12.658037
Proc. SPIE 6113, USB-based controller for generic MEM device deformable mirrors, 61130W (23 January 2006); doi: 10.1117/12.647255
Proc. SPIE 6113, Chip-scale integrated driver for electrostatic DM control, 61130X (23 January 2006); doi: 10.1117/12.651328
Poster Session
Proc. SPIE 6113, Microfabrication and test of pre-aligned fiber bundle couplers with integrated microlens array, 61130Y (23 January 2006); doi: 10.1117/12.650177
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