PROCEEDINGS VOLUME 6114
MOEMS-MEMS 2006 MICRO AND NANOFABRICATION | 21-27 JANUARY 2006
MOEMS Display, Imaging, and Miniaturized Microsystems IV
MOEMS-MEMS 2006 MICRO AND NANOFABRICATION
21-27 January 2006
San Jose, California, United States
Displays and Spatial Light Modulators I
Proc. SPIE 6114, High-performance blazed GxL device for large-area laser projector, 611401 (23 January 2006); doi: 10.1117/12.645463
Proc. SPIE 6114, Large-scale drift-free monocrystalline silicon micromirror arrays made by wafer bonding, 611402 (23 January 2006); doi: 10.1117/12.646182
Displays and Spatial Light Modulators II
Proc. SPIE 6114, Perspective of MEMS based raster scanning display and its requirements for success, 611403 (23 January 2006); doi: 10.1117/12.659058
Proc. SPIE 6114, Global flatness of spatial light modulators, 611404 (23 January 2006); doi: 10.1117/12.644580
Proc. SPIE 6114, New applications for MOEMS, 611405 (23 January 2006); doi: 10.1117/12.634755
Proc. SPIE 6114, MEMS microdisplays: overview and markets, 611406 (23 January 2006); doi: 10.1117/12.645728
Spectrometers and Diffractive Elements
Proc. SPIE 6114, Development of high-efficient NIR-scanning gratings for spectroscopic applications, 611407 (23 January 2006); doi: 10.1117/12.644481
Proc. SPIE 6114, High-fill factor micro-mirror array for multi object spectroscopy, 611408 (23 January 2006); doi: 10.1117/12.647493
Proc. SPIE 6114, Principle and applications of a new MOEMS spectrometer, 611409 (23 January 2006); doi: 10.1117/12.648909
Proc. SPIE 6114, Design of a tunable Fabry-Perot interferometer/photodiode (FPI/PD) spectral image sensor in visible wavelength range, 61140A (23 January 2006); doi: 10.1117/12.645278
Telecom and Other Applications
Proc. SPIE 6114, Tunable microcavities in planar photonic crystals, 61140B (23 January 2006); doi: 10.1117/12.659901
Proc. SPIE 6114, Deformable MEMS grating for wide tunability and high operating speed, 61140C (23 January 2006); doi: 10.1117/12.644523
Proc. SPIE 6114, Integrated Heterodyne MOEMS for detection of low intensity signals, 61140D (23 January 2006); doi: 10.1117/12.647826
Proc. SPIE 6114, Optical characterization of 9x9 optical cross connect utilizing silicon lens scanners with spider-leg actuators, 61140E (23 January 2006); doi: 10.1117/12.645631
Proc. SPIE 6114, Characterization and fabrication of MOEMS-based diffractive optical switching elements, 61140F (23 January 2006); doi: 10.1117/12.647806
Proc. SPIE 6114, Design, characterization, and control of a large aperture MOEMS Fabry-Perot tunable infrared filter, 61140G (23 January 2006); doi: 10.1117/12.641266
Scanners and Actuator Developments
Proc. SPIE 6114, Highly reflective optical coatings for high-power applications of micro scanning mirrors in the UV-VIS-NIR spectral region, 61140H (23 January 2006); doi: 10.1117/12.644626
Proc. SPIE 6114, Micro-actuator with extended analog deflection at low drive voltage, 61140I (23 January 2006); doi: 10.1117/12.645826
Proc. SPIE 6114, Extended damping model for out-of-plane comb driven micromirrors, 61140J (23 January 2006); doi: 10.1117/12.645981
Proc. SPIE 6114, A new deformable mirror for adaptive optics, 61140K (23 January 2006); doi: 10.1117/12.651659
Scanners and Imaging Systems
Proc. SPIE 6114, Scanning 2D micromirror with enhanced flatness at high frequency, 61140L (23 January 2006); doi: 10.1117/12.654478
Proc. SPIE 6114, Digital photographic imaging using MOEMS, 61140N (23 January 2006); doi: 10.1117/12.646163
Proc. SPIE 6114, Investigation of optical information for a single micro grating device combined with MATA by SMart process, 61140O (23 January 2006); doi: 10.1117/12.645040
Poster Session
Proc. SPIE 6114, Laterally driven electrostatic actuators with extended travel range, 61140P (23 January 2006); doi: 10.1117/12.645380
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